Superconducting quantum devices have gained increasing interest over the past 15 years because of their role as promising candidates for implementing a large-scale quantum computer and as ultra-sensitive detectors. Superconducting resonators are one type of superconducting device which are used in a variety of applications including quantum computing and radioastronomy. They can achieve large quality factors which are important for these applications and a variety of others. Specific examples of these applications include the readout and coupling of superconducting qubits and also microwave kinetic inductance detector arrays for sub-mm wavelength astronomical measurements. High quality factors also enable the study of very subtle features in the electromagnetic response of the resonator. This feature in turn offers provides a method to characterize loss mechanisms which affect the performance of superconducting qubits, by measuring the quality factor of a resonator. Dielectric loss is an example of such a loss mechanism, and is considered to be one of, if not \\it the \\rm major obstacle to overcome in order to construct scalable quantum technologies based on superconducting devices. This type of loss arises from the coupling of the electric field in the device to spurious degrees of freedom which arise naturally the dielectric environment of the device. The fast-growing interest in the physics and applications of superconducting resonators has renewed interest in an improving our fundamental understanding of dielectric loss. This interest involves the study of a much bigger and older question in condensed matter physics; namely, what is the microscopic physics which governs the behaviour and of an amorphous material at low-temperatures? \n \nIn this thesis, we present a systematic study of dielectric loss in amorphous aluminum oxide using superconducting microwave resonators. Measurements of the intrinsic loss tangent over a large temperature range of 40~mK to 1~K are presented and analyzed in detail. Some aspects of the data are well understood in terms of the standard tunnelling two-level system model, while others require a deeper analysis of the electrodynamics of the resonator and insights from more advanced theories. We employ a consistent approach using numerical simulations of the resonator to understand loss mechanisms arising from both an inhomogeneous electric field and multiple dielectric layers. We measure saturation effects which provide insight into coherent properties of two-level system ensembles and the mutual interaction between them. Excellent agreement with the two-level system model is found for intrinsic losses, however the strong dependence on temperature which we observe for saturation effects is not predicted in the standard form of the model. We find that this dependence can be understood in terms of the theory of spectral diffusion which is consistent with a strong mutual interaction between two-level systems contributes to broadening of their spectral linewidths.
Superconducting quantum devices have gained increasing interest over the past 15 years because of their role as promising candidates for implementing a large-scale quantum computer and as ultra-sensitive detectors. Superconducting resonators are one type of superconducting device which are used in a variety of applications including quantum computing and radioastronomy. They can achieve large quality factors which are important for these applications and a variety of others. Specific examples of these applications include the readout and coupling of superconducting qubits and also microwave kinetic inductance detector arrays for sub-mm wavelength astronomical measurements. High quality factors also enable the study of very subtle features in the electromagnetic response of the resonator. This feature in turn offers provides a method to characterize loss mechanisms which affect the performance of superconducting qubits, by measuring the quality factor of a resonator. Dielectric loss is an example of such a loss mechanism, and is considered to be one of, if not \it the \rm major obstacle to overcome in order to construct scalable quantum technologies based on superconducting devices. This type of loss arises from the coupling of the electric field in the device to spurious degrees of freedom which arise naturally the dielectric environment of the device. The fast-growing interest in the physics and applications of superconducting resonators has renewed interest in an improving our fundamental understanding of dielectric loss. This interest involves the study of a much bigger and older question in condensed matter physics; namely, what is the microscopic physics which governs the behaviour and of an amorphous material at low-temperatures? \n \nIn this thesis, we present a systematic study of dielectric loss in amorphous aluminum oxide using superconducting microwave resonators. Measurements of the intrinsic loss tangent over a large temperature range of 40mK to 1K are presented and analyzed in detail. Some aspects of the data are well understood in terms of the standard tunnelling two-level system model, while others require a deeper analysis of the electrodynamics of the resonator and insights from more advanced theories. We employ a consistent approach using numerical simulations of the resonator to understand loss mechanisms arising from both an inhomogeneous electric field and multiple dielectric layers. We measure saturation effects which provide insight into coherent properties of two-level system ensembles and the mutual interaction between them. Excellent agreement with the two-level system model is found for intrinsic losses, however the strong dependence on temperature which we observe for saturation effects is not predicted in the standard form of the model. We find that this dependence can be understood in terms of the theory of spectral diffusion which is consistent with a strong mutual interaction between two-level systems contributes to broadening of their spectral linewidths.
The improvement of the coherence times of superconducting qubits depends on the reduction of the dielectric losses in the insulating materials implemented for the device fabrication. These losses depend on the density of spurious dipoles of different nature (two-level systems, TLSs) which couple to phase qubits and, hence, limit their coherence times. Hydrogenated amorphous silicon (a-Si:H), because of its lower loss tangent (tan δ) among conventional dielectrics (a-SiO, a-SiO2, a-SiNx:H), is considered as the best amorphous dielectric for superconducting qubit application. We have developed a reliable method for the direct measurement of dielectric losses in amorphous dielectric thin films using a novel design based on four lumped superconducting LC resonators connected in series without coupling capacitors. The losses are obtained as tan δ = 1/Q0, where Q0 is the intrinsic quality factor of the resonator, measured at 3 dB above the resonance frequency without any fitting procedure. The series type LC resonators with a-Si:H as dielectric were fabricated by the Nb technology. The measurements were done at the conditions of a qubit application (0.5 -10 GHz frequency range and low temperatures). The low values of the loss tangent of a-Si:H (up to 2.5 x 10−5 at 4.2 K) have required the development of superconducting housing for the resonators in order to eliminate a spurious dependence of tan δ on the microwave power, by reducing losses which were not originated in the dielectric itself. The results of the simulations agree well with the experiments.
