Bulletin of the American Physical Society
Silicon Hard-Stop Mesas for 3D Integration of Superconducting Qubits
David K. Kim, Danna Rosenberg, Brenda Osadchy, Greg Calusine, Rabindra Nath Das, Alexander J. Melville, Jonilyn Yoder, D. Yost, Livia M. Racz, William D. Oliver