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Scientific Reports

Engineering of Shallow Layers of Nitrogen Vacancy Colour Centres in Diamond Using Plasma Immersion Ion Implantation

Fahad S. Alghannam, Philip Hemmer

Published Apr 10, 2019• 19 citations
Publisher

Abstract

Sensing nano-scale magnetic field sources is at the heart of many applications in nano-science and biology. Given its very small size and high magnetic sensitivity, the nitrogen vacancy (NV) colour centre in diamond is one of the leading candidates for such applications. However, issues regarding the stability and performance of the NV centre near the diamond's surface are the major obstacle in the practical realization of theses sensors. So far, conventional implantation and growth techniques did not produce practical and/or repeatable solutions to this problem. In this report, we show first results of shallow layers of NVs created using plasma immersion ion implantation (PIII). We show, using Forster Resonance Energy Transfer (FRET), that most NVs are within 3.6 nm from the diamond's surface. Despite the relatively low quality of the diamond substrates used and the simplicity of our PIII system, we have an estimated magnetic sensitivity of around 2.29 μT/[Formula: see text].

DOI
10.1038/s41598-019-42323-6

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Sensing nano-scale magnetic field sources is at the heart of many applications in nano-science and biology. Given its very small size and high magnetic sensitivity, the nitrogen vacancy (NV) colour centre in diamond is one of the leading candidates for such applications. However, issues regarding the stability and performance of the NV centre near the diamond's surface are the major obstacle in the practical realization of theses sensors. So far, conventional implantation and growth techniques did not produce practical and/or repeatable solutions to this problem. In this report, we show first results of shallow layers of NVs created using plasma immersion ion implantation (PIII). We show, using Forster Resonance Energy Transfer (FRET), that most NVs are within 3.6 nm from the diamond's surface. Despite the relatively low quality of the diamond substrates used and the simplicity of our PIII system, we have an estimated magnetic sensitivity of around 2.29 μT/[Formula: see text].
Abstract The negatively charged nitrogen-vacancy centre (so-called NV-centre) in diamond is one of the most promising systems for applications in quantum technologies because of the possibility to optically manipulate and read out the spin state of this defect, even at room temperature. Nevertheless, obtaining high NV densities (>500 ppb) close to the surface (5–20 nm) while maintaining good spin properties remain challenging. In this work we rely on a versatile ion implantation system allowing both implanting nitrogen using N 2 + and creating vacancies with He + ion bombardment at variable energies and fluence to create shallow NV ensembles. By optimizing the ion irradiation conditions as well as the surface preparation prior to treatment we successfully increase the amount of created colour centres while demonstrating narrow magnetic resonance linewidths.
Creating dense and shallow nitrogen vacancy (NV) ensembles with good spin properties, is a prerequisite for developing diamond-based quantum sensors exhibiting better performance. Ion implantation is a key enabling tool for precisely controlling spatial localisation and density of NV colour centres in diamond. However, it suffers from a low creation yield, while higher ion fluences significantly damage the crystal lattice. In this work, we realize N2 ion implantation in the 30 to 40 keV range at high temperatures. At 800 C, NV ensemble photoluminescence emission is three to four times higher than room temperature implanted films, while narrow electron spin resonance linewidths of 1.5 MHz, comparable to well established implantation techniques are obtained. In addition, we found that ion fluences above 2E14 ions per cm2 can be used without graphitization of the diamond film, in contrast to room temperature implantation. This study opens promising perspectives in optimizing diamond films with implanted NV ensembles that could be integrated into quantum sensing devices.
The Nitrogen-Vacancy (NV) color center is a defect of diamond which behaves as an artificial atom hosted in a solid-state matrix. Due to its electron spin properties which can be read-out and manipulated as an elementary quantum system, the NV center has found a wide panel of applications as a qubit for quantum information and as a magnetic field sensor. However these applications require to control the properties of the NV centers and their localization. This doctoral thesis investigates methods allowing us to tailor the properties of NV centers by combining techniques for the implantation of nitrogen atoms and the plasma-assisted (CVD) synthesis of diamond.The manuscript is divided into six chapters. The first chapter summarizes the properties of the NV center which will set our objectives for the NV engineering. The second chapter will describe how arrays of NV centers can be created using Focused Ion Beam