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arXiv:1902.10956 · AIP Advances

A controllable superconducting electromechanical oscillator with a suspended membrane

Yongchao Li, Jiang-Shan Tang, Junliang Jiang, Jiazheng Pan, Xin Dai, Xingyu Wei, Yapeng Lu, Sheng Lu, Xuecou Tu, Huabing Wang, Keyu Xia, Guozhu Sun, Pei-Heng Wu

Published Jan 1, 2019• 7 citations
arXivHTMLPDF

Abstract

We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases, nonmonotonic dependence of the resonance frequency of the mechanical oscillator on the driving power has been observed. We also demonstrate the optical switching of the resonance frequency of the mechanical oscillator. Theoretical models for qualitative understanding of our experimental observations are presented. Our experiment may pave the way for the application of a mechanical oscillator with its resonance frequency controlled by the electromagnetic and/or optical fields, such as a microwave-optical interface and a controllable element in a superqubit-mechanical oscillator hybrid system.

DOI
10.1063/1.5083647

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We fabricate a microscale electromechanical system, in which a suspended superconducting membrane, treated as a mechanical oscillator, capacitively couples to a superconducting microwave resonator. As the microwave driving power increases, nonmonotonic dependence of the resonance frequency of the mechanical oscillator on the driving power has been observed. We also demonstrate the optical switching of the resonance frequency of the mechanical oscillator. Theoretical models for qualitative understanding of our experimental observations are presented. Our experiment may pave the way for the application of a mechanical oscillator with its resonance frequency controlled by the electromagnetic and/or optical fields, such as a microwave-optical interface and a controllable element in a superqubit-mechanical oscillator hybrid system.
Mechanical oscillators can be implemented to store and transfer information or to build hybrid systems. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor, in which diluted photoresist or electron beam photoresist is used as sacrificial layers. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillators can be used as the capacitor of a superconducting qubit to form a coupled system. In order to control the resonant frequency of the mechanical oscillator and the microwave resonator, we introduce a dc voltage bias between the upper and lower plates of the capacitor. We analyze the electromechanical coupling such as pull-in effect and experimentally demonstrate the dependence of the resonant frequency on the applied dc voltage. These results will contribute to the design and fabrication of hybrid systems comprising voltage-controlled mechanical oscillators and other systems.
Mechanical oscillators can be implemented to store and/or transfer information. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor using the diluted photoresist or electron beam photoresist as a sacrificial layer. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillator can be used as the capacitor of a superconducting qubit to form a coupled system. Another way to transfer information between a mechanical oscillator and a superconducting qubit is to take advantage of a superconducting microwave resonator such as a coplanar waveguide resonator. In order to control the resonant frequency of the resonators, we introduce a DC voltage bias between the upper and lower plates of the capacitor. We demonstrate the dependence of the resonant frequency on the applied DC voltage.
Summary form only given. The motion of a micromechanical resonator coupled simultaneously to a high-finesse optical cavity and a microwave resonator can be used to transduce the fragile quantum states generated in the realm of microwave superconducting circuits into optical photons that can transport quantum information over large distances in telecom optical fibers at room temperature. We have engineered the optical and mechanical properties of thin membranes patterned in a suspended high-stress Si3N4 film to realize such a hybrid opto-electro-mechanical system. An optical Fabry-Perot cavity with a finesse exceeding 12 000 was realized between a highly reflective photonic crystal patch realized on the suspended membrane and a conventional high-reflectivity mirror. The electromechanical coupling with a nearby planar superconducting circuit is achieved by approaching the membrane at a sub-micron distance from an on-chip interdigitated capacitor. By operating the hybrid opto-electro-mechanical system in a cryogenic environment, the photon-phonon swap rates between microwave, mechanical, and optical degrees of freedom is expected to overcome the mechanical decoherence rate. An artist view of the device envisioned is depicted on Figure 1.
Microscale and nanoscale mechanical resonators have been used in advanced technological applications, from high precision time keeping and mass sensing, to processing high frequency signals in mobile communications. In the last few decades, they have been an important part of progress in the field of quantum information and metrology and have been proposed as quantum memories or transducers for measuring or connecting different types of quantum systems. The field of cavity optomechanics and electromechanics is concerned with coupling the electromagnetic field of a resonant optical cavity or electrical circuit to mechanical motion. These systems provide potential means to control and engineer the state of a mechanical object at the quantum level. This thesis contains the description of mechanical systems in megahertz to a few hundred megahertz frequency range formed by nano-fabricating photonic, phononic, and electrical circuits on a chip. These structures are designed to provide a large radiation pressure coupling between mechanical motion and electromagnetic fields to address and manipulate motional degrees of freedom. Qualitatively novel quantum effects are expected when one takes a step beyond linear coupling and exploits higher order interactions. To that end, we integrate electrical, mechanical and photonic structures in a multimode photonic crystal structure to observe "x2-coupling", where the optical cavity frequency is coupled to the square of the mechanical displacement. Moreover, we have developed two integrated on-chip platforms based on Si3N4 and Si nanomembranes capable of interfacing superconducting qubits and optical photons and realizing reversible microwave-to-optical conversion. We employ radiation pressure to cool these mechanical resonators to their quantum ground state. Finally, we demonstrate a form of electromechanical crystal for coupling microwave photons and hypersonic phonons of frequency ωm/2π = 0.425 GHz by capacitively coupling a phononic crystal acoustic cavity to a superconducting microwave resonator. Moving to higher frequency acoustic cavities not only facilitates the integration of electromechanical circuits and nanophotonic systems capable of operation in the resolved sideband limit of optomechanics for noise-free quantum signal conversion, but it opens up the possibility of using phonons as information carriers via phononic circuits. Utilizing a two-photon resonance condition for efficient microwave pumping and phononic bandgap shield to eliminate acoustic radiation, we achieve large cooperative electromechanical coupling (C ≈ 30) and intrinsic decay time of 2.3 ms. Moreover, electrical read-out of the phonon occupancy shows that the acoustic mode thermalizes close to its quantum ground-state of motion (phonon occupancy nm=1.5) at a fridge temperature of Tf = 10 mK. We conclude by considering several designs and fabrication improvements to the hypersonic electromechanical crystals that would enable them to perform quantum conversion between the electrical and acoustic domain.
This thesis describes the development of a hybrid quantum electromechanical system. In this system the mechanical resonator is capacitively coupled to a superconducting transmon which is embedded in a superconducting coplanar waveguide (CPW) cavity. The difficulty of achieving high quality of superconducting qubit in a high-quality voltage-biased cavity is overcome by integrating a superconducting reflective T-filter to the cavity. Further spectroscopic and pulsed measurements of the hybrid system demonstrate interactions between the ultra-high frequency mechanical resonator and transmon qubit. The noise of mechanical resonator close to ground state is measured by looking at the spectroscopy of the transmon. At last, fabrication and tests of membrane resonators are discussed.
We present experiments aimed at the creation and study of non-Gaussian states of a mesoscopic mechanical oscillator. On the mechanical front, we have developped, fabricated and operated phononic-crystal SiN membranes, with mechanical quality factors in the 10^8 to 10^9 range. To allow resonant coupling of the membrane (typically in the MHz band) to a two-level system, we have developped a heavy fluxonium superconducting qubit architecture, with a transition frequeny as low as 1.8 MHz.. Design, fabrication and operation of the qubit in a 10 mK environment are discussed, together with a charge sensing experiment The long-term goal of these experiments is to create and explore non-Gaussian states of an electromechanical membrane.