Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Applied Physics Letters

Ultrastable millimeter-wave kinetic inductance detectors

Michael R. Vissers, Jason E. Austermann, M. Malnou, Christopher M. McKenney, Bradley Dober, Johannes Hubmayr, Gene C Hilton, Joel N. Ullom, J. Gao

Published Jan 21, 2020• 16 citations
Publisher

Abstract

We demonstrate microwave kinetic inductance detectors (MKIDs) whose sensitivity is limited by photon noise at signal frequencies as low as 50 mHz. The subhertz part of the detection spectrum is important for contemporary millimeter-wave science, yet photon noise below 1 Hz in MKIDs has not previously been unambiguously demonstrated. These feedhorn-coupled detectors are sensitive over a 40% fractional bandwidth centered on λ = 2 mm, are dual-polarization-sensitive, and consist of lumped-element superconducting resonators fabricated from a hybrid of stoichiometric TiN and Al films together with an amorphous-Si passivation layer. When observing a 7 K, 3.8 pW thermal load and employing no signal modulation scheme, the measured noise spectrum is white down to 50 mHz and has an amplitude consistent with photon noise. These results have implications for the development of large-format, polarization-sensitive, millimeter-wave imagers.

DOI
10.1063/1.5138122

Related papers

Millimeter-wave kinetic inductance detectors with no 1/f noise

Johannes Hubmayr, Jason E. Austermann, Bradley Dober +6 more

We demonstrate microwave kinetic inductance detectors (MKIDs) whose sensitivity is limited by photon noise at 50 mHz signal frequencies. The sub-Hz part of the detection spectrum is important for millimeter-wave instruments, yet photon noise below 1 Hz in MKIDs has not previously been demonstrated unambiguously. Devices are feedhorn-coupled, direct-absorber-type and consist of lumped-element superconducting resonators fabricated from a hybrid of stoichiometric TiN, Al, and an amorphous-Si passivation layer. Viewing a 7K thermal load and a passband centered on 2mm, the device noise spectrum is white down to 50 mHz and has an amplitude consistent with photon noise. We will present these measurements and discuss the multiple design choices that lead to the result.

Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI•Dec 12, 2020•1 citation

Photon-noise limited sensitivity in titanium nitride kinetic inductance detectors

J. Hubmayr, J. Beall, D. Becker +14 more

We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of 1.4 K. Micro-machining of the silicon-on-insulator wafer backside creates a quarter-wavelength backshort optimized for efficient coupling at 250 μm. Using frequency read out and when viewing a variable temperature blackbody source, we measure device noise consistent with photon noise when the incident optical power is >0.5 pW, corresponding to noise equivalent powers >3×10−17 W/Hz. This sensitivity makes these devices suitable for broadband photometric applications at these wavelengths.

arXiv:1406.4010•Applied Physics Letters•Feb 16, 2015•79 citations

Performance of hybrid NbTiN-Al microwave kinetic inductance detectors as direct detectors for sub-millimeter astronomy

R. M. J. Janssen, J. J. A. Baselmans, Akira Endo +4 more

In the next decades millimeter and sub-mm astronomy requires large format imaging arrays and broad-band spectrometers to complement the high spatial and spectral resolution of the Atacama Large Millimeter/submillimeter Array. The desired sensors for these instruments should have a background limited sensitivity and a high optical efficiency and enable arrays thousands of pixels in size. Hybrid microwave kinetic inductance detectors consisting of NbTiN and Al have shown to satisfy these requirements. We present the second generation hybrid NbTiN-Al MKIDs, which are photon noise limited in both phase and amplitude readout for loading levels P850GHz < 10 fW. Thanks to the increased responsivity, the photon noise level achieved in phase allows us to simultaneously read out approximately 8000 pixels using state-of-the-art electronics. In addition, the choice of superconducting materials and the use of a Si lens in combination with a planar antenna gives these resonators the flexibility to operate within the frequency range 0:09 < v < 1:1 THz. Given these specifications, hybrid NbTiN-Al MKIDs will enable astronomically usable kilopixel arrays for sub-mm imaging and moderate resolution spectroscopy.