implantation. The results open a wide range of applications for the targeted creation of NV centers in diamond structures such as photonic crystals and tips. However the low kinetic energy which is required for achieving implantation within a spot of 10-nm diameter leads to shallow defects which properties are strongly affected by the sample surface. The third chapter investigates how the overgrowth of a diamond layer over implanted NV centers can remove the detrimental influence of the surface. The fourth and fifth chapters describe effective methods for NV center fabrication through the control of the CVD growth conditions of the hosting crystal. Thin layers with high NV doping can be grown and almost perfect control of the orientation of the NV axis can be achieved. With the goal to optimize the spin coherence properties, the sixth chapter investigates how the electron spin of the NV center can be protected from decoherence effects induced by magnetic noise due to the unpolarized spins in the diamond lattice.
Engineering shallow nitrogen-vacancy (NV) centers in diamond holds the key to unlocking new advances in nanoscale quantum sensing. We find that the creation of near-surface NVs through delta doping during diamond growth allows for tunable control over both NV depth confinement (with a twofold improvement relative to low-energy ion implantation) and NV density, ultimately resulting in highly-sensitive single defects and ensembles with coherence limited by NV-NV interactions. Additionally, we demonstrate the utility of our shallow delta-doped NVs by imaging magnetism in few-layer CrSBr, a two-dimensional magnet. We anticipate that the control afforded by near-surface delta doping will enable new developments in NV quantum sensing from nanoscale NMR to entanglement-enhanced metrology.
When the word diamond comes up, the majority of people thinks about engagement rings or gemstones. In fact, it is additionally, one of the most promising host materials for the implementation of advanced technology, exploiting the nature of quantum physics. Such quantum technologies have disruptive potential, ones the quantum effects can be applied in macroscopic, commercial products. The nitrogen-vacancy (NV) centre in diamond is a promising candidate to perform such tasks in the fields of quantum computation, quantum cryptography or metrology. Especially in the field of quantum sensing, the NV sensor impresses with nano-scale spatial resolution paired with high sensitivity. The electronic spin of the atomic-sized point defect can be initialised, manipulated and read-out at ambient conditions and coherence lifetimes are comparably long. Diamond magnetometers based on negatively charged NV centres have shown to be very attractive, and the sensitivity goes down to the single-atom level. In order to exploit such a high sensitivity level for sensing prospects, in this thesis, the NV centres are fabricated well confined in a certain distance to the diamond surface, since the detectable field usually decays with the third power of the distance between sensor and target. The surface depicts a fracture of the spin wise protecting diamond lattice and charge fluctuations affect the stability of NV centres, which are overcome by diamond surface termination. In order to improve the sensitivity further, the sensor density, measurement contrast and interaction time are increased. The nitrogen doping technique, which is applied during a plasma-enhanced chemical vapour deposition (PECVD) diamond growth process is used to fabricate NV centre ensembles aligned along one diamond crystal axis, thereby improving the measurement contrast by a factor up to four. The interaction time limiting spin bath is analysed using the sensor capabilities of the NVs, which leads to enhanced growth strategies and the fabrication of sensitivity optimised NV centre ensembles for magnetometry applications.
Scalable realizations of quantum network technologies utilizing the nitrogen vacancy center in diamond require creation of optically coherent NV centers in close proximity to a surface for coupling to optical structures. We create single NV centers by 15^{15}15N ion implantation and high-temperature vacuum annealing. Origin of the NV centers is established by optically detected magnetic resonance spectroscopy for nitrogen isotope identification. Near lifetime-limited optical linewidths (<<< 60 MHz) are observed for the majority of the normal-implant (7∘^\circ∘, ≈\approx≈ 100 nm deep) 15^{15}15NV centers. Long-term stability of the NV−^-− charge state and emission frequency is demonstrated. The effect of NV-surface interaction is investigated by varying the implantation angle for a fixed ion-energy, and thus lattice damage profile. In contrast to the normal implant condition, NVs from an oblique-implant (85∘^\circ∘, ≈\approx≈ 20 nm deep) exhibit substantially reduced optical coherence. Our results imply that the surface is a larger source of perturbation than implantation damage for shallow implanted NVs. This work supports the viability of ion implantation for formation of optically stable NV centers. However, careful surface preparation will be necessary for scalable defect engineering.