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A 850 GHz SIS receiver employing silicon micro-machining technology

J. Kooi, Jérôme Pety, Paul Schaffer⧧, Tom G. Phillips, B. Bumble, Henry George LeDuc, C. K. Walker

Published Dec 1, 1996• 0 citations
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Abstract

A 850 GHz superconductor-insulator-superconductor (SIS) heterodyne receiver which uses a radiofrequency tuned niobium tunnel junction fabricated on a 1 micron thick silicon nitrate membrane, is reported. From video and heterodyne measurements, it was calculated that the niobium film loss in the radiofrequency matching network is about 6.8 dB at 822 GHz. These results are approximately a factor of two higher than the theoretical loss predicted by the Mattis-Bardeen theory in the extreme anomalous limit. The junction design and the receiver configuration are described, including the mixer block, the membrane construction and the cooled optics. The performance tests using a Fourier transform spectrometer to measure the response of the radiofrequency matching network, and the SIS simulations of the receiver response to cold and hot loads, the infrared noise contribution and the overall mixer conversion efficiency, are reported. It is concluded that the receiver response is limited by the absorption loss in the radiofrequency matching network.

Related papers

A 850-GHz waveguide receiver employing a niobium SIS junction fabricated on a 1-μm Si/sub 3/N/sub 4/ membrane

J. Kooi, Jérôme Pety, B. Bumble +4 more

We report on a 850-GHz superconducting-insulator-superconducting (SIS) heterodyne receiver employing an RF-tuned niobium tunnel junction with a current density of 14 kA/cm^2, fabricated on a 1-µm Si_3N_4 supporting membrane. Since the mixer is designed to be operated well above the superconducting gap frequency of niobium (2Δ/h ≈ 690 GHz), special care has been taken to minimize niobium transmission-line losses. Both Fourier transform spectrometer (FTS) measurements of the direct detection performance and calculations of the IF output noise with the mixer operating in heterodyne mode, indicate an absorption loss in the niobium film of about 6.8 dB at 822 GHz. These results are in reasonably good agreement with the loss predicted by the Mattis-Bardeen theory in the extreme anomalous limit. From 800 to 830 GHz, we report uncorrected receiver noise temperatures of 518 or 514 K when we use Callen and Welton's law to calculate the input load temperatures. Over the same frequency range, the mixer has a 4-dB conversion loss and 265 K ± 10 K noise temperature. At 890 GHz, the sensitivity of the receiver has degraded to 900 K, which is primarily the result of increased niobium film loss in the RF matching network. When the mixer was cooled from 4.2 to 1.9 K, the receiver noise temperature improved about 20% 409-K double sideband (DSB). Approximately half of the receiver noise temperature improvement can be attributed to a lower mixer conversion loss, while the remainder is due to a reduction in the niobium film absorption loss. At 982 GHz, we measured a receiver noise temperature of 1916 K.

IEEE Transactions on Microwave Theory and Techniques•Jan 1, 1998•21 citations

Low-noise THz Niobium SIS Mixers

Mei Bin

This thesis describes the development of low-noise heterodyne receivers at THz frequencies for submillimeter astronomy using Nb-based superconductor-insulator-superconductor (SIS) tunneