This thesis reports on the implementation and characterization of a fully integrated single-photon detector. Several detector circuits are realized and it is shown that the detectors exhibit supreme detection performance over a wide optical spectrum. The detectors' scalability is showcased by the parallel operation of multiple detectors within a single integrated circuit. These demonstrations are essential for future developments in integrated quantum optics.
This thesis reports on the implementation and characterization of a fully integrated single-photon detector. Several detector circuits are realized and it is shown that the detectors exhibit supreme detection performance over a wide optical spectrum. The detectors' scalability is showcased by the parallel operation of multiple detectors within a single integrated circuit. These demonstrations are essential for future developments in integrated quantum optics.
Single-photon detection possibility is a fundamental requirement for quantum technologies, including communication, computing and sensing. To achieve scalability and practical deployment, increasing attention is being directed toward integration of detectors with photonic integrated circuits, which offer compactness and compatibility with mass production. Superconducting nanowire single-photon detectors have emerged as the leading solution, combining near-unity efficiency, high temporal performance and the ability to be embedded across a wide range of photonic material platforms. In this review we trace the development of integrated superconducting nanowire single-photon detectors from early demonstrations to recent advances, outlining the progress in device architectures, material engineering and integration strategies. We also discuss performance benchmarks, emerging alternative designs, the future opportunities and challenges for this rapidly evolving field.
The implementation of single-photon detectors in waveguide photonic circuits will open the possibility of experiments in quantum regime that would otherwise be impossible to be implemented using bulk optics. Nanowire superconducting single-photon detectors (SSPDs) are good candidates for integration due to their relative ease of fabrication on top of GaAs heterostructures. In this paper we show the experimental demonstration of single-photon detectors, based on superconducting nanowires, fully integrated with GaAs/AlGaAs ridge waveguides. We will discuss all the major challenges surmounted and all the steps necessary to achieve these results.
The monolithic integration of single-photon sources, passive optical circuits, and single-photon detectors enables complex and scalable quantum photonic integrated circuits, for application in linear-optics quantum computing and quantum communications. Here, we demonstrate a key component of such a circuit, a waveguide single-photon detector. Our detectors, based on superconducting nanowires on GaAs ridge waveguides, provide high efficiency (∼20%) at telecom wavelengths, high timing accuracy (∼60 ps), and response time in the ns range and are fully compatible with the integration of single-photon sources, passive networks, and modulators.
Advancements in integrated photonics have enabled the miniaturization and scaling of complex photonic circuits, providing stability and reliability beyond the capabilities of conventional bulk setups. A central component of quantum photonic circuits is the single-photon detector, responsible for quantum state measurement. Due to the stringent performance requirements of quantum applications, superconducting nanowire single-photon detectors (SNSPDs) have emerged as the preferred detection technology, offering superior efficiency, low noise, and high timing resolution. While tabletop SNSPDs are now mature, commercially available and contributed to significant progress in quantum computing and communication, their integration into photonic circuits is still in its infancy. Integrated SNSPDs have shown the potential to not only match but surpass tabletop detectors in several performance metrics. Nevertheless, demonstrations have largely focused on individual integrated detectors, with limited investigation into more complex integrated circuits and advanced functionalities. In this thesis, we present a novel integration platform based on photonic bound states in the continuum (BICs) to address a critical limitation of conventional SNSPD designs, where nanowires placed directly atop the waveguide core are constrained by the core geometry. The etchless nature of our BIC waveguides provides a flat surface that decouples the design of the electronic readout circuitry below from the optical circuit layer above, enabling innovative integrated-nanowire geometries and facilitating large-scale integration of SNSPDs with CMOS-compatible circuits. We established a complete fabrication and characterization workflow for integrating NbTiN-based superconducting nanowires with BIC waveguides. Our integrated detectors achieved state-of-the-art performance, including detection efficiencies exceeding 70%, intrinsic jitter below 70 ps, and ultrafast recovery times (~1.7 ns). These results pave the way toward GHz-rate quantum state measurements, essential for scalable quantum photonic