The goal of this studies is to use dc Squids as low noise radiofrequency amplifier (Tn ≈1K) in the frequency range 1-150 Mhz and to integrate them in NMR probe. DC Squids have been built using planar technology and with two types of superconducting materials : low Tc(Nb) and High Tc(YBa2Cu3O7). Contrary to the traditional set up used in magnetometry (flux locked loop) the dc Squid is here fluxed biased near Φz=(2n+1)Φo/4 and no flux locked loop is connected. Small variations of flux (Φs<<Φo) introduced from signal source via the input coil are amplified following the transfer characteristic VΦ=dV/dΦ. The low Tc devices are set up to now the best, concerning the reproducibility and the qualities of the Josephson Junctions obtained with a three layer process Nb/Al-Al2O3/Nb. Such junctions have been realized following the so called SNOP process, without anodization. The main characteristic obtained at 4.2K are RJ/RN=10, 2Δ≈2.8 meV and a Josephson current density J≈103 A/cm2. The high Tc devices have been built with bi-epitaxial YBa2Cu3O7 junctions and with a 30x30µm2 area loop. I(V) and V(Φ) characteristics curves obtained are promizing for applications as RF detection in the temperature range : 4-77K. Modelization studies are currently in progress for the optimization of those devices (low Tc and high Tc) as RF amplifiers (minimization of parasitic capacitance between the input coil and the Squid loop) in order to increase their upper frequency limit.\n* This work is partially supported by Ultimatech (CNRS), by the "région Rhône-Alpes" and E.E.C. "HTSC-GBJ" programs n°7100.
The goal of this studies is to use dc Squids as low noise radiofrequency amplifier (Tn ≈1K) in the frequency range 1-150 Mhz and to integrate them in NMR probe. DC Squids have been built using planar technology and with two types of superconducting materials : low Tc(Nb) and High Tc(YBa2Cu3O7). Contrary to the traditional set up used in magnetometry (flux locked loop) the dc Squid is here fluxed biased near Φz=(2n+1)Φo/4 and no flux locked loop is connected. Small variations of flux (Φs<<Φo) introduced from signal source via the input coil are amplified following the transfer characteristic VΦ=dV/dΦ. The low Tc devices are set up to now the best, concerning the reproducibility and the qualities of the Josephson Junctions obtained with a three layer process Nb/Al-Al2O3/Nb. Such junctions have been realized following the so called SNOP process, without anodization. The main characteristic obtained at 4.2K are RJ/RN=10, 2Δ≈2.8 meV and a Josephson current density J≈103 A/cm2. The high Tc devices have been built with bi-epitaxial YBa2Cu3O7 junctions and with a 30x30µm2 area loop. I(V) and V(Φ) characteristics curves obtained are promizing for applications as RF detection in the temperature range : 4-77K. Modelization studies are currently in progress for the optimization of those devices (low Tc and high Tc) as RF amplifiers (minimization of parasitic capacitance between the input coil and the Squid loop) in order to increase their upper frequency limit.\n* This work is partially supported by Ultimatech (CNRS), by the "région Rhône-Alpes" and E.E.C. "HTSC-GBJ" programs n°7100.
The dynamics and noise of a dc SQUID (the Superconducting Quantum Interference Device), with the McCumber parameter /spl beta//sub c/=2/spl pi/R/sup 2/l/sub c/C//spl Phi//sub 0/ close to the unity (where I/sub c/, R, C is the critical current, the shunt resistance and the capacitance of the Josephson junctions comprising the SQUID, respectively, /spl Phi//sub 0/=2.07 10/sup -15/ Wb is the magnetic flux quantum) integrated with a planar spiral input coil, have been experimentally studied. The length of the spiral input coil was chosen so as to match its /spl lambda//4 microwave resonance frequency to the plasma resonance frequency of the SQUID. The input coil resonance is found to enhance the overall quality factor Q of the Josephson oscillations in the SQUID and, as a result, to increase the dynamic resistance R/sub d/ and the gradient of the flux-to-voltage characteristics, /spl delta/V//spl delta//spl Phi/, without hysteresis. A dc SQUID with a loop inductance L=30.5 pH, /spl beta//sub c/=0.72, and a 6 turn input coil demonstrated a non-distorted quasi-sinusoidal flux-to-voltage transfer function with an exceptionally large modulation depth of 140 /spl mu/V peak-to-peak. The spectral density of the magnetic flux noise was as low as 3.5/spl times/10/sup -7/ /spl Phi//sub 0//Hz/sup 1/2/ in the double stage configuration, measured at a temperature 4.2 K using direct read out electronics. In combination with an intermediary transformer, the current resolution of the SQUID is as low as 1.25 pA/Hz/sup 1/2/ with an input coil inductance of 100 nH.
