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IEEE Transactions on Applied Superconductivity

1 V and 10 V SNS Programmable Voltage Standards for 70 GHz

F. Mueller, Ralf Behr, Thomas Weimann, L. Palafox, David I. Olaya, Paul D. Dresselhaus, Samuel P. Benz

Published Jun 1, 2009• 109 citations
Publisher

Abstract

Programmable Josephson voltage standards (PJVSs) in combination with fast switchable DC current sources have opened up new applications in the field of low-frequency AC metrology. The growing interest in output voltages of up to plusmn10 V initiated efforts by several National Metrological Institutes to realize 10 V PJVSs. Presently, only 10 V PJVSs from PTB based on SINIS junctions have been successfully incorporated into existing setups for AC metrology. However, the fabrication of 10 V SINIS arrays that are driven at 70 GHz suffers from very low yield. The recent technological progress made at NIST enabled the drop-in replacement of the low-yield SINIS arrays by more robust SNS arrays. The N-material is an amorphous NbxSi1-xalloy near the metal-insulator transition and is deposited by co-sputtering. For the first time, fully operational 1 V and 10 V PJVSs with SNS junctions that are suitable for a 70 GHz drive have been fabricated and tested. This work was done in close cooperation between NIST and PTB.

DOI
10.1109/tasc.2009.2017911

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Programmable Josephson voltage standards (PJVSs) in combination with fast switchable DC current sources have opened up new applications in the field of low-frequency AC metrology. The growing interest in output voltages of up to plusmn10 V initiated efforts by several National Metrological Institutes to realize 10 V PJVSs. Presently, only 10 V PJVSs from PTB based on SINIS junctions have been successfully incorporated into existing setups for AC metrology. However, the fabrication of 10 V SINIS arrays that are driven at 70 GHz suffers from very low yield. The recent technological progress made at NIST enabled the drop-in replacement of the low-yield SINIS arrays by more robust SNS arrays. The N-material is an amorphous NbxSi1-xalloy near the metal-insulator transition and is deposited by co-sputtering. For the first time, fully operational 1 V and 10 V PJVSs with SNS junctions that are suitable for a 70 GHz drive have been fabricated and tested. This work was done in close cooperation between NIST and PTB.
Recent metrological activities with programmable Josephson voltage standards (PJVS) are focused on extending the quantum accuracy to AC voltages, e.g. for the step-wise approximation of sine waves. Stimulated by the progress in this field, new requirements for the quality and availability of 1 V and 10 V circuits have been established. Based on the experience with programmable 1 V SINIS circuits fabricated at PTB and used at present by 13 National Metrological Institutes worldwide, the fabrication process and the microwave design were improved. The experience gained hereby enabled us to improve the properties of programmable 10 V SINIS arrays which were realized by us for the first time in 2000. The new 10 V circuits have 17 bit resolution and develop under 70 GHz microwave irradiation flat Shapiro steps at the 10 V level which are more than 600 muA wide. A direct comparison of the output voltage with a conventional 10 V SIS Josephson voltage standard confirmed the suitability for metrological applications. Incorporating 10 V-PJVS into existing AC metrology setups is expected to reduce their uncertainty budgets by about one order of magnitude.
A programmable dc voltage standard for output voltages of up to 10 V has been realized. The series arrays, consisting of about 69120 overdamped superconductor/insulator/normal metal/insulator/superconductor (SINIS) Josephson junctions, have been fabricated using the reliable Nb-Al/Al/sub 2/O/sub 3/ technology. The arrays can be operated in conventional Josephson voltage standards at microwave frequencies from 70 GHz to 75 GHz. Steps of constant voltage are observed at very low microwave power levels, since the major part of the microwave power is generated by the junctions themselves. The operation of the arrays and the formation of Shapiro steps are discussed.
PTB started using the robust NbxSi1-xbarrier junction technology for the fabrication of large arrays for the Programmable Josephson Voltage Standard (PJVS) and for the Josephson Arbitrary Waveform Synthesizer 3 years ago. We demonstrate how Nb-doping of the amorphous Si barrier causes the transition from an underdamped to a desired overdamped junction behavior. Special dc SQUIDs have been used to evaluate junction capacitance and noise properties. The critical current of small junctions as a function of applied magnetic field has been investigated. On the basis of an existing 70 GHz design previously used for 10 V PJVS chips, we fabricated for the first time 20 V circuits with nearly 140 000 double-stacked Josephson junctions. A direct on-chip comparison between the two 10 V halves of the binary-divided array confirmed the metrological suitability of the 20 V circuits for dc and ac applications.
The report describes the most recent PTB developments and applications of large Josephson arrays for the generation of very precise sine waves and arbitrary waveforms. By means of large70 GHz sine-wave-driven binary arrays, AC voltages with frequencies up to 1 kHz and amplitudes of more than 10 V were generated with an uncertainty of better than 1μV/V. For the fabrication of this array type with up to 70000 junctions in series connection, an SNS junction technology with NbxSix-1barriers is now completely installed and permanently in use. With pulse-driven arrays of Josephson junctions, arbitrary waveforms were generated with a level of higher harmonics smaller than -120 dBc for frequencies from 150 Hz to 100 kHz at rms voltages less than 100 mV. These results were achieved with extended arrays of up to 4795 very small SNS junctions with Hf0.5Ti0.5barriers. Also the NbSi-technology technology has successfully been applied for the fabrication of pulse-driven Josephson arrays. As it seems to be difficult to considerably increase the wave amplitude by enhancing the junction number of the arrays, experiments were performed to combine a binary array system with a pulse-driven system with the goal to make use of the high amplitude of stepwise generated waves without losing the low noise and precision of quantum based rf waveforms generated by pulse trains at a clock frequency of 15 GHz.
Programmable Josephson voltage standards for output voltages up to 10 V have been realized. Binary-divided series arrays consisting of 69 632 overdamped SINIS Josephson junctions have been fabricated using reliable Nb-Al/Al2O3technology (S: superconductor, I: insulator, N: normal metal). Series arrays of about 1000 SNS Josephson junctions were realized as lumped arrays for applications in the Josephson arbitrary waveform synthesizer (JAWS). We suggest a novel scheme for combining the higher voltages generated by the binary-divided arrays with the frequency spectral characteristics of the JAWS, in order to optimize the frequency spectrum of the generated ac voltages