processors. Leveraging the design flexibility of BIC waveguides, we introduce the concept of inline detection with SNSPDs which exploits their unique ability to precisely engineer absorption through nanowire length control. By cascading multiple partially absorbing SNSPDs, it is possible to significantly reduce the number of required optical components and miniaturize complex quantum measurement setups within an extremely compact footprint. Traditional integration geometries prevent such implementations due to significant scattering losses at nanowire terminations, which limit the feasibility of cascaded designs. On the other hand, the design flexibility provided by our BIC platform makes it ideal for development of inline detection schemes. As a proof-of-concept, we use inline detection to miniaturize two fundamental quantum optics tools: an integrated Hanbury Brown and Twiss (HBT) interferometer and a photon-number-resolving (PNR) detector. We replicated the functionalities of these setups using only two nanowires integrated along a single waveguide. These devices show extremely compact footprint, highlighting the scalability potential of our approach. We validated these devices through characterization of a single-photon source and the discrimination of collinear photon pairs. The experimental results aligned well with previous literature and theoretical predictions, confirming the reliability of our integration method. Overall, this work presents a novel approach to quantum measurements within integrated quantum photonic circuits. Inline detection represents a step forward in quantum integrated photonics, moving from individual device demonstrations toward functional quantum circuits. By introducing our BIC-based integration platform, we simplify detector design and fabrication, lowering barriers to the development of inline detection circuits and opening new opportunities in multiphoton quantum state measurements, single-photon spectroscopy, and multiphoton subtraction.
Photonic quantum technologies hold promise to repeat the success of integrated nanophotonic circuits in non-classical applications. Using linear optical elements, quantum optical computations can be performed with integrated optical circuits and can therefore overcome the existing limitations in terms of scalability. In addition to passive optical devices for realizing photonic quantum gates, active elements, such as single-photon sources and single-photon detectors, are essential ingredients for future optical quantum circuits. Material systems that allow for the monolithic integration of all components are particularly attractive, including III-V semiconductors, silicon and diamond. Here, we demonstrate nanophotonic integrated circuits made from high-quality polycrystalline diamond thin films in combination with on-chip single-photon detectors. By using superconducting nanowires that are coupled evanescently to traveling waves, we achieve high detection efficiencies of up to 66% as well as low dark count rates and a timing resolution of 190 ps. Our devices are fully scalable and hold promise for functional diamond photonic quantum devices. The development of on-chip quantum circuitry progresses with the integration of single-photon detectors with diamond nanophotonic waveguides. Researchers based in Germany at Karlsruhe Institute of Technology and the Fraunhofer Institute of Applied Solid State Physics have fabricated superconducting niobium nitride nanowire detectors directly on top of diamond rib waveguides. This traveling wave design means that photons propagating in the diamond waveguides are coupled evanescently to the superconducting nanowires, allowing efficent on-chip detection of single photons. The small footprints of the detectors allow hundreds of detector circuits to be realized on a single chip. Furthermore, their fast response (they have a decay time of just 5.1 nanoseconds) allows operation at count rates of up to 200 megahertz and with a timing resolution of 190 picoseconds.
This thesis is about the development of a detector for single photons, particles of light. New techniques are being developed that require high performance single photon detection, such as quantum cryptography, single molecule detection, optical radar, ballistic imaging, circuit testing and fluorescence spectroscopy. Superconducting single photon detectors (SSPDs) are sensitive to single photons from the ultraviolet to the near infrared. In this thesis steps has been taken towards improving this type of detectors and implementing them in experiments. We have fabricated SSPDs in the Van Leeuwenhoek Laboratory at the TU Delft from NbTiN on an oxidized silicon substrate and we show world record system detection efficiencies at telecommunication wavelengths. In addtition, we have adjusted the geometry to get rid of the polarization dependence of the quantum efficiency. SSPDs fabricated from a new material show enhanced efficiency at longer wavelengths. Different read out schemes can scale a single pixel to an array of detectors. We have proven by implementing the SSPDs in a Hanbury-Brown Twiss setup that nanowire quantum dots emit single photons. We also have demonstrated that SSPDs are sensitive to single surface plasmon polaritons and single electrons.