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Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Properties of implanted and CVD incorporated nitrogen-vacancy centers: preferential charge state and preferential orientation

Kai‐Mei C. Fu, Charles Santori, Paul E. Barclay, Andrei Faraon, Daniel J. Twitchen, Matthew Markham, Raymond G. Beausoleil

Published Feb 10, 2011• 4 citations
Publisher

Abstract

The combination of the long electron state spin coherence time and the optical coupling of the ground electronic states to an excited state manifold makes the nitrogen-vacancy (NV) center in diamond an attractive candidate for quantum information processing. To date the best spin and optical properties have been found in centers deep within the diamond crystal. For useful devices it will be necessary to engineer NVs with similar properties close to the diamond surface. We report on properties including charge state control and preferential orientation for near surface NVs formed either in CVD growth or through implantation and annealing.

DOI
10.1117/12.876169

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The combination of the long electron state spin coherence time and the optical coupling of the ground electronic states to an excited state manifold makes the nitrogen-vacancy (NV) center in diamond an attractive candidate for quantum information processing. To date the best spin and optical properties have been found in centers deep within the diamond crystal. For useful devices it will be necessary to engineer NVs with similar properties close to the diamond surface. We report on properties including charge state control and preferential orientation for near surface NVs formed either in CVD growth or through implantation and annealing.
The negatively charged nitrogen-vacancy (${\mathrm{NV}}^{\ensuremath{-}}$) center in diamond is an attractive candidate for applications that range from magnetometry to quantum information processing. Here we show that only a fraction of the nitrogen (typically <0.5<0.5<0.5%) incorporated during homoepitaxial diamond growth by chemical vapor deposition (CVD) is in the form of undecorated ${\mathrm{NV}}^{\ensuremath{-}}$ centers. Furthermore, studies on CVD diamond grown on (110)(110)(110)-oriented substrates show a near 100% preferential orientation of NV centers along only the [111][111][111] and [1‾1‾1][\overline{1}\overline{1}1][111] directions, rather than the four possible orientations. The results indicate that NV centers grow in as units, as the diamond is deposited, rather than by migration and association of their components. The NV unit of the ${\mathrm{NVH}}^{\ensuremath{-}}$ is similarly preferentially oriented, but it is not possible to determine whether this defect was formed by H capture at a preferentially aligned NV center or as a complete unit. Reducing the number of NV orientations from four orientations to two orientations should lead to increased optically detected magnetic resonance contrast and thus improved magnetic sensitivity in ensemble-based magnetometry.
The Nitrogen-Vacancy (NV) color center is a defect of diamond which behaves as an artificial atom hosted in a solid-state matrix. Due to its electron spin properties which can be read-out and manipulated as an elementary quantum system, the NV center has found a wide panel of applications as a qubit for quantum information and as a magnetic field sensor. However these applications require to control the properties of the NV centers and their localization. This doctoral thesis investigates methods allowing us to tailor the properties of NV centers by combining techniques for the implantation of nitrogen atoms and the plasma-assisted (CVD) synthesis of diamond.The manuscript is divided into six chapters. The first chapter summarizes the properties of the NV center which will set our objectives for the NV engineering. The second chapter will describe how arrays of NV centers can be created using Focused Ion Beam implantation. The results open a wide range of applications for the targeted creation of NV centers in diamond structures such as photonic crystals and tips. However the low kinetic energy which is required for achieving implantation within a spot of 10-nm diameter leads to shallow defects which properties are strongly affected by the sample surface. The third chapter investigates how the overgrowth of a diamond layer over implanted NV centers can remove the detrimental influence of the surface. The fourth and fifth chapters describe effective methods for NV center fabrication through the control of the CVD growth conditions of the hosting crystal. Thin layers with high NV doping can be grown and almost perfect control of the orientation of the NV axis can be achieved. With the goal to optimize the spin coherence properties, the sixth chapter investigates how the electron spin of the NV center can be protected from decoherence effects induced by magnetic noise due to the unpolarized spins in the diamond lattice.
Abstract The nitrogen-vacancy (NV) center in diamond is a promising quantum system for magnetometry applications exhibiting optical readout of minute energy shifts in its spin sub-levels. Key material requirements for NV ensembles are a high NV − concentration, a long spin coherence time and a stable charge state. However, these are interdependent and can be difficult to optimize during diamond growth and subsequent NV creation. In this work, we systematically investigate the NV center formation and properties in bulk chemical vapor deposition (CVD) diamond. The nitrogen flow during growth is varied by over four orders of magnitude, resulting in a broad range of single substitutional nitrogen concentrations of 0.2–20 parts per million. For a fixed nitrogen concentration, we optimize electron-irradiation fluences with two different accelerated electron energies, and we study defect formation via optical characterizations. We discuss a general approach to determine the optimal irradiation conditions, for which an enhanced NV concentration and an optimum of NV charge states can both be satisfied. We achieve spin–spin coherence times T 2 ranging from 45.5 to 549 μ s for CVD diamonds containing 168 to 1 parts per billion NV − centers, respectively. This study shows a pathway to engineer properties of NV-doped CVD diamonds for improved sensitivity.
