Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Japanese Journal of Applied Physics

Ultrahigh-quality-factor superconducting microwave resonator on diamond for quantum information processing

Moonjoo Lee

Published Sep 18, 2019• 6 citations
Publisher

Abstract

Abstract We report the development of an ultrahigh- Q aluminum superconducting microwave resonator on diamond. Our lumped-element LC resonator consists of a central inductive wire, interdigitated comb fingers and signal coupling pads. The resonance frequency of the ground-state mode is measured to be 2.80 GHz with a maximum internal quality factor of 1.0 × 10 6 at 20 mK. Replacing the micron-scale inductive wire with a nanometric one, our resonator will make it possible to detect and manipulate single solid-state qubits, e.g. nitrogen-vacancy centers, using single microwave photons.

DOI
10.7567/1347-4065/ab45ac

Related papers

Development of high quality superconducting resonators for quantum device applications

Dong-Gwang Ha, Seon Hoo Kim, So-Yeon Jun +5 more

We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.

IEEE International Superconductive Electronics Conference (ISEC)•Jul 1, 2013•0 citations

Design and Modeling of Double-Fold Superconducting High-Q Coplanar Waveguide Resonators for Quantum Applications

Jagmohan Singh, Hongxiang Shen, Nobuyuki Yoshikawa +2 more

In this paper, we present a novel design of a compact, double-fold half-wave superconducting coplanar waveguide resonator, specifically optimized for quantum readout. The geometry offers advantages in terms of scalability and allows for a more compact integration of qubits per unit area. The superconducting resonators are designed to operate within a fundamental frequency range of 1.9 GHz$-$1.95 GHz, utilizing both gap and finger coupling schemes. The devices are fabricated using thin aluminum films deposited on high-resistivity sapphire substrates. The proposed resonators exhibit quality factor (Q$_{L}$) of 2.9 ×$ 10^{5}$and 1.58 ×$10^{3}$for gap coupled and finger coupled, respectively, during experimental measurements. The simulated Q$_{L}$of single-folded meander line resonators are found to be 4.65 ×$10^{5}$and 258.42, for gap coupled and finger coupled, respectively, for comparison purpose at similar operating frequency. A comprehensive analysis of the microwave transmission spectra was conducted at cryogenic temperatures near 10 mK, across very high input drive powers ($-$30 dBm to$-$10 dBm). Experimental results show a good agreement with simulations and the equivalent lumped circuit model. Notably, the proposed design reduces the physical footprint of the resonator devices up to 28.2$\%$compared to conventional single-fold meandered structures. The resonators demonstrate strong potential for integrating qubits with readout and control buses in quantum information processing which require a Q$_{L}$between$10^{4}$$-$$10^{5}$. They also being well-suited for cryogenic detector applications that utilize microwave kinetic inductance detector (MKID) arrays in frequency multiplexing for different coupling schemes.

IEEE Transactions on Applied Superconductivity•Sep 1, 2025•3 citations

Compact Superconducting Microwave Resonators Based on Al-AlOx -Al Capacitors

Julia Zotova, Rui Wang, Alexander V. Semenov +5 more

We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum-aluminum oxide-aluminum (Al-${\mathrm{AlO}}_{x}$-Al) parallel-plate capacitors. The size of the resonators is only $0.04\phantom{\rule{0.2em}{0ex}}{\mathrm{mm}}^{2}$, which is more than one order smaller than the typical size of coplanar resonators ($1\phantom{\rule{0.2em}{0ex}}{\mathrm{mm}}^{2}$). The fabrication method we develop easily fits into the standard superconducting qubit fabrication process. We obtain capacitance per area $14\phantom{\rule{0.2em}{0ex}}\mathrm{fF}/\text{\ensuremath{\mu}}{\mathrm{m}}^{2}$ and the internal quality factor $1\ifmmode\times\else\texttimes\fi{}{10}^{3}$--$8\ifmmode\times\else\texttimes\fi{}{10}^{3}$ at the single-photon level. Our results show that such devices based on Al-${\mathrm{AlO}}_{x}$-Al capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and innovative types of qubits, such as $0\ensuremath{-}\ensuremath{\pi}$ qubit.

