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Applied Physics Letters

High-temperature dc superconducting quantum interference device with deep-submicron YBa2Cu3O7 weak links

Suzanne E. Romaine, Paul M. Mankiewich, William J. Skocpol, E.H. Westerwick

Published Nov 11, 1991• 6 citations
Publisher

Abstract

We have fabricated a YBa2Cu3O7 (YBCO) thin-film dc superconducting quantum interference device (SQUID) with lithographically defined deep-submicron weak links. At 77 K the voltage response to dc flux is sinusoidal and nonhysteretic, with maximum peak-to-peak amplitude of 5 μV. The maximum response is 8 μV at 70 K, where 2LI0/Φ0≊1. At lower temperatures, the maximum response oscillates in the range 4–6 μV. Random telegraph noise was observed near 30–40 K. Well-behaved Shapiro steps were observable at all measured temperatures below Tc.

DOI
10.1063/1.105916

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We have fabricated a YBa2Cu3O7 (YBCO) thin-film dc superconducting quantum interference device (SQUID) with lithographically defined deep-submicron weak links. At 77 K the voltage response to dc flux is sinusoidal and nonhysteretic, with maximum peak-to-peak amplitude of 5 μV. The maximum response is 8 μV at 70 K, where 2LI0/Φ0≊1. At lower temperatures, the maximum response oscillates in the range 4–6 μV. Random telegraph noise was observed near 30–40 K. Well-behaved Shapiro steps were observable at all measured temperatures below Tc.
We have fabricated superconducting quantum interference devices (dc SQUID’s) from thin films of the superconducting oxide YBa2Cu3Oy. The devices were made by first lithographically patterning an ion implant mask containing a 40 by 40 μm loop and two 17-μm-wide weak links over a ∼1-μm-thick oxide film. Ion implantation was then used to destroy the superconductivity in the film surrounding the device without actually removing material, resulting in a completely planar structure for the SQUID’s. The SQUID’s were operated in the temperature range from 4.2 to 68 K. The superconducting flux quantum was measured to be h/2e in these materials.
Autonomous single-layer dc superconducting quantum interference devices (SQUIDs) have been prepared from epitaxial, laser-deposited YBa2Cu3Ox films on step edge SrTiO3 and LaAlO3 substrates. For device patterning, a SiOx inhibit technique as well as conventional ethylenediaminetetraacetic wet etch was used. The Josephson junctions are of grain boundary type. Their widths are 5 μm. The SQUID hole is a square of about 5 μm; the SQUID inductance is estimated to be about 20 pH. We obtained a very regular, nonhysteretic flux to voltage modulation over more than 100 flux quanta (Φ0). The maximum voltage signal is of the order of 15 μV peak to peak and the maximum transfer function dV/dΦ at the appropriate flux bias is 50 μV/Φ0 at 77 K. The best value of the equivalent flux noise as measured in the flux locked loop mode is 1.4×10−5 Φ0/Hz1/2 at 1 Hz and 1×10−5 Φ0/Hz1/2 in the white noise region for f≳5 Hz. This results in an energy resolution εn,w(f≳5 Hz)=1×10−29 J/Hz in the white noise region and 2×10−29 J/Hz at 1 Hz.
We have developed a technique which permits high-yield fabrication of microbridges and low noise YBa2Cu3O7 superconducting quantum interference devices (SQUIDs) in epitaxial thin films. These SQUIDs operate over a wide temperature range extending from 4 K to close to the superconducting transition temperature. Measurements of an rf SQUID operating at 77 K give a peak-to-peak flux sensitivity of 36 μV/Φ0 and a flux noise at 10 Hz of 1.5× 10−4 Φ0/√Hz. Device yields over 80% have been obtained.
We present results on ultra low noise YBa2Cu3O7–δ (YBCO) nano Superconducting QUantum Interference Devices (nanoSQUIDs). To realize such devices, we implemented high quality YBCO nanowires, working as weak links between two electrodes. We observe critical current modulation as a function of an externally applied magnetic field in the full temperature range below the transition temperature TC. The white flux noise below 1μΦ0/Hz at T=8 K makes our nanoSQUIDs very attractive for the detection of small spin systems.
All high-Tc, multilevel edge junction superconducting quantum interference devices (SQUIDs) which now operate at 77 K have been fabricated using laser-ablated YBaCuO electrodes and in situ laser-ablated SrTiO3 for the barrier material. Devices with a SQUID inductance of about 70 pH have a peak to peak voltage swing, VΦ, up to 8 μV (dV/dΦ≂25 μV) and a flux noise (SΦ) of about 3×10−10 Φ20/Hz in the white noise region. IcRn, products for these devices are about 35 μV at 77 K with Ic in the range of 3–100 μA and operation to temperatures as high as 84 K observed. Scaling of the junction conductance and critical current with junction size has been measured on many devices and we observe an IcRn product that varies approximately as J0.89c.
A dc superconducting quantum interference device (SQUID) with coplanar control lines has been fabricated from a single layer of YBa2Cu3O7 thin film. Step-edge junctions were formed using resist/Si double-mask layers. Current–voltage characteristics of this SQUID at 77 K show Shapiro steps under microwave irradiation and are qualitatively consistent with the resistively shunted junction (RSJ) model. The spacing between the closed loop and the coplanar control lines in the tested SQUIDs ranged from 0.2 to 1.5 μm. The measured output voltage-control current characteristics showed that the experimentally derived mutual inductances were a function of the spacing, in agreement with the calculated results. The typical mutual inductance for a spacing of 1.0 μm was ∼0.5 pH, which is adequate for detecting signals of flux-transfer logic gates in which the typical logic amplitude is ∼0.1 mA. A coplanar structure is thus useful for logic gate applications.