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Conference on Lasers and Electro-Optics

Photonic Crystal Cavities in Bulk Diamond for Efficient Spin-Photon Interfaces

Sara Mouradian, Noel Wan, Michael E. Walsh, Eric A. Bersin, Tim Schröder, Dirk Englund

Published Jan 1, 2017• 0 citations
Publisher

Abstract

We report a new fabrication process of planar photonic crystal nanocavities from bulk diamond. Experimental devices have quality factors Q > 1 × 104 with resonances matched to the negatively charged nitrogen vacancy zero phonon line, allowing for an enhanced spin-photon interface.
DOI
10.1364/cleo_qels.2017.ftu1e.4

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The realisation of an efficient spin-photon interface using the negatively charged nitrogen-vacancy centre (NV-) in diamond requires the resonant coupling of the zero phonon line (ZPL) of the centre to an optical microcavity [1]. The cavity serves to encourage emission into the ZPL in preference to the phonon sidebands, and potentially also to increase the homogeneous linewidth via a reduction of the lifetime (the Purcell effect) thus assisting in the generation of indistinguishable photons. Cavity coupling thus has potential to improve by orders of magnitude the speed with which entanglement can be created between spatially remote NV- centres [2], and to enable other mechanisms for realising spin-photon interfaces via non-demolition measurements [3].
The negatively charged nitrogen vacancy centre in diamond is known for its coherent spin properties and optical interface, and thus is regarded a promising candidate for quantum information applications [1]. Realisation of an efficient spin-photon interface with the NV centre is made challenging however by the fact that, in bulk diamond, only 3-4% of spontaneously emitted photons occur in the zero phonon line (ZPL). Placing NV centre in an optical cavity is being explored by several groups [2][3][4] as an effective way to selectively enhance the coherent emission of NVs and thereby increase the efficiency of the coherent spin-photon coupling. Previous work reported successful coupling of the NV in nano-diamond to an open access micro-cavity and observed enhanced ZPL emission [5]. However the NV centres in nano-diamond suffer from broadened zero phonon transition and poor spin coherence. By fabricating NV centres in a ~micrometre thick membrane of high purity single crystal material we can take advantage of the tunability of open access cavities, and at the same time, provide close-to-bulk crystal environment to maintain the coherent spin properties of the NV centres. Here we report our work on the tunable cavity coupling of the ZPL of a NV centre in a 1.2micrometre-thick diamond membrane at 4K. The diamond membrane is fabricated from a 0.5mm-thick E6 CVD diamond plate where ion implantation is carried out on both surfaces to create NV centres at the depth of around 70nm. The plate is then machined into 30micrometre-thick slices, and thinned by ICP-RIE with a combination of Ar/Cl[6] and pure oxygen plasma etching recipes. The open cavity consists of a concave mirror (99.99% reflectivity) deposited on a template fabricated using Focused Ion Beam (FIB) milling[7] and a planar mirror (99.8% reflectivity) which supports the membrane. For bare cavities with mirror radii of curvature (RoC) of 12micrometre, we measured a finesse of F~2000 and mode volume as small as 0.75micrometre^3. In-situ tuning of the cavity resonance is achieved with piezoelectric actuators. When mounted in our bath cryostat the cavity modes have dominant Lorentzian line profiles which indicate a passive stability of the cavity length of better than 0.15nm. No active locking is currently deployed. With the presence of a diamond membrane inside the cavities, the measured finesse and mode volume of a cavity with 12micrometre RoC are found to be around 300 and 3 micrometre^3, respectively. We attribute the reduction in finesse to scattering at the membrane-air and membrane-mirror interfaces. On coupling to the ZPL of a target NV centre, we record a factor of 4 increase in the saturated intensity of ZPL fluorescence compared to that measured from the same NV centre in absence of the concave mirror. This result is consistent with the calculated Purcell factor of 16 combined with a relatively low efficiency of light extraction (estimated to be around 19%) from the cavity due to the scattering losses.
The realization of efficient optical interfaces for solid-state atom-like systems is an important problem in quantum science with potential applications in quantum communications and quantum information processing. We describe and demonstrate a technique for coupling single nitrogen vacancy (NV) centers to suspended diamond photonic crystal cavities with quality factors up to 6000. Specifically, we present an enhancement of the NV center's zero-phonon line fluorescence by a factor of ~ 7 in low-temperature measurements.
We demonstrate a self-aligned lithographic technique for precision generation of nitrogen vacancy (NV) centers within photonic nanostructures on bulk diamond substrates. The process relies on a lithographic mask with nanoscale implantation apertures for NV creation, together with larger features for producing waveguides and photonic nanocavities. This mask allows targeted nitrogen ion implantation, and precision dry etching of nanostructures on bulk diamond. We demonstrate high-yield generation of single NVs at pre-determined nanoscale target regions on suspended diamond waveguides. We report implantation into the mode maximum of diamond photonic crystal nanocavities with a single-NV per cavity yield of ∼26% and Purcell induced intensity enhancement of the zero-phonon line. The generation of NV centers aligned with diamond photonic structures marks an important tool for scalable production of optically coupled spin memories.