arXiv:2203.09592•Physical Review Applied•Apr 24, 2023•14 citations

Transmon qubits coupled to superconducting lumped element resonators

Baladitya Suri

I discuss the design, fabrication and measurement at millikelvin-temperatures of Al/AlO$_x$/Al Josephson junction-based transmon qubits coupled to superconducting thin-film lumped element microwave resonators made of aluminum on sapphire. The resonators had a center frequency of around $6\,$GHz, and a total quality factor ranging from 15,000 to 70,000 for the various devices. The area of the transmon junctions was about $150\, \mathrm{nm} \times 150\, \mathrm{nm}$ and with Josephson energy $E_J$ such that $10\,\text{GHz} \leq E_J / h \leq 30\,$GHz. The charging energy of the transmons arising mostly from the large interdigital shunt capacitance, was $E_c / h \approx 300\,$MHz. I present microwave spectroscopy of the devices in the strongly dispersive regime of circuit quantum electrodynamics. In this limit the ac Stark shift due to a single photon in the resonator is greater than the linewidth of the qubit transition. When the resonator is driven coherently using a coupler tone, the transmon spectrum reveals individual ``photon number'' peaks, each corresponding to a single additional photon in the resonator. Using a weighted average of the peak heights in the qubit spectrum, I calculated the average number of photons $\bar{n}$ in the resonator. I also observed a nonlinear variation of $\bar{n}$ with the applied power of the coupler tone $P_{rf}$. I studied this nonlinearity using numerical simulations and found good qualitative agreement with data. In the absence of a coherent drive on the resonator, a thermal population of $5.474\,$GHz photons in the resonator, at an effective temperature of $120\,$mK resulted in a weak $n=1$ thermal photon peak in the qubit spectrum. In the presence of independent coupler and probe tones, the $n=1$ thermal photon peak revealed an Autler-Townes splitting. The observed effect was explained accurately using the four lowest levels of the dispersively dressed Jaynes-Cummings transmon-resonator system, and numerical simulations of the steady-state master equation for the coupled system. I also present time-domain measurements on transmons coupled to lumped-element resonators. From $T_1$ and Rabi oscillation measurements, I found that my early transmon devices (called design LEv5) had lifetimes ($T_1 \sim 1\,\mu$s) limited by strong coupling to the $50\,\Omega$ transmission line. This coupling was characterized by the the rate of change of the Rabi oscillation frequency with the change in the drive voltage ($\mathrm{d}f_{Rabi}\, / \mathrm{d}V$) -- also termed the Rabi coupling to the drive. I studied the design of the transmon-resonator system using circuit analysis and microwave simulations with the aim being to reduce the Rabi coupling to the drive. By increasing the resonance frequency of the resonator $\omega_r/2\pi$ from 5.4$\,$GHz to 7.2$\,$GHz, lowering the coupling of the resonator to the transmission line and thereby increasing the external quality factor $Q_e$ from 20,000 to 70,000, and reducing the transmon-resonator coupling $g/2\pi$ from 70$\,$MHz to 40$\,$MHz, I reduced the Rabi coupling to the drive by an order of magnitude ($\sim$ factor of 20). The $T_1 \sim 4\,\mu$s of devices in the new design (LEv6) was longer than that of the early devices, but still much shorter than the lifetimes predicted from Rabi coupling, suggesting the presence of alternative sources of noise causing qubit relaxation. Microwave simulations and circuit analysis in the presence of a dielectric loss tangent $\tan \delta \simeq 5\times10^{-6}$ agree reasonably well with the measured $T_1$ values, suggesting that surface dielectric loss may be causing relaxation of transmons in the new designs.

•Jan 1, 2015•3 citations

Lumped element granular aluminum resonators with high kinetic inductances

Qing He, P. H. Ouyang, M. Dai +5 more

Recently, a new kind of distributed element superconducting resonators with granular aluminum (grAl) has been developed for circuit quantum electrodynamics. Given that lumped element resonators possess certain advantages over the distributed element ones, in this paper, we use a relatively simple micro-nanotechnology, without the etching process, to fabricate the designed lumped element superconducting grAl resonators. They are deposited on silicon substrates by DC magnetron sputtering of pure Al in an atmosphere of Ar and O2. By cryogenic microwave transmission measurements, at a temperature of 50 mK, we find that, compared with a usual Al resonator of the same size, such a device shows significantly strong nonlinearity and thus higher kinetic inductance. The noise features, quality factors, and temperature-dependence of the resonant frequencies have been investigated experimentally. It is believed that the lumped element superconducting resonators with high kinetic inductance demonstrated here could also be applied to superconducting quantum computation and photon counting in the future.

