Design and fabrication of a silicon nitride ring resonator for on-chip broadband entangled photon sources
Zhenghao Yin, Kenta Sugiura, Xiaoyang Cheng, Hideaki Takashima, Ryo Okamoto, Shiyoshi Yokoyama, Shigeki Takeuchi
Abstract
Quantum entanglement in chip scale has been attracting the recent research interests. With the standard CMOS technology, it is possible to realize entangled photon sources in optical nonlinear micro ring resonators on the platform of silicon[1] or silicon nitride[3]. In order to extend the frequency entanglement range, i.e., to satisfy a broadband phase matching condition, it is essential to take the group velocity dispersion (GVD) into consideration during the four wave mixing process.