We report on the characterization of microwave loss of thin aluminum oxide films at low temperatures using superconducting lumped resonators. The oxide films are fabricated using plasma oxidation of aluminum and have a thickness of 5 nm. We measure the dielectric loss versus microwave power for resonators with frequencies in the GHz range at temperatures from 54 to 303 mK. The power and temperature dependence of the loss are consistent with the tunneling two-level system theory. These results are relevant to understanding decoherence in superconducting quantum devices. The obtained oxide films are thin and robust, making them suitable for capacitors in compact microwave resonators.
Abstract We perform an experimental and numerical study of dielectric loss in superconducting microwave resonators at low temperature. Dielectric loss, due to two-level systems, is a limiting factor in several applications, e.g. superconducting qubits, Josephson parametric amplifiers, microwave kinetic-inductance detectors, and superconducting single-photon detectors. Our devices are made of disordered NbN, which, due to magnetic-field penetration, necessitates 3D finite-element simulation of the Maxwell–London equations at microwave frequencies to accurately model the current density and electric field distribution. From the field distribution, we compute the geometric filling factors of the lossy regions in our resonator structures and fit the experimental data to determine the intrinsic loss tangents of its interfaces and dielectrics. We put emphasis on the loss caused by a spin-on-glass resist such as hydrogen silsesquioxane (HSQ), used for ultrahigh lithographic resolution relevant to the fabrication of nanowires. We find that, when used, HSQ is the dominant source of loss, with a loss tangent of δ HSQ i = 8 × 10 − 3 .
Superconducting resonators are widely used in many applications such as qubit readout for quantum computing applications, and kinetic inductance detectors. These resonators are susceptible to numerous loss and noise mechanisms under microwave excitation, especially the dissipation due to non-equilibrium quasi-particles and two-level systems (TLS), which can result in a decrease of the superconducting intrinsic quality factor (Qi) in high quality superconducting resonators. Particularly in the few-photon and low temperature (T) regime, TLS losses can become a dominant loss mechanism. In this study, novel aluminum half-wavelength resonators are investigated, focusing on the loss properties at extra-low power and low temperature. An unusual increase of Qi(T) with deceasing temperature is observed. This behavior is attributed to the increase of TLS coherence time (T2) at ultra-low temperatures and powers. This T2 increase is consistent with other work on resonant frequency noise in resonators and measurements of individual TLS, and likely arises from interacting TLS in the aluminum half-wavelength resonators.
High quality factor, i.e. low loss, microwave resonators are important for quantum information storage and addressing. In this work we study the resonance frequency and loss in superconducting coplanar waveguide resonators as a function of power and temperature. We find that there is increased loss at low power and low temperature. The increased loss is attributed to the existence of two-level systems (TLS) at the surfaces, interfaces, and in the bulk of insulators deposited on the structures. We show that both the temperature dependence of the resonant frequency and the power dependence of the loss can be used to find the TLS contribution to the loss. The TLS intrinsic loss tangent derived from the frequency shift data at high power is shown to agree well with the direct loss measurement at low power. The former allows for a relatively fast measurement of the TLS loss. As an example, we measure the properties of amorphous AlOXdeposited on the resonators and find a TLS loss tangent of 1 × 10-3.
Measuring the losses arising from different materials and interfaces is crucial to improving the coherence of superconducting quantum circuits. Although this has been of interest for a long time, current studies can either only provide bounds to those losses, or require several devices for a complete characterization. In this work, we introduce a method to measure the microwave losses of materials and interfaces with a single multi-mode superconducting resonator. We demonstrate a formalism for analyzing the loss sensitivity of multi-mode systems and discuss the design strategies of multi-mode resonators for material loss studies. We present two types of multi-mode superconducting resonators for the study of bulk superconductors: the forky whispering-gallery-mode resonator (FWGMR) and the ellipsoidal cavity. We use these resonators to measure the surface dielectric, conductor, and seam losses of high-purity (5N5) aluminum and aluminum alloy (6061), as well as how they are affected by chemical etching, diamond turning, and thin-film coating. We find that chemical etching and diamond turning reduce both the surface dielectric and conductive losses of high-purity aluminum, but provide no appreciable improvement to the seam. Coating the surfaces of diamond-turned aluminum alloys with e-beam evaporated or sputtered aluminum thin-films significantly reduces all three losses under study. In addition, we study the effect of chemical etching on the surface of high-purity aluminum using transmission electron microscopy (TEM) and find that the chemical etching process creates a thinner and more uniform oxide layer, consistent with the observed improvement in the surface dielectric loss.