Semiconductor quantum dots in silicon demonstrate exceptionally long spin lifetimes as qubits and are therefore promising candidates for quantum information processing. However, control and readout techniques for these devices have thus far employed low frequency electrons, in contrast to high speed temperature readout techniques used in other qubit architectures, and coupling between multiple quantum dot qubits has not been satisfactorily addressed.This dissertation presents the design and characterization of a semiconductor charge qubit based on double quantum dot in silicon with an integrated microwave resonator for control and readout. The 6 GHz resonator is designed to achieve strong coupling with the quantum dot qubit, allowing the use of circuit QED control and readout techniques which have not previously been applicable to semiconductor qubits. To achieve this coupling, this document demonstrates successful operation of a novel silicon double quantum dot design with a single active metallic layer and a coplanar stripline resonator with a bias tee for dc excitation.Experiments presented here demonstrate quantum localization and measurement of both electrons on the quantum dot and photons in the resonator. Further, it is shown that the resonator-qubit coupling in these devices is sufficient to reach the strong coupling regime of circuit QED. The details of a measurement setup capable of performing simultaneous low noise measurements of the resonator and quantum dot structure are also presented here.The ultimate aim of this research is to integrate the long coherence times observed in electron spins in silicon with the sophisticated readout architectures available in circuit QED based quantum information systems. This would allow superconducting qubits to be coupled directly to semiconductor qubits to create hybrid quantum systems with separate quantum memory and processing components.
Semiconductor quantum dots in silicon demonstrate exceptionally long spin lifetimes as qubits and are therefore promising candidates for quantum information processing. However, control and readout techniques for these devices have thus far employed low frequency electrons, in contrast to high speed temperature readout techniques used in other qubit architectures, and coupling between multiple quantum dot qubits has not been satisfactorily addressed.This dissertation presents the design and characterization of a semiconductor charge qubit based on double quantum dot in silicon with an integrated microwave resonator for control and readout. The 6 GHz resonator is designed to achieve strong coupling with the quantum dot qubit, allowing the use of circuit QED control and readout techniques which have not previously been applicable to semiconductor qubits. To achieve this coupling, this document demonstrates successful operation of a novel silicon double quantum dot design with a single active metallic layer and a coplanar stripline resonator with a bias tee for dc excitation.Experiments presented here demonstrate quantum localization and measurement of both electrons on the quantum dot and photons in the resonator. Further, it is shown that the resonator-qubit coupling in these devices is sufficient to reach the strong coupling regime of circuit QED. The details of a measurement setup capable of performing simultaneous low noise measurements of the resonator and quantum dot structure are also presented here.The ultimate aim of this research is to integrate the long coherence times observed in electron spins in silicon with the sophisticated readout architectures available in circuit QED based quantum information systems. This would allow superconducting qubits to be coupled directly to semiconductor qubits to create hybrid quantum systems with separate quantum memory and processing components.
Coherent and strong coupling between photons and solid-state qubits, in the form of circuit quantum electrodynamics (QED), has been harnessed for two-qubit gates mediated by photons and high-fidelity quantum non-demolition readout, which are the building blocks of large-scale quantum computation. Recently, circuit QED has been extended to gate-defined semiconductor quantum dots. In this thesis, we develop a novel hybrid circuit QED architecture composed of a high-impedance superconducting microwave resonator and spins localized in silicon-MOS quantum dots. To control and measure the spin degrees of freedom, this hybrid system needs to operate at finite magnetic field. Consequently, we develop and characterize microwave resonators based on thin niobium nitride (NbN) films featuring a high kinetic inductance. We demonstrate high-impedance resonators with magnetic field resilience and low photon loss rates. We then co-integrate the NbN resonators on silicon spin qubit chips. With a hole confined in a double quantum dot (DQD), we report the first realization of a strong hole charge-photon interaction bordering the ultra-strong coupling regime. At finite magnetic field, putting the spin transition energy in resonance with the microwave cavity, we observe large vacuum Rabi mode splittings, signature of a strong spin-photon coupling. Our findings are well captured by the modelling of a hole DQD with different anisotropic Zeeman response in each dot and spin-orbit coupling dependent tunnel rates. We also find a sizeable spin-photon coupling when the hole is localized in the single quantum dot, in line with recent theoretical predictions. The different works presented in this manuscript pave the way for circuit QED with hole spins in gate-defined semiconductor quantum dots.