The authors have designed, fabricated and tested all-refractory DC SQUIDs in Nb-Al/sub 2/O/sub 3/-Nb trilayer technology that have noise performance comparable to the best previously reported for any technology. A variety of SQUID designs were incorporated as part of a trilayer process development test vehicle. SQUID inductance, junction area, and resistive shunt geometry were varied in matrix fashion to give SQUIDs with near-optimum parameter values for a factor of five range in Josephson current density and shunt sheet resistance. The devices were fabricated using a selective niobium anodization with a minimum feature size of 2 mu m. The base electrode and Nb wiring were patterned with dry etching, and the junction areas were defined by anodization: the Ti resistors were patterned with a lift-off process. Current density on different wafers was varied from 400 to 1000 A/cm/sup 2/ with typical junction V/sub m/'s of 60 mV. The shunt sheet resistance was varied in the 1-5- Omega / Square Operator range. The noise was measured with an RF SQUID direct small-signal readout scheme. A 50-pH SQUID with 3- mu m/sup 2/, 16- mu A junctions and 14- Omega shunt resistors was shown to have an ideally low white noise of 1*10/sup -13/ Phi /sub 0//sup 2//Hz, a white to 1/f crossover frequency at 7 Hz, and a noise level less than 6*10/sup -12/ Phi /sub 0//sup 2//Hz at 0.1 Hz.
We have designed and characterized a micro-SQUID with dispersive readout for use in low temperature scanning probe microscopy systems. The design features a capacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12 GHz, micrometer spatial resolution, and integrated superconducting coils for local application of magnetic fields. The SQUID is operated as a nonlinear oscillator with a flux- and power-dependent resonance frequency. Measurements for device characterization and noise benchmarking were carried out at 4 K. The measured flux noise above 10 kHz at 4 K is 80 nΦ0 Hz−1∕2 at a bandwidth of 200 MHz. Estimations suggest that one can benefit from parametric gain based on inherent nonlinearity of the Josephson junction and reduce the flux noise to 30 nΦ0Hz–1∕2 at 100 mK, which corresponds to 10.6 μBHz–1∕2 for a magnetic moment located at the center of the pickup loop.Measuring the magnetic response of mesoscopic samples or mapping it vs. position for extended systems is effective methods for revealing the fundamental quantum properties of condensed matter systems. Over the past few decades, many advanced magnetic imaging schemes have been developed, including magnetic force microscopy,1 scanning Hall probe microscopy,2 superconducting interference devices (SQUIDs),3,4 and NV center based magnetometry.5 The high sensitivity, low back action, and low power dissipation of SQUIDs make them attractive for many types of low temperature experiments. One classic example is the central role of scanning SQUID microscopy in tests of pairing symmetry of high-Tc cuprate superconductors.6 Other prominent applications are the thermodynamic characteristics of persistent currents in normal metal rings7 and proof of edge states in topological insulators in the quantum spin Hall regime.8A key performance for a SQUID is its flux sensitivity. Parametric amplification has been harnessed in nano-SQUIDs based on aluminum junctions9,10 in order to reduce the flux noise down to 30 nΦ0Hz–1∕2 with a bandwidth exceeding 60 MHz.10 Recent studies on parametric amplifiers and dispersive readout of superconducting qubits also harness the nonlinearity of the Josephson junction to boost sensitivity.11–13In scanning SQUID microscopy, signal sources often behave dipole-like, such as superconducting vortices in mesoscopic dots or currents in mesoscopic rings. Smaller SQUIDs provide better coupling to smaller samples which leads to higher spin sensitivity3,14 as the magnetic field of a dipole decreases with 1/r3. Various approaches have been pursued to reduce the size. The smallest nano-SQUID to date has been fabricated by evaporating Nb or Pb15 onto the apex of a sharp quartz tip reaching a loop diameter of below nm and a spin sensitivity of 0.38 μBHz−1/2 at tens of kHz bandwidth. Compared to such size-optimized devices, micro-SQUIDs fabricated using a standard Nb technique have the advantage of on-chip field coils and modulation coils,14 and can be operated at 4 K allowing for a wide range of applications. However, these come at the cost of larger pick-up loops of a few microns and a resulting poorer spin sensitivity of 200 μBHz−1/2 for a magnetic moment located at the center of the pickup loop.The limitation of large pickup loops was previously only overcome by devices with pickup loops defined by the focused-ion-beam,16 but has recently also been achieved by improvements in lithography and shown to offer better spatial resolution as well.17 Here, we present a scanning micro-SQUID which is based on the same fabrication technology incorporating another major advancement. Our design exploits the parametric amplification based on nonlinearities of the SQUID to boost sensitivity. The combination of a smaller pickup loop and parametric amplification of the signal leads to better spin sensitivity (10.6 μBHz−1/2) and higher bandwidth (200 MHz) compared to traditional DC micro-SQUIDs in which the flux sensitivity is mainly limited by internal dissipation.Our devices were fabricated at Hypres Inc. using planarized Nb/AlOx/Nb