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Chinese Physics B

Stable85Rb micro vapour cells: fabrication based on anodic bonding and application in chip-scale atomic clocks

苏娟, Ke Deng, Deng-Zhu Guo, 汪中, 陈兢, 张耿民, 陈徐宗

Published Nov 1, 2010• 13 citations
Publisher

Abstract

We describe the microfabrication of 85 Rb vapour cells using a glass-silicon anodic bonding technique and in situ chemical reaction between rubidium chloride and barium azide to produce Rb. Under controlled conditions, the pure metallic Rb drops and buffer gases were obtained in the cells with a few mm 3 internal volumes during the cell sealing process. At an ambient temperature of 90 °C the optical absorption resonance of 85 Rb D1 transition with proper broadening and the corresponding coherent population trapping (CPT) resonance, with a signal contrast of 1.5% and linewidth of about 1.7 kHz, have been detected. The sealing quality and the stability of the cells have also been demonstrated experimentally by using the helium leaking detection and the after-9-month optoelectronics measurement which shows a similar CPT signal as its original status. In addition, the physics package of chip-scale atomic clock (CSAC) based on the cell was realized. The measured frequency stability of the physics package can reach to 2.1 × 10 −10 at one second when the cell was heated to 100 °C which proved that the cell has the quality to be used in portable and battery-operated devices.

DOI
10.1088/1674-1056/19/11/110701

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We describe the microfabrication of 85 Rb vapour cells using a glass-silicon anodic bonding technique and in situ chemical reaction between rubidium chloride and barium azide to produce Rb. Under controlled conditions, the pure metallic Rb drops and buffer gases were obtained in the cells with a few mm 3 internal volumes during the cell sealing process. At an ambient temperature of 90 °C the optical absorption resonance of 85 Rb D1 transition with proper broadening and the corresponding coherent population trapping (CPT) resonance, with a signal contrast of 1.5% and linewidth of about 1.7 kHz, have been detected. The sealing quality and the stability of the cells have also been demonstrated experimentally by using the helium leaking detection and the after-9-month optoelectronics measurement which shows a similar CPT signal as its original status. In addition, the physics package of chip-scale atomic clock (CSAC) based on the cell was realized. The measured frequency stability of the physics package can reach to 2.1 × 10 −10 at one second when the cell was heated to 100 °C which proved that the cell has the quality to be used in portable and battery-operated devices.
We describe the fabrication of Rubidium (Rb) vapor cells using glass-silicon anodic bonding techniques and chemical reaction between rubidium chloride and barium azide. The pure metallic Rb drops and buffer gases were obtained in the cells with few mm3internal volumes. The optical absorption resonance of85Rb D1 transition with proper broadening and the corresponding coherent population trapping (CPT) resonance, with a signal contrast of 1.5% and linewidth of about 1.7 KHz, have been detected at 90degC.
Nowadays, the portable atomic clocks with small size and low power consumption have attracted much attention. With the development of the coherent population trapping (CPT) and the micro-electro-mechanical systems (MEMS) technologies, it is possible to fabricate the miniature atomic clocks with power consumption less than 100mW. Researchers have already made great progress in the miniaturization of VCSELs, RF circuits, and photodiodes, which are the key technologies of the chip-scale atomic clock (CSAC). However, the fabrication of micro alkali atomic vapor cells is still to be improved. In this article, we describe the fabrication of micro Rb atomic vapor cells with inner dimensions of 3 mm length and 3 mm radius using anodic bonding and chemical reaction between BaN6and RbCl. The optical absorption and CPT resonances of the cells were measured slightly above the room temperature. In this condition, the consumption in the temperature control will be very low. Moreover, the long life (more than four years) of the cells makes it possible to use them in CSACs.
We report the fabrication of a micro vapor cell which has Rb and Ne inside with internal volumes of several millimeters, which is the key component of chip-scale atomic devices like clocks and magnetometers. The cells were filled with Ne at a controlled pressure as the buffer gas by using glass-silicon anodic bonding techniques and dispenser pills of SAES Getters. And a special two-step bonding method was taken to avoid breakdown caused by the buffer gas and to secure the quality of the bonding. We also built an optical measuring system and measured the coherent population trapping (CPT) resonance of85Rb D1 line with a linewidth below 2.0 kHz and a contrast about 1.1%. Zeeman spectrum for CPT resonance was also detected in these microcells. These results show that these vapor cells are capable to be used in atomic clocks or magnetometers.
Herein, a microfabricated millimeter-level vapor alkali cell with a high hermeticity is fabricated through a wet etching and single-chip anodic bonding process. The vapor cell, containing Rb and N2, was investigated in a coherent population trapping (CPT) setup for the application of a chip-scale atomic clock (CSAC). The contrast of CPT resonance is up to 1.1% within the only 1 mm length of light interacting with atom. The effects of some critical external parameters on the CPT resonance, such as laser intensity, cell temperature, and buffer gas pressure, are thoroughly studied and optimized. The improved microfabricated vapor cell also exhibited great potential for other chip-scale atomic devices.
In recent years there has been a strong effort to reduce the size and power consumption of vapour cell atomic clocks [1,2]. The progress in this direction is driven by several factors such as the use low power laser diodes (VCSEL), Coherent Population Trapping resonances (CPT), and micro-fabricated (MEMS) alkali-vapour cells. Here the micro-fabrication of vapour cells has proven a challenging task. All results reported on this task use anodic bonding at high-temperatures (>300°C) to seal the cell [3]. However, the low melting point and high vapour pressure of the alkali-metal combined with long bonding-times (>1hour) complicate this process. We have recently developed a low temperature (~150°C) sealing technique with fast process time (<1min) based on soldering [4]. We report here on the measurement of 85Rb σ+ CPT resonance in low temperature sealed MEMS-fabricated vapour cells containing natural rubidium and buffer gas. The resonance is recorded on the rubidium D1-line (795nm) using a circular polarized and current-modulated VCSEL. We record the resonance shift, linewidth and amplitude as function of several experimental parameters such as light intensity, cell-temperature, and buffer gas pressure- and mixture. In addition we perform noise measurements on the resonance signal to characterize the cell for clock-applications. Preliminary results show a contrast of 1.7% and linewidth of 900Hz for a 4mm long cell with 70mbar of nitrogen buffer gas. Finally we present and characterize two problems related to the application of 85Rb resonance in clock-applications. First, the low modulation frequency of the VCSEL (1.5GHz) leads to a strong asymmetry in the first order sideband spectrum due to the combined effect of AM- and FM modulation. Second, the buffer gas broadening of the absorption spectrum combined with the small separation between VCSEL carrier and sideband reduces the CPT contrast due to off-resonant absorption. We demonstrate that the impact of both these effects can be reduced by modulating the VCSEL at 3GHz and probing the CPT resonance with the carrier and first order sideband. We acknowledge support from the European Space Agency ESA (ESTEC contract number 20794/07/NL/GLC), the Conference Universitaire Suisse CUS (project CIMENT), the Swiss Space Office SSO, and SpectraTime SA (Neuchâtel, Switzerland).
This paper describes the fabrication of chip-scale alkali atom vapor cells, for use in highly miniaturized atomic frequency references, using silicon micromachining and anodic bonding technology. The cells consist of silicon cavities with internal volume ranging from a few mm/sup 3/ to less than 1 mm/sup 3/. The cells were filled with cesium and nitrogen buffer gas either by chemical reaction of cesium chloride and barium azide, or by direct injection of elemental cesium within a controlled anaerobic environment. Cesium optical absorption spectra were obtained from the cells, and coherent population trapping resonances with linewidths of about 1 kHz were measured.