AIP Advances•Jun 1, 2021•4 citations

Coplanar waveguide resonators for circuit quantum electrodynamics

M. Göppl, A. Fragner, Matthias Baur +7 more

High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.

arXiv:0807.4094•Journal of Applied Physics•Dec 1, 2008•370 citations
Abstract We report the development of an ultrahigh- Q aluminum superconducting microwave resonator on diamond. Our lumped-element LC resonator consists of a central inductive wire, interdigitated comb fingers and signal coupling pads. The resonance frequency of the ground-state mode is measured to be 2.80 GHz with a maximum internal quality factor of 1.0 × 10 6 at 20 mK. Replacing the micron-scale inductive wire with a nanometric one, our resonator will make it possible to detect and manipulate single solid-state qubits, e.g. nitrogen-vacancy centers, using single microwave photons.
We report our development on design, fabrication and characterization of various superconducting resonators for quantum device applications. The resonators are developed mainly for superconducting qubit implementation in circuit QED structure, but future application will include photon detectors such as microwave kinetic inductance detectors. First we designed and fabricated half-wavelength coplanar waveguide resonators with niobium thin film on a high resistive silicon wafer, with the fundamental frequencies in the range of 1 to 8 GHz. The loaded quality factors are controlled by the coupling capacitors, and the lower bound of the intrinsic quality factor was measured down to 7 mK in the dilution refrigerator. We have also designed quarter-wavelength resonators and lumped LC resonators coupled to a transmission line, and characterized multiple resonators in a single transmission line. For the 3D transmon qubit application, we designed and fabricated a rectangular box resonator with superconducting aluminum. The intrinsic quality factor of the box resonator exceeds three million at 7 mK. We will also present basic results on the integration of a transmon qubit in the superconducting resonator.
In this paper, we present a novel design of a compact, double-fold half-wave superconducting coplanar waveguide resonator, specifically optimized for quantum readout. The geometry offers advantages in terms of scalability and allows for a more compact integration of qubits per unit area. The superconducting resonators are designed to operate within a fundamental frequency range of 1.9 GHz$-1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q1.95 GHz, utilizing both gap and finger coupling schemes. The devices are fabricated using thin aluminum films deposited on high-resistivity sapphire substrates. The proposed resonators exhibit quality factor (Q1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q_{L})of2.9×) of 2.9 ×)of2.9× 10^{5}$and 1.58 ×10310^{3}103for gap coupled and finger coupled, respectively, during experimental measurements. The simulated QL_{L}L​of single-folded meander line resonators are found to be 4.65 ×10510^{5}105and 258.42, for gap coupled and finger coupled, respectively, for comparison purpose at similar operating frequency. A comprehensive analysis of the microwave transmission spectra was conducted at cryogenic temperatures near 10 mK, across very high input drive powers ($-30dBmto30 dBm to30dBmto-10dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.210 dBm). Experimental results show a good agreement with simulations and the equivalent lumped circuit model. Notably, the proposed design reduces the physical footprint of the resonator devices up to 28.210dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.2\%comparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQcompared to conventional single-fold meandered structures. The resonators demonstrate strong potential for integrating qubits with readout and control buses in quantum information processing which require a Qcomparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQ_{L}$between10410^{4}104−-−10510^{5}105. They also being well-suited for cryogenic detector applications that utilize microwave kinetic inductance detector (MKID) arrays in frequency multiplexing for different coupling schemes.
We address the scaling-up problem for superconducting quantum circuits by using lumped-element resonators based on an alternative fabrication method of aluminum-aluminum oxide-aluminum (Al-AlOx{\mathrm{AlO}}_{x}AlOx​-Al) parallel-plate capacitors. The size of the resonators is only 0.04mm20.04\phantom{\rule{0.2em}{0ex}}{\mathrm{mm}}^{2}0.04mm2, which is more than one order smaller than the typical size of coplanar resonators (1mm21\phantom{\rule{0.2em}{0ex}}{\mathrm{mm}}^{2}1mm2). The fabrication method we develop easily fits into the standard superconducting qubit fabrication process. We obtain capacitance per area $14\phantom{\rule{0.2em}{0ex}}\mathrm{fF}/\text{\ensuremath{\mu}}{\mathrm{m}}^{2}$ and the internal quality factor $1\ifmmode\times\else\texttimes\fi{}{10}^{3}$--$8\ifmmode\times\else\texttimes\fi{}{10}^{3}$ at the single-photon level. Our results show that such devices based on Al-AlOx{\mathrm{AlO}}_{x}AlOx​-Al capacitors could be further applied to the qubit readout scheme, including resonators, filters, amplifiers, as well as microwave metamaterials and innovative types of qubits, such as $0\ensuremath{-}\ensuremath{\pi}$ qubit.
