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Applied Physics Letters

Sub-μm linewidth input coils for low T c integrated thin-film dc superconducting quantum interference devices

M. B. Ketchen, Kevin G. Stawiasz, Dale J. Pearson, Timothy A. Brunner, Chunhua Hu, Mark A. Jaso, M. P. Manny, A. A. Parsons, K. Stein

Published Jul 20, 1992• 23 citations
Publisher

Abstract

We have, for the first time, demonstrated integrated dc superconducting quantum interference devices (SQUIDs) with input coils of linewidth down to 0.5 μm. The SQUID inductance L consists of a single octagonal washer or two or four such washers configured in parallel. The input coil of inductance Li, which couples to L with a mutual inductance of Mi, consists of fine-line octagonal spiral(s) fabricated in close proximity to the washer(s). For a two-washer SQUID with twin 80-turn, 0.5 μm spirals, Li=2.5 μH, Mi=12.7 nH, L=109 pH, and the coupling constant k2=0.85. This entire device occupies an area of less than 0.2 mm2.

DOI
10.1063/1.107929

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Applied Physics Letters•Feb 15, 1983•12 citations
We have, for the first time, demonstrated integrated dc superconducting quantum interference devices (SQUIDs) with input coils of linewidth down to 0.5 μm. The SQUID inductance L consists of a single octagonal washer or two or four such washers configured in parallel. The input coil of inductance Li, which couples to L with a mutual inductance of Mi, consists of fine-line octagonal spiral(s) fabricated in close proximity to the washer(s). For a two-washer SQUID with twin 80-turn, 0.5 μm spirals, Li=2.5 μH, Mi=12.7 nH, L=109 pH, and the coupling constant k2=0.85. This entire device occupies an area of less than 0.2 mm2.
The authors have designed, fabricated, and measured a number of Nb-AlO/sub x/-Nb octagonal washer DC superconducting quantum interference devices (SQUIDs) and miniature DC SQUID susceptometers having minimum feature size down to 0.5 mu m. With SQUID inductance values on the order of 100 pH, typical noise performance is better than 1 mu Phi /sub 0// square root Hz. The small minimum feature size of input coils and pickup loop structures will facilitate tight coupling to a wide variety of systems ranging from submicron particles and structures to conventional approximately mu H input circuits. A single-washer SQUID with an 80-turn 0.5- mu m-linewidth, 630-nH input coil has user-friendly V- Phi (voltage-flux) curves and a coupled energy sensitivity of 20 h at 4.2 K. Susceptometers with pickup loops ranging from 20- mu m to 0.8- mu m across have very user-friendly V- Phi curves and a resolution of order 100 mu /sub B// square root Hz at 4.2 K for devices with the smallest loops.>
We present a new superconducting quantum interference device (SQUID) that combines ultra-low-noise performance with tight coupling to a useable input coil. The inductive loop of the SQUID consists of a superconducting square washer that is slit in a low inductance fashion from its central hole to an outside edge where two Josephson tunnel junctions are incorporated. The inductance of the SQUID is about 90 pH, and each junction has a critical current of 15 μA and a resistive shunt of 4.5 Ω. The 190-nH input coil is a planar spiral of 50 turns situated immediately above the washer and coupled to the SQUID with a coupling constant k2 of 0.86. The SQUID has a minimum coupled energy sensitivity of 19h at 4.2 K and 8h at 1.5 K, in good agreement with theory. The crossover between white and low frequency noise occurs at ∼250 Hz.
High-transition temperature dc superconducting quantum interference devices (SQUIDs) have been fabricated with arrays of slots or holes patterned in the 186×204 μm2 washers. In two designs, with seven slots or 248 holes, the linewidth of the remaining YBa2Cu3O7−x film was 4 μm. These devices exhibited virtually no increase in their low-frequency noise when they were cooled in static magnetic fields up to a certain threshold, above 100 μT in the best case. Furthermore, the mutual inductance between these devices and a seven-turn, spiral coil was at least 85% of that for a solid SQUID with the same outer dimensions.
We present the results of an investigation of thin-film dc super conducting quantum interference device (SQUID’s) with very high energy resolution. The SQUID’s were fabricated using integrated-circuit techniques appropriate for superconducting devices. A weakly coupled SQUID with very low inductance (1 pH) had an intrinsic energy sensitivity 6×10−34 J/Hz = 0.9 h. A well-coupled SQUID (coupling constant α = 0.43) had an energy sensitivity referred to the input coil of 4.7×10−32 J/Hz = 71 h.
Arrays of dc-superconducting quantum interference devices (dc-SQUIDs) were investigated, in which each dc-SQUID element has a multiturn input coil. The dependence of flux noise on the number of turns of the input coil was studied for current amplifiers. SQUID arrays were fabricated by a Nb/AlO x /Nb Josephson tunnel junction fabrication process. Results show that the flux noise of the SQUID array amplifier does not depend on the turn number of the input coil. A SQUID array amplifier consisting of 128 dc-SQUID elements was fabricated, in which each element had a 7-turn input coil and a mutual inductance between the input coil and the SQUID loop of 460 pH. This amplifier showed an ultrahigh current resolution of 1 pA/Hz0.5 and a maximum input current of 11 µA for signals of 50 kHz, which is sufficient bandwidth for X-ray detection applications. These values correspond to a large dynamic range of 87 dB. The flux-voltage characteristics of this SQUID array, however, showed asymmetric behavior, which originated from electronic resonance in stray capacitance and the mutual inductance between the SQUID loop and the multiturn input coil.