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Journal of Low Temperature Physics

Design and fabrication of thin-film resistive SQUIDs

G.S. Krivoy, C. A�mann, M. Peters, H. Koch

Published Apr 1, 1995• 9 citations
Publisher
DOI
10.1007/bf00753623

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Applied Physics Letters•Feb 14, 2003•150 citations
An all thin-film resistive SQUID with two Josephson tunnel junctions has been designed, fabricated and studied. As well as the two junctions, this device consists of a low ohmic (1.9*10 -6 Omega ) resistive part connected by superconducting leads to both junctions in a loop with very low ( approximately 10 -11 H) inductance. A direct current flowing through the resistive part fixes the voltage difference between the two Josephson junctions that are additionally fed by a bias current. The voltage difference is converted into a signal frequency that can be picked up from the SQUID with a conversion factor of ( phi o ) -1 =483.6 MHz mu V -1 , defined only by the electron charge and Planck's constant. An output signal level (peak-to-peak) of about 50 mu V has been obtained. The low frequency range (below 100 kHz) of the output signal frequency has been investigated. The possibilities of considerably extending this frequency range are also discussed.
This paper discusses the preparation of thin-film planar dc superconducting quantum interference devices (SQUIDs). Nb-oxide-Pb tunnel junctions fabricated using CF4 cleaning process (CFCP) and Pd thin-film shunt resistor were employed. It was demonstrated that the two junctions in a SQUID have symmetrical and wellcontrolled junction parameters. Pd adhesion with oxidized Si could be improved by ultrathin Zr underlayers. The Pd films allowed good controt of the sheet resistance. The SQUIDs are very reliable in regard to room-temperature storage and thermal cycling.
Electron-beam lithography and reactive ion etching have been used to fabricate thin-film Au/Nb bridges with widths ∼50 nm. The Au layer was used as both a mask for etching the Nb superconducting bridge and as a resistive shunt in the completed devices. Using these junctions, a dc superconducting quantum interference device (SQUID) design with a hole size of 200 nm×200 nm (nano-SQUID) has also been fabricated and characterized. A flux noise of approximately 7×10−6 Φ0/Hz1/2 at 4.2 K has been achieved, from which a calculated spin sensitivity of 250 spin/Hz1/2 is predicted.