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Applied Physics Express

Fabrication of nanostructures with complex spatial frequency via laser-focused atomic deposition

Tong Zhang, Cong Yin, Yuejin Zhao, Jin Qian, Jianbo Wang, Chunying Shi, Wei Li, Shi Li

Published Apr 10, 2019• 1 citation
Publisher

Abstract

In this paper we report on experiments generating complex one-dimensional nanoscale patterns with the laser-focused atomic deposition technique. A beam of collimated chromium atoms intersect with an exact on-resonant laser standing wave at 7 S 3 → 7 transition of 52 Cr. With the usage of proper laser intensity and reflectivity of the retroreflecting mirror, which are used to form the standing wave, nanolines with complex spatial frequencies (both λ /2 and λ /4) can be fabricated in one-step deposition. The proportion of the two structures could be 1:1.

DOI
10.7567/1882-0786/ab17ef

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In this paper we report on experiments generating complex one-dimensional nanoscale patterns with the laser-focused atomic deposition technique. A beam of collimated chromium atoms intersect with an exact on-resonant laser standing wave at 7 S 3 → 7 transition of 52 Cr. With the usage of proper laser intensity and reflectivity of the retroreflecting mirror, which are used to form the standing wave, nanolines with complex spatial frequencies (both λ /2 and λ /4) can be fabricated in one-step deposition. The proportion of the two structures could be 1:1.
The techniques of atom optics can be applied during the deposition of atoms onto a surface to produce nanostructures. A laser is used to form a standing wave intensity pattern in front of the substrate. An atom beam, which has been collimated by optical means, is focused onto the substrate by dipole forces from the standing wave pattern so as to deposit a series of lines spaced by half the laser wavelength. We describe the fabrication of a Cr nanograting formed using this new technique. The experimental arrangement for deposition and the optical collimation of the atom beam are described. Scanning electron microscopy (SEM) and atomic force microscopy (AFM) images of the resulting nanostructures are presented.
Laser-focused atomic deposition is a technique with which nearly resonant light is used to pattern an atom beam. To solve the problem that the result of laser-cooled atoms cannot be monitored during the 30-min depositing time, we present a three-hole mechanically precollimated aperture apparatus. A 425 nm laser light standing wave is used to focus a beam of chromium atoms to fabricate the nanoscale grating. The period of the grating is 213±0.1 nm, the height is 4 nm and the full width at half miximum is 64±6 nm.
Fundamental interaction processes between atoms and photons are exploited to control external degrees of freedom of the atoms. Laser light, when properly tuned near an atomic resonance, exerts such forces that the atoms are repelled from or attracted to the regions with low light intensities. We use these forces to manipulate atom beams on nanometer-scale. In the simplest approach to nanofabrication via atom optics, a laser standing wave serves as a 'mask' through which the atoms are deposited onto a substrate. In this thesis we first present the modeling results on the focusing properties of a standing wave laser field and on the surface diffusion and growth phenomena in laser-focused atomic deposition. The development of our experimental facility for laser-manipulated deposition with chromium atoms (based on the obtained modeling results) is reported on. Thereafter, we demonstrate laser manipulation of chromium atoms and fabrication of nanostructures with these atoms. The results obtained in Nijmegen and also those obtained in collaboration with J.J. McClelland's group from the National Institute of Standards and Technology (Gaithersburg, Maryland, USA) are analyzed with the aim of understanding the role of atom-optical and surface growth phenomena in the fabrication process of laser-focused nanostructures
We developed a laser-beam-controlled atom-manipulation system to deposit nanometric structure of atoms on a substrate. Atom beam of chromium is thermally evaporated and collimated with Doppler cooling technique using frequency-tuned laser diode. The gradient force is exerted on atoms by a standing wave over the substrate, and atoms are trapped in a low potential region of the standing wave. Consequently, a series of lines are formed on the substrate with the same periodicity to the standing wave. We present the analysis of trajectories of atoms in the light force potential to find conditions of the laser power, the sign and the degree of the detuning of the laser frequency from the resonance frequency of the atom, to reduce the width of the structure.