trilayer Josephson junction technology, including two planarized Nb layers with approximately 0.8 μm minimum feature size. The SQUID consists of a superconducting ring shunted by one Josephson junction with a designed critical current of 20 μA [Fig. 1(a)]. With this geometry, the SQUID is gradiometric, i.e., the effect of any homogeneous background magnetic field approximately cancels out. The smallest pickup loops implemented have an inner (outer) diameter of 1 μm (2 μm). The superconducting loop is shunted by an on-chip parallel-plate capacitor with amorphous silicon dioxide as dielectric which was designed to have a capacitance of 80 pF. The superconducting loop and the capacitor form a resonator with a flux dependent resonance frequency from 5 to 12 GHz. The pickup loops are placed on opposite corners of the parallel-plate capacitor at a distance of about 450 μm so that one loop can be located in close proximity to the sample while the other is kept far away from it. External fields can be applied to the sample by local single-turn field coils situated around each pickup loop. The field coils are fully integrated into the chip layout and can also be used to bias the SQUID at its most sensitive point. Compared to using additional modulation coils,14 this approach has the advantage of reducing the total device inductance, which leads to a higher sensitivity.18 In a scanning microscope, the field coil at the rear end (away from the sample) can be used to bias the SQUID or operate it in flux feedback such that resulting stray fields will not act on the sample, apart from a weak screening current through the pickup loop. The effective diameter of each coil is 7.5 μm, resulting in a mutual inductance of about 0.34 Φ0/mA (for the smallest pickup loop). The SQUID resonator is connected by an on-chip Z0 = 50 Ω coplanar waveguide (CPW) transmission line to the bonding pads. The two field coils are connected by two smaller CPWs to the bottom edge bonding pads [Fig. 1(c)], ending in two parallel-stripline waveguides running alongside the edges of the capacitor towards the respective field coils. Based on estimations, it should thus be possible to apply high frequency signals of at least several GHz to SQUID and sample.
We have fabricated and tested thin film, niobium edge junction, double transformer, dc superconducting quantum interference devices (SQUID’s) that were stable under room-temperature storage and thermal cycling and that had very good noise performance. The input inductance, approximately 1.7 μH, was large enough to facilitate good matching to many experiments. When the SQUID was operated as a small-signal amplifier, the minimum detectable energy per unit bandwidth (Se) was 5×10−33 J/Hz at 100 kHz, referred to the SQUID loop (uncoupled). The minimum detectable energy per unit bandwidth was 1.8×10−31 J/Hz at 100 kHz, referred to the input coil. The SQUID’s had good characteristics for flux-locked operation since the small signal Se was low over a substantial range of bias current and magnetic flux. For operation in a flux-locked feedback circuit, Se was 6×10−32 J/Hz at 1 kHz.
User-friendly ultra-high-speed readout electronics for dc superconducting quantum interference devices (SQUIDs) are presented. To maximize the system bandwidth, the SQUID is directly read out without flux modulation. A composite preamplifier is used consisting of a slow dc amplifier in parallel with a fast ac amplifier. In this way, excellent dc precision and a high amplifier bandwidth of 50 MHz are achieved, simultaneously. A virtual 50 Ω amplifier input resistance with negligible excess noise is realized by active shunting, i.e., by applying feedback from preamplifier output to input via a high resistance. The white voltage and current noise levels are 0.33 nV Hz −1 and 2.6 pA Hz −1/2 , respectively. The electronics is fully computer controlled via a microcontroller integrated into the flux-locked loop (FLL) board. Easy-to-use software makes the various electronic settings accessible. A wide bias voltage range of 1.3 mV enables the readout of series SQUID arrays. Furthermore, additional current sources allow the operation of two-stage SQUIDs or transition edge sensors. The electronics was tested using various SQUIDs with input inductances between 30 nH and 1.5 µH. Typically, the maximum FLL bandwidth was 20 MHz, which is close to the theoretical limit given by transmission line delay within the FLL. Slew rates of up to 4.6 Φ 0 µs −1 were achieved with series SQUID arrays. Current noise levels as low as 0.47 pA Hz −1/2 and coupled energy sensitivities between 90 h and 500 h were measured at 4.2 K, where h is the Planck constant. The noise did not degrade when the system bandwidth was increased to the maximum value of about 20 MHz. With a two-stage set-up, intrinsic white energy sensitivities of 30 h and 2.3 h were measured at 4.2 and 0.3 K, respectively.
Superconducting quantum interference device (SQUID) is a sensitive detector of magnetic flux signals. Up to now, the main application of SQUIDs has been measurements of magnetic flux signals in the frequency range from near DC to several MHz. Recently, cryogenic low-noise radio-frequency (RF) amplifiers based on DC SQUID are under development aiming to detect RF signals with sensitivity approaching quantum limit. In this paper, we review the recent progress of cryogenic low-noise RF amplifiers based on SQUID technology.