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Applied Physics B

Doped niobium superconducting nanowire single-photon detectors

Tao Jia, Lin Kang, Labao Zhang, Qingyuan Zhao, Min Gu, Jian Qiu, Jian Chen, Biaobing Jin

Published Feb 17, 2014• 6 citations
Publisher
DOI
10.1007/s00340-014-5787-0

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Niobium nitride (NbN) is widely used in the production of superconducting nanowire single-photon detectors (SNSPDs) due to its high superconducting transition temperature and suitable energy gap. The processing parameters used for the preparation of NbN films and the subsequent processing of nanowires have a significant effect on the performance of the SNSPD. In this review, we will present various thin film growth methods, including magnetron sputtering, atomic layer deposition (ALD), and chemical vapor deposition (CVD). The relationships between the superconducting performance of each thin film and the corresponding deposition process will be discussed. Subsequently, NbN nanowire fabrication methods and microstructures based on thin film etching will be summarized, and their impact on the qualities of the finished SNSPDs will be systematically analyzed. Finally, we will provide an outlook for the future development of preparation for SNSPD.
Niobium nitride (NbN) nanowires have a high repetition rate and efficiency, making them ideal for superconducting nanowire single photon detectors (SNSPDs). However, it is difficult to fabricate NbN arrays over large areas, which is critical for various applications. This paper describes a 4 × 4 NbN SNSPD array (16 pixels) and optical coupling with a 300-μm-diameter multimode fiber using beam compression technology. This is the first NbN SNSPD coupled with such large-diameter fibers. The designed pixels are positioned as closely as possible (pixel filling factor about 98.5%), almost without dead area between them. This results in a system efficiency of 46% and a quantum efficiency of 94.5% for photons (λ = 1064 nm) coupled from multimode fibers. An intrinsic time resolution of less than 69 ps can be obtained. The proposed high-performance single photon detector is suitable for satellite laser ranging. Furthermore, the proposed system is feasible for large SNSPD arrays with NbN, paving the way for the development of efficient photon cameras with NbN nanowires.