Silicon has turned from a niche laboratory-scale material into the backbone of modern electronics. Diamond functionalized with color centers could follow a similar path and grow from proof-of-concepts experiments to application-oriented quantum technologies. Quantum sensing, communication, and information processing with color centers has been proven to work in scientific experiments and enhanced sensitivities as well as novel functionalities have been reported. While the first generation of diamond quantum devices relied on color centers formed uncontrolled in natural diamond with a high statistical variation in composition and crystallinity, the situation has changed nowadays. With the emergence of high purity monocrystals and the option for isotopic purification of the carbon matrix, technological progress in materials science on the atomic-scale enabled tailoring the spin properties in diamond. But, since many color centers typically require vacancies to combine with impurities in the carbon lattice via diffusion, the generation of color centers underlies a statistical process providing only little control on the center's final position in the crystal lattice. The negatively charged nitrogen-vacancy (NV−^-−) center is the most studied optically active defect in diamond and exhibits remarkable spin properties and sensing capabilities, even on the nanoscale and at room temperature. The spin properties of NV−^-− centers close to the surface (1\,nm - 30\,nm) have been thoroughly studied and the deeper the spins are located in diamond the less decoherence from surface defects is observed. Creating NV−^-− centers at the surface by nitrogen ion implantation and burying them beneath a thin diamond layer via chemical vapor deposition (CVD) of diamond is reported to enhance the coherence times significantly. By separating the color center generation from controlling the resulting depth by an additional diamond layer, narrow depth profiles can be achieved by reducing the ion energy during implantation. Although the coherence properties improve, many of the implanted NV−^-− center are reported to vanish in the hydrogen-rich plasma of growth CVD chambers. The mechanism responsible for the instability of NV−^-− centers towards the plasma remains unclear, though. One hypothesis is the formation of nitrogen-vacancy-hydrogen centers from diffusing hydrogen and implanted NV−^-− centers but is has not been proven, yet. Here, we demonstrate the fabrication of depth confined NV−^-− centers by combining low energy (1\,keV - 5\,keV) ion implantation and CVD overgrowth. By increasing the thickness of the overgrown layer (6\,nm - 100\,nm) the influence of surface noise is shown to decrease leading to bulk-like coherence properties of up to $450\,\upmu$s (Hahn-echo) and T2∗T_2^*T2∗​ dephasing times around $20\,\upmu$s. Monitoring the NV−^-− density as a function of the overgrowth time, we analyze the kinetics of the passivation in case of implanting ion doses of 1011^{11}11 15^{15}15N +^{+}+/cm2^22 and 1012^{12}12 15^{15}15N +^{+}+/cm2^22. The passivation turns out to occur faster for lower doses offering insights into sub-surface hydrogen diffusion in diamond. Analyzing the spin bath before and after overgrowth reveals a drastic reduction in paramagnetic spins after the CVD process but no NVH−^-− is found around the surviving NV−^-− centers. Checking the chemical composition in overgrown implantation sites with secondary-ion-mass-specrometry (SIMS), however, confirms significant amounts of hydrogen in the 15^{15}15N-implanted layers. Since the concentration found for hydrogen exceeds the one for nitrogen by far, we suggest that diffusing hydrogen interacts also with vacancies forming probably mostly diamagnetic defects. In the last part of this dissertation, NV−^-− centers are generated with sub-nanometer precision below a thin 13^{13}13C-enriched layer for quantum simulation. For fabricating the spin architecture starting from a 12^{12}12C base layer, we overgrow implanted nitrogen with a 13^{13}13C layer and bury the spins beneath a 30\,nm-thick 12^{12}12C capping layer. By measuring the coupling strength between the electron and nuclear spins, we deduce a NV−^-− placement accuracy reaching below one nanometer with respect to the 13^{13}13C-layer. Regarding the spin properties of the electron spins, no reduction in T2T_2T2​ is observed despite of the proximity to the dense 13^{13}13C-bath. As a consequence, the overgrowth of NV−^-− centers is demonstrated as a bottom-up approach to produce buried spin architectures with sharp isotopic transitions and efficient 13^{13}13C-NV−^-− coupling. Together with the potential for bulk-like coherence properties the synergy of implantation and overgrowth is a powerful tool to fabricate reproducible quantum systems with tailored properties and high depth confinement.
Nitrogen-vacancy centers in diamond have gained widespread attention as quantum systems that can be applied in quantum information devices. The excellent properties of quantum devices can be enhanced using preferentially oriented nitrogen-vacancy (NV) centers. However, thus far, orientation control has been achieved only via chemical vapor deposition. In this study, we demonstrate the creation of preferentially oriented NV centers via laser writing. The alignment ratio of ensemble NV centers is biased along the direction parallel to [111], depending on the femtosecond laser polarization, causing an increase of 55% in contrast to the optically magnetic resonance signal at maximum compared with 25% in random orientation. Based on time-dependent density-functional theory (TDDFT) simulations and experimental observations, such complex polarization dependence can be attributed to the anisotropy of electron excitation. This technique provides a new optical fabrication method for engineered materials and devices used in quantum technology.
The negatively-charged nitrogen-vacancy (NV) center is the most studied optical center in diamond and is very important for applications in quantum information science. Many proposals for integrating NV centers in quantum and sensing applications rely on their tailored fabrication in ultra pure host material. In this study, we use ion implantation to controllably introduce nitrogen into high purity, low nitrogen chemical vapor deposition diamond samples. The properties of the resulting NV centers are studied as a function of implantation temperature, annealing temperature, and implantation fluence. We compare the implanted NV centers with native NV centers present deep in the bulk of the as-grown samples. The results for implanted NV centers are promising but indicate, at this stage, that the deep native NV centers possess overall superior optical properties. In particular, the implanted NV centers obtained after annealing at 2000 °C under a stabilizing pressure of 8 GPa showed an ensemble linewidth of 0.17 nm compared to 0.61 nm after annealing at 1000 °C. Over the same temperature range, the ensemble NV−/NV0 ratio increased by a factor of ∼5, although this was accompanied by an overall decrease in the NV count.