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Physica C Superconductivity

Surface resistance of superconducting microwave passive devices

X.Q. Jia, Lin Kang, J. Chen, Wanning Xu, Peiheng Wu

Published Aug 15, 2006• 1 citation
Publisher
DOI
10.1016/j.physc.2006.06.047

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Superconducting resonators and qubits are limited by dielectric losses from surface oxides. Surface oxides are mitigated through various strategies such as the addition of a metal capping layer, surface passivation, and acid processing. In this study, we demonstrate the use of X-ray photoelectron spectroscopy (XPS) as a rapid characterization tool to study the effectiveness cap layers for niobium for further device fabrication. We non-destructively evaluate 17 capping layers to characterize their ability to prevent oxygen diffusion, and the effects of standard fabrication processes -- annealing, resist stripping, and acid cleaning. We downselect for resilient capping layers and test their microwave resonator performance.
We measured the spatial distribution of microwave fields and dissipative surface currents in various passive and active superconducting thin-film devices during their operation at a temperature of about 4 K. We used low-temperature scanning electron microscopy which offers a spatial resolution of about 1 μm and we present sample response models for interpreting the imaging results. Such investigations may have important consequences for the improvement of the design and preparation of superconducting thin-film microwave devices.