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International Conference on Solid-State Sensors, Actuators and Microsystems

Microfabrication and packaging of a Rubidium vapor cell as a plasma light source for MEMS atomic clocks

Vinu Venkatraman, Yves Pétremand, C. Affolderbach, G. Mileti, Nico de Rooij, Herbert R. Shea

Published Jun 1, 2011• 3 citations
Publisher

Abstract

We report on the micro-fabrication and characterization of a chip-scale plasma light source based on a Rubidium (Rb) vapor cell. The Rb plasma light source is intended for use as an integrated optical pump-light source in miniature double-resonance Rb atomic clocks. The RF plasma is capacitively coupled using external electrodes, and the light source is impedance matched to the source for frequencies between 1 and 36 MHz. Rb vapor cells have been previously developed as reference cells for atomic clocks but not as light sources. This is the first reported Rb plasma emitted from a chip-scale device. Stable light emission is observed for over 18 days.

DOI
10.1109/transducers.2011.5969724

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We report on the micro-fabrication and characterization of a chip-scale plasma light source based on a Rubidium (Rb) vapor cell. The Rb plasma light source is intended for use as an integrated optical pump-light source in miniature double-resonance Rb atomic clocks. The RF plasma is capacitively coupled using external electrodes, and the light source is impedance matched to the source for frequencies between 1 and 36 MHz. Rb vapor cells have been previously developed as reference cells for atomic clocks but not as light sources. This is the first reported Rb plasma emitted from a chip-scale device. Stable light emission is observed for over 18 days.
We present the microfabrication and characterization of a low-power, chip-scale Rb plasma light source, designed for optical pumping in miniature atomic clocks. A dielectric barrier discharge (DBD) configuration is used to ignite a Rb plasma in a micro-fabricated Rb vapor cell on which external indium electrodes were deposited. The device is electrically driven at frequencies between 1 and 36 MHz, and emits 140 μW of stable optical power while coupling less than 6 mW of electrical power to the discharge cell. Optical powers of up to 15 and 9 μW are emitted on the Rb D2 and D1 lines, respectively. Continuous operation of the light source for several weeks has been demonstrated, showing its capacity to maintain stable optical excitation of Rb atoms in chip-scale double-resonance atomic clocks.
Miniature (<few cm3) vapor-cell based devices using optical pumping of alkali atoms, such as atomic clocks and magnetometers, today mostly employ vertical-cavity surface-emitting lasers as pump light sources. Here, we report on the demonstration of optical pumping in a microfabricated alkali vapor resonance cell using (1) a microfabricated Rb discharge lamp light source, as well as (2) a conventional glass-blown Rb discharge lamp. The microfabricated Rb lamp cell is a dielectric barrier discharge (DBD) light source, having the same inner cell volume of around 40 mm3 as that of the resonance cell, both filled with suitable buffer gases. A miniature (∼2 cm3 volume) test setup based on the Mz magnetometer interrogation technique was used for observation of optical-radiofrequency double-resonance signals, proving the suitability of the microfabricated discharge lamp to introduce efficient optical pumping. The pumping ability of this light source was found to be comparable to or even better than that of a conventional glass-blown lamp. The reported results indicate that the micro-fabricated DBD discharge lamp has a high potential for the development of a new class of miniature atomic clocks, magnetometers, and quantum sensors.
We present first results on a laser-pumped, double resonance (DR) Rubidium atomic clock, based on micro-fabricated Rb vapour cells. The study aims towards a miniature atomic clock based on DR, using a low-power laser as pump light source and a miniaturized microwave coupling structure (that will replace the bulky microwave cavity employed in today's much bigger Rb clocks). Good signal amplitude, low background light level, and no need for GHz laser modulation are among the advantages of this approach.
Nowadays, the portable atomic clocks with small size and low power consumption have attracted much attention. With the development of the coherent population trapping (CPT) and the micro-electro-mechanical systems (MEMS) technologies, it is possible to fabricate the miniature atomic clocks with power consumption less than 100mW. Researchers have already made great progress in the miniaturization of VCSELs, RF circuits, and photodiodes, which are the key technologies of the chip-scale atomic clock (CSAC). However, the fabrication of micro alkali atomic vapor cells is still to be improved. In this article, we describe the fabrication of micro Rb atomic vapor cells with inner dimensions of 3 mm length and 3 mm radius using anodic bonding and chemical reaction between BaN6and RbCl. The optical absorption and CPT resonances of the cells were measured slightly above the room temperature. In this condition, the consumption in the temperature control will be very low. Moreover, the long life (more than four years) of the cells makes it possible to use them in CSACs.
This paper reports the design, fabrication and evaluation of a reflection-type Rb vapor cell with a Glass/Si/Glass structure for chip-scale micro atomic clocks. To miniaturize the cell and obtain a Rb resonance signal with a high sensitivity, long laser light traveling pass on the horizontal plane is required in the vapor cell. The horizontal Rb vapor cell with integrated mirrors are proposed and developed. A (100)-oriented Si wafer with cut off 9.74° toward [011] direction was used to make 45° mirrors by using anisotropic wet etching. Also, 90° mirrors were fabricated by Si deep RIE (Reactive Ion Etching) and H2annealing. Absorption line of Rb was confirmed and CPT (Coherent Population Trapping) resonance was demonstrated in the fabricated devices.