Semiconductor qubits rely on the control of charge and spin degrees of freedom of electrons or holes confined in quantum dots (QDs). Typically, semiconductor qubit-qubit coupling is short range, effectively limiting qubit distance to the spatial extent of the wavefunction of the confined particle (a few hundred nanometers). This is a significant constraint towards scaling of QD-based architectures to realize dense 1D or 2D arrays of QDs. Inspired by techniques originally developed for circuit QED, we recently demonstrated the strong coupling of individual electrons confined in GaAs quantum dots to individual microwave photons, making use of the enhanced electric component of the vacuum fluctuations of a resonator with impedance beyond the typical 50 Ohm of standard coplanar waveguides. In this hybrid technology, we recently realized a proof of concept experiment, where the coupling between a transmon and a double QD (DQD) is mediated by virtual microwave photon excitations in a high impedance SQUID array resonator, which acts as a quantum bus enabling long-range coupling between dissimilar qubits. Similarly, we achieved coherent coupling between two DQD charge qubits separated by approximately 50 um. In the dispersive regime, we spectroscopically observed qubit-qubit coupling as an avoided-crossing in the energy spectrum of the DQD charge qubits. The methods and techniques developed in this work are transferable to QD devices based on other material systems and can be beneficial for spin based hybrid systems.
This dissertation describes a set of experiments with the goal of creating a super-conductor-semiconductor hybrid circuit quantum electrodynamics architecture with single electron spins. Single spins in silicon quantum dots have emerged as attractive qubits for quantum computation. However, how to scale up spin qubit systems remains an open question. The hybrid architecture considered here could provide a route to realizing large networks of quantum dot–based spin qubit registers. The first experiment in this thesis is aimed at achieving strong coupling between a single electron spin and a single microwave photon. The electron is trapped in a gate-defined double quantum dot in a Si/SiGe heterostructure and the photon is stored in an on-chip superconducting high-impedance NbTiN cavity. The photon is coupled directly to the electron charge, and indirectly to the electron spin, mediated through a synthetic spin-orbit field. We observe a vacuum Rabi splitting that depends on the spin-charge hybridization. The ratio of spin-photon coupling strength to decoherence rates of the spin and cavity combined is larger than unity, confirming the strong coupling regime has been reached. In addition, we find an optimal degree of spin-charge hybridization for which this ratio is maximized. The demonstration of strong spin-photon coupling not only opens a new range of physics experiments, but fulfills also a crucial requirement for coupling spin qubits at a distance via a cavity. The second experiment is focused on spin readout with the on-chip cavity. Instead of the direct dispersive readout of a single spin, we use the cavity to detect whether the electron is allowed to tunnel between the two dots or not. We benchmark the charge sensitivity and bandwidth of the detector and find that rapid detection of the electron charge with high SNR is possible. In the two-electron regime, electron tunneling is contingent on the total spin state (Pauli spin blockade). This spin-to-charge conversion scheme enables single-shot detection of singlet states with high-fidelity. The demonstration of single-shot spin readout with a cavity is an essential step towards readout in dense spin qubit arrays, such as the crossbar network, where it is not possible to integrate electrometers and accompanying reservoirs adjacent to the qubit dots. In the third experiment, we develop on-chip microwave filters to suppress microwave photon leakage from the cavity through the gate electrodes that are necessary to form quantum dots. We introduce a new cavity design that is compatible with long-distance connectivity between spins, but is also more susceptible to microwave leakage. We test and compare two low-pass filter variations in terms of performance, footprint and integrability. They use the same nanowire inductor, but different implementations of the capacitor: one with a planar interdigitated capacitor and one novel design with an overlapping thin-film capacitor. We find that both approaches are effective against microwave leakage. However, the large footprint of the interdigitated capacitor makes this solution inconvenient as the number of gate lines increases. The thin-film capacitor, with its much smaller footprint, is better suited for our devices. The final part of this dissertation contains concluding remarks and possible future directions are proposed.
The charge and spin degrees of freedom of an electron constitute natural bases for constructing quantum two level systems, or qubits, in semiconductor quantum dots. The quantum dot charge qubit offers a simple architecture and high-speed operation, but generally suffers from fast dephasing due to strong coupling of the environment to the electron’s charge. On the other hand, quantum dot spin qubits have demonstrated long coherence times, but their manipulation is often slower than desired for important future applications. This talk will present experimental progress of a ‘hybrid’ qubit, formed by three electrons in a Si/SiGe double quantum dot, which combines desirable characteristics (speed and coherence) in the past found separately in qubits based on either charge or spin degrees of freedom. Using resonant microwaves, we first discuss qubit operations near the ‘sweet spot’ for charge qubit operation. Along with fast ( >GHz) manipulation rates for any rotation axis on the Bloch sphere, we implement two independent tomographic characterization schemes in the charge qubit regime: traditional quantum process tomography (QPT) and gate set tomography (GST). We also present resonant qubit operations of the hybrid qubit performed on the same device, DC pulsed gate operations of which were recently demonstrated. We demonstrate three-axis control and the implementation of dynamic decoupling pulse sequences. Performing QPT on the hybrid qubit, we show that AC gating yields π rotation process fidelities higher than 93% for X-axis and 96% for Z-axis rotations, which demonstrates efficient quantum control of semiconductor qubits using resonant microwaves. We discuss a path forward for achieving fidelities better than the threshold for quantum error correction using surface codes.