I discuss the design, fabrication and measurement at millikelvin-temperatures of Al/AlOx_xx​/Al Josephson junction-based transmon qubits coupled to superconducting thin-film lumped element microwave resonators made of aluminum on sapphire. The resonators had a center frequency of around 6 6\,6GHz, and a total quality factor ranging from 15,000 to 70,000 for the various devices. The area of the transmon junctions was about 150 nm×150 nm150\, \mathrm{nm} \times 150\, \mathrm{nm}150nm×150nm and with Josephson energy EJE_JEJ​ such that 10 GHz≤EJ/h≤30 10\,\text{GHz} \leq E_J / h \leq 30\,10GHz≤EJ​/h≤30GHz. The charging energy of the transmons arising mostly from the large interdigital shunt capacitance, was Ec/h≈300 E_c / h \approx 300\,Ec​/h≈300MHz. I present microwave spectroscopy of the devices in the strongly dispersive regime of circuit quantum electrodynamics. In this limit the ac Stark shift due to a single photon in the resonator is greater than the linewidth of the qubit transition. When the resonator is driven coherently using a coupler tone, the transmon spectrum reveals individual ``photon number'' peaks, each corresponding to a single additional photon in the resonator. Using a weighted average of the peak heights in the qubit spectrum, I calculated the average number of photons nˉ\bar{n}nˉ in the resonator. I also observed a nonlinear variation of nˉ\bar{n}nˉ with the applied power of the coupler tone PrfP_{rf}Prf​. I studied this nonlinearity using numerical simulations and found good qualitative agreement with data. In the absence of a coherent drive on the resonator, a thermal population of 5.474 5.474\,5.474GHz photons in the resonator, at an effective temperature of 120 120\,120mK resulted in a weak n=1n=1n=1 thermal photon peak in the qubit spectrum. In the presence of independent coupler and probe tones, the n=1n=1n=1 thermal photon peak revealed an Autler-Townes splitting. The observed effect was explained accurately using the four lowest levels of the dispersively dressed Jaynes-Cummings transmon-resonator system, and numerical simulations of the steady-state master equation for the coupled system. I also present time-domain measurements on transmons coupled to lumped-element resonators. From T1T_1T1​ and Rabi oscillation measurements, I found that my early transmon devices (called design LEv5) had lifetimes (T1∼1 μT_1 \sim 1\,\muT1​∼1μs) limited by strong coupling to the 50 Ω50\,\Omega50Ω transmission line. This coupling was characterized by the the rate of change of the Rabi oscillation frequency with the change in the drive voltage (dfRabi /dV\mathrm{d}f_{Rabi}\, / \mathrm{d}VdfRabi​/dV) -- also termed the Rabi coupling to the drive. I studied the design of the transmon-resonator system using circuit analysis and microwave simulations with the aim being to reduce the Rabi coupling to the drive. By increasing the resonance frequency of the resonator ωr/2π\omega_r/2\piωr​/2π from 5.4 \,GHz to 7.2 \,GHz, lowering the coupling of the resonator to the transmission line and thereby increasing the external quality factor QeQ_eQe​ from 20,000 to 70,000, and reducing the transmon-resonator coupling g/2πg/2\pig/2π from 70 \,MHz to 40 \,MHz, I reduced the Rabi coupling to the drive by an order of magnitude (∼\sim∼ factor of 20). The T1∼4 μT_1 \sim 4\,\muT1​∼4μs of devices in the new design (LEv6) was longer than that of the early devices, but still much shorter than the lifetimes predicted from Rabi coupling, suggesting the presence of alternative sources of noise causing qubit relaxation. Microwave simulations and circuit analysis in the presence of a dielectric loss tangent tan⁡δ≃5×10−6\tan \delta \simeq 5\times10^{-6}tanδ≃5×10−6 agree reasonably well with the measured T1T_1T1​ values, suggesting that surface dielectric loss may be causing relaxation of transmons in the new designs.
Recently, a new kind of distributed element superconducting resonators with granular aluminum (grAl) has been developed for circuit quantum electrodynamics. Given that lumped element resonators possess certain advantages over the distributed element ones, in this paper, we use a relatively simple micro-nanotechnology, without the etching process, to fabricate the designed lumped element superconducting grAl resonators. They are deposited on silicon substrates by DC magnetron sputtering of pure Al in an atmosphere of Ar and O2. By cryogenic microwave transmission measurements, at a temperature of 50 mK, we find that, compared with a usual Al resonator of the same size, such a device shows significantly strong nonlinearity and thus higher kinetic inductance. The noise features, quality factors, and temperature-dependence of the resonant frequencies have been investigated experimentally. It is believed that the lumped element superconducting resonators with high kinetic inductance demonstrated here could also be applied to superconducting quantum computation and photon counting in the future.
High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.