arXiv:1408.3314•Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE•Jul 23, 2014•14 citations

Characterization of distributed and lumped-element THz MKIDs

Wei-Tao Lv, Liang-si Zhou, Jing Li +2 more

Microwave Kinetic Inductance Detectors (MKIDs), just like a planar resonance cavity resonating at a microwave frequency, are emerging as a kind of high-sensitivity detector suitable for large format arrays at terahertz (THz) wavelengths. There are two types of MKIDs, namely distributed (or antenna-coupled) MKIDs and lumped-element MKIDs (aka LeKIDs). Various superconducting thin films (such as Al, TiN, NbTiN, NbN, and Nb) have been investigated for MKIDs. They do work so long as the detected photon energy exceeds their energy gap, but their response and noise behaviors are yet to be fully understood. Here we report on the design, fabrication, and characterization of distributed and lumped-element MKIDs made of NbTiN superconducting film. Detailed simulation and measurement results will be presented.

•Nov 24, 2021•0 citations

Microwave Kinetic Inductance Detector with Selective Polarization Coupling

Edward J. Wollack, Kongpop U-yen, Thomas R. Stevenson +3 more

A conventional low-noise detector requires a technique to both absorb incident power and convert it to an electrical signal at cryogenic temperatures. This innovation combines low-noise detector and readout functionality into one device while maintaining high absorption, controlled polarization sensitivity, and broadband detection capability. The resulting far-infrared detectors can be read out with a simple approach, which is compact and minimizes thermal loading. The proposed microwave kinetic inductance detector (MKID) consists of three basic elements. The first is the absorptive section in which the incident power is coupled to a superconducting resonator at far-infrared frequency above its superconducting critical frequency (where superconductor becomes normal conductor). This absorber's shape effectively absorbs signals in the desired polarization state and is resonant at the radio frequency (RF) used for readout of the device. Control over the metal film used in the absorber allows realization of structures with either a 50% broadband or 100% resonance absorptance over a 30% fractional bandwidth. The second element is a microwave resonator - which is realized from the thin metal films used to make the absorber as transmission lines - whose resonance frequency changes due to a variation in its kinetic inductance. The resonator's kinetic inductance is a function of the power absorbed by the device. A low-loss dielectric (mono-crystalline silicon) is used in a parallel-plate transmission line structure to realize the desired superconducting resonators. There is negligible coupling among the adjacent elements used to define the polarization sensitivity of each detector. The final component of the device is a microwave transmission line, which is coupled to the resonator, and allows detection of changes in resonance frequency for each detector in the focal plane array. The spiral shape of the detector's absorber allows incident power with two polarizations to couple to the detector equally. A stepped impedance resonator was used that allows the incident power absorbed in the detecting membrane area to be uniformly distributed in the detector's transmission line at the RF readout frequency. This maximizes the sensitivity of the detector. The signal is read out via a frequency multiplexing technique that requires a minimum number of interface transmission lines for readout. This reduces the packaging complexity and coupling to the device's thermal environment.

•Dec 1, 2013•0 citations

Antenna-coupled Microwave Kinetic Inductance detectors (MKIDs) for mm and submm imaging arrays