Hybrid circuit quantum electrodynamics (cQED) aims at coupling various quantum degrees of freedom, among which are spin and charge degrees of freedom in gate defined quantum dots, phonons or magnons... with quantized electromagnetic fields in superconducting microwave cavities to investigate fundamental physics questions or for quantum computation and simulation. However, low microwave losses, key for many hybrid cQED experiments, are challenging to achieve given the often exotic and/or complex material stacks (e.g. semiconducting material, ferromagnets, or piezoelectric materials) required to host the various quantum degrees of freedom. In this work, we present a 3D-integration process to overcome this challenge for semi-industrial silicon MOS spin qubits. The process is based on dense indium bump interconnects at a pitch of 10 μm and superconducting thin films of Niobium Nitride (NbN). First, we report on DC and RF interconnect properties that demonstrate a high galvanic interconnection yield and internal quality factors above 105 in the single photon regime for NbN resonators interrupted by a single indium bump interconnect. Eventually, we fabricated a 3D-integrated hybrid circuit quantum electrodynamics (cQED) device based on a semi-industrial MOS hole double quantum dot and a high impedance NbN resonator. For this device, we report a cavity internal quality factor above 10000 and demonstrate record sensitivity for gate-based dispersive readout of the charge degree of freedom with an SNR of 100 in 300 ns. Finally, we demonstrate strong spin-photon coupling of gs/2π = 75 MHz, which highlights the viability of 3D-integration for quantum dot based hybrid spin circuit quantum electrodynamics and opens to high-fidelity spin readout and microwave photon-based remote spin qubit entanglement.
This thesis investigates hybrid circuit quantum electrodynamics (cQED) as a versatile platform that unites superconducting resonators with semiconductor quantum dots. The central motivation is to harness strong light-matter coupling at the single-photon level, which enables coherent photon-qubit interactions and paves the way for quantum technologies in computation, communication, and sensing. The first part of this work combines hybrid cQED with holes in planar Ge/SiGe, a material system that has only recently become accessible for quantum devices. Planar Ge offers unique advantages for this purpose and has attracted considerable attention in the context of quantum computing. In contrast, its potential for hybrid cQED has remained largely unexplored, making the present work one of the first demonstrations of strong light-matter interaction in this platform. Within this framework, we demonstrate strong charge-photon coupling in planar Ge by observing vacuum Rabi splitting between a hole charge qubit based on a double quantum dot (DQD) and a microwave resonator. We employ a frequency-tunable high-impedance resonator to perform qubit spectroscopy, enabling systematic exploration of coupling regimes and confirming device controllability. In addition, we use this setup to carry out excited-state spectroscopy of strongly correlated states in the DQD, revealing the formation of Wigner molecules and illustrating how the hybrid architecture can be harnessed to access many-body physics. While these experiments in Ge demonstrate how strong coupling can be harnessed to explore qubit physics and correlated states, they also exemplify the wider potential of hybrid cQED. A particularly pressing application is in quantum optics, where efficient single-photon detectors are still lacking in the microwave regime. Such detectors are essential for enabling experiments in quantum communication and microwave quantum optics. In the second part of this thesis, we address this challenge by realizing a photodetector based on a GaAs DQD coupled to a superconducting resonator. The detector operates via photon-to-charge conversion and achieves efficiencies approaching unity. Strong coupling plays a central role by ensuring that incoming photons are absorbed before being lost to the environment, which is key to the high performance of the detector. We further exploit the frequency tunability of the resonator to investigate device performance and identify the parameters that optimize detection efficiency. The broader impact of this work lies in advancing quantum technologies that rely on coherent microwave photons. Applications include spin qubit readout, long-distance photon-mediated coupling, quantum communication, and microwave quantum optics. Looking forward, planar Ge is identified as a highly competitive platform for hybrid cQED. Future directions include the development of single-photon sources, quantum- limited detectors, and analog quantum simulators based on engineered resonator-qubit arrays.