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Physica C Superconductivity

The fabrication and characterization of nano-SQUIDs based on Nb thin films

Xixi Liu, Xiaoyu Liu, Hao Wang, Lei Chen, Zhen Wang

Published May 18, 2015• 8 citations
Publisher
DOI
10.1016/j.physc.2015.05.004

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Nano-Superconducting Quantum Interference Devices (nano-SQUIDs) are usually fabricated from a single layer of either Nb or Al. We describe here a simple method for fabricating suspended nano-bridges in Nb/Al thin-film bilayers. We use these suspended bridges, which act as Josephson weak links, to fabricate nano-SQUIDs which show critical current oscillations at temperatures up to 1.5 K and magnetic flux densities up to over 20 mT. These nano-SQUIDs exhibit flux modulation depths intermediate between all-Al and all-Nb devices, with some of the desirable characteristics of both. The suspended geometry is attractive for magnetic single nanoparticle measurements.
Electron-beam lithography and reactive ion etching have been used to fabricate thin-film Au/Nb bridges with widths ∼50 nm. The Au layer was used as both a mask for etching the Nb superconducting bridge and as a resistive shunt in the completed devices. Using these junctions, a dc superconducting quantum interference device (SQUID) design with a hole size of 200 nm×200 nm (nano-SQUID) has also been fabricated and characterized. A flux noise of approximately 7×10−6 Φ0/Hz1/2 at 4.2 K has been achieved, from which a calculated spin sensitivity of 250 spin/Hz1/2 is predicted.
We have fabricated dc-superconducting quantum interference devices (SQUIDs) with all-thin-film point contacts (Nb–Nb nanoconstriction-NbN). The size of the nanoconstriction may be smaller than the superconducting coherence length of bulk Nb. The quasiparticle characteristic of the all-thin-film point contact can be explained using the Blonder, Tinkham and Klapwijk (BTK) quasiparticle current which is applicable to the superconducting quantum point contact. The flux noise of SQUID with 10 pH operated in a flux locked loop is 8 µΦ0/ Hz1/2 at 1 Hz, and 4 µΦ0/ Hz1/2 at frequencies above 10 Hz is limited by the preamplifier.