Anastasios Vayonakis, James A. Schlaerth, S. Kumar +9 more

We present results from completely lithographic antenna-coupled Microwave Kinetic Inductance detectors (MKIDs). MKIDs are superconducting resonators with resonant frequency and quality-factor which are highly sensitive to changes in the density of the quasiparticle population which occurs when photons above the superconducting gap energy are absorbed. The resonators are coupled to submm light through on-chip phased-array slot antennas. Each planar antenna consists of an array of N long slots which are fed along their length at M points. The resulting N*M feed points are combined in-phase using a binary summing tree made of low-loss superconducting microstrip lines. Due to its large size, the resulting planar antenna produces a narrow beam pattern and can therefore be used without additional optical coupling elements such as feedhorns or substrate lenses. The output of the antenna is a single superconducting thin-film microstrip line which can be efficiently coupled to one (or more) kinetic inductance coplanar waveguide resonators to produce a single (or multi-color) pixel in an imaging focal plane array, using in-line lumped element lithographic band-pass filters. Such highly integrated architectures can be easily fabricated on a single substrate, and many detectors can be frequency multiplexed through coupling to a single feedline. Microwave readout provides a lot of bandwidth per detector, allowing a large number of pixels to be read using a single cryogenic microwave amplifier and warm readout electronics.

Softwaretechnik-Trends•Apr 1, 2008•1 citation
We demonstrate microwave kinetic inductance detectors (MKIDs) whose sensitivity is limited by photon noise at signal frequencies as low as 50 mHz. The subhertz part of the detection spectrum is important for contemporary millimeter-wave science, yet photon noise below 1 Hz in MKIDs has not previously been unambiguously demonstrated. These feedhorn-coupled detectors are sensitive over a 40% fractional bandwidth centered on λ = 2 mm, are dual-polarization-sensitive, and consist of lumped-element superconducting resonators fabricated from a hybrid of stoichiometric TiN and Al films together with an amorphous-Si passivation layer. When observing a 7 K, 3.8 pW thermal load and employing no signal modulation scheme, the measured noise spectrum is white down to 50 mHz and has an amplitude consistent with photon noise. These results have implications for the development of large-format, polarization-sensitive, millimeter-wave imagers.
We demonstrate microwave kinetic inductance detectors (MKIDs) whose sensitivity is limited by photon noise at 50 mHz signal frequencies. The sub-Hz part of the detection spectrum is important for millimeter-wave instruments, yet photon noise below 1 Hz in MKIDs has not previously been demonstrated unambiguously. Devices are feedhorn-coupled, direct-absorber-type and consist of lumped-element superconducting resonators fabricated from a hybrid of stoichiometric TiN, Al, and an amorphous-Si passivation layer. Viewing a 7K thermal load and a passband centered on 2mm, the device noise spectrum is white down to 50 mHz and has an amplitude consistent with photon noise. We will present these measurements and discuss the multiple design choices that lead to the result.
We demonstrate photon-noise limited performance at sub-millimeter wavelengths in feedhorn-coupled, microwave kinetic inductance detectors made of a TiN/Ti/TiN trilayer superconducting film, tuned to have a transition temperature of 1.4 K. Micro-machining of the silicon-on-insulator wafer backside creates a quarter-wavelength backshort optimized for efficient coupling at 250 μm. Using frequency read out and when viewing a variable temperature blackbody source, we measure device noise consistent with photon noise when the incident optical power is >0.5 pW, corresponding to noise equivalent powers >3×10−17 W/Hz. This sensitivity makes these devices suitable for broadband photometric applications at these wavelengths.
In the next decades millimeter and sub-mm astronomy requires large format imaging arrays and broad-band spectrometers to complement the high spatial and spectral resolution of the Atacama Large Millimeter/submillimeter Array. The desired sensors for these instruments should have a background limited sensitivity and a high optical efficiency and enable arrays thousands of pixels in size. Hybrid microwave kinetic inductance detectors consisting of NbTiN and Al have shown to satisfy these requirements. We present the second generation hybrid NbTiN-Al MKIDs, which are photon noise limited in both phase and amplitude readout for loading levels P850GHz < 10 fW. Thanks to the increased responsivity, the photon noise level achieved in phase allows us to simultaneously read out approximately 8000 pixels using state-of-the-art electronics. In addition, the choice of superconducting materials and the use of a Si lens in combination with a planar antenna gives these resonators the flexibility to operate within the frequency range 0:09 < v < 1:1 THz. Given these specifications, hybrid NbTiN-Al MKIDs will enable astronomically usable kilopixel arrays for sub-mm imaging and moderate resolution spectroscopy.
Microwave Kinetic Inductance Detectors (MKIDs), just like a planar resonance cavity resonating at a microwave frequency, are emerging as a kind of high-sensitivity detector suitable for large format arrays at terahertz (THz) wavelengths. There are two types of MKIDs, namely distributed (or antenna-coupled) MKIDs and lumped-element MKIDs (aka LeKIDs). Various superconducting thin films (such as Al, TiN, NbTiN, NbN, and Nb) have been investigated for MKIDs. They do work so long as the detected photon energy exceeds their energy gap, but their response and noise behaviors are yet to be fully understood. Here we report on the design, fabrication, and characterization of distributed and lumped-element MKIDs made of NbTiN superconducting film. Detailed simulation and measurement results will be presented.
A conventional low-noise detector requires a technique to both absorb incident power and convert it to an electrical signal at cryogenic temperatures. This innovation combines low-noise detector and readout functionality into one device while maintaining high absorption, controlled polarization sensitivity, and broadband detection capability. The resulting far-infrared detectors can be read out with a simple approach, which is compact and minimizes thermal loading. The proposed microwave kinetic inductance detector (MKID) consists of three basic elements. The first is the absorptive section in which the incident power is coupled to a superconducting resonator at far-infrared frequency above its superconducting critical frequency (where superconductor becomes normal conductor). This absorber's shape effectively absorbs signals in the desired polarization state and is resonant at the radio frequency (RF) used for readout of the device. Control over the metal film used in the absorber allows realization of structures with either a 50% broadband or 100% resonance absorptance over a 30% fractional bandwidth. The second element is a microwave resonator - which is realized from the thin metal films used to make the absorber as transmission lines - whose resonance frequency changes due to a variation in its kinetic inductance. The resonator's kinetic inductance is a function of the power absorbed by the device. A low-loss dielectric (mono-crystalline silicon) is used in a parallel-plate transmission line structure to realize the desired superconducting resonators. There is negligible coupling among the adjacent elements used to define the polarization sensitivity of each detector. The final component of the device is a microwave transmission line, which is coupled to the resonator, and allows detection of changes in resonance frequency for each detector in the focal plane array. The spiral shape of the detector's absorber allows incident power with two polarizations to couple to the detector equally. A stepped impedance resonator was used that allows the incident power absorbed in the detecting membrane area to be uniformly distributed in the detector's transmission line at the RF readout frequency. This maximizes the sensitivity of the detector. The signal is read out via a frequency multiplexing technique that requires a minimum number of interface transmission lines for readout. This reduces the packaging complexity and coupling to the device's thermal environment.
We present results from completely lithographic antenna-coupled Microwave Kinetic Inductance detectors (MKIDs). MKIDs are superconducting resonators with resonant frequency and quality-factor which are highly sensitive to changes in the density of the quasiparticle population which occurs when photons above the superconducting gap energy are absorbed. The resonators are coupled to submm light through on-chip phased-array slot antennas. Each planar antenna consists of an array of N long slots which are fed along their length at M points. The resulting N*M feed points are combined in-phase using a binary summing tree made of low-loss superconducting microstrip lines. Due to its large size, the resulting planar antenna produces a narrow beam pattern and can therefore be used without additional optical coupling elements such as feedhorns or substrate lenses. The output of the antenna is a single superconducting thin-film microstrip line which can be efficiently coupled to one (or more) kinetic inductance coplanar waveguide resonators to produce a single (or multi-color) pixel in an imaging focal plane array, using in-line lumped element lithographic band-pass filters. Such highly integrated architectures can be easily fabricated on a single substrate, and many detectors can be frequency multiplexed through coupling to a single feedline. Microwave readout provides a lot of bandwidth per detector, allowing a large number of pixels to be read using a single cryogenic microwave amplifier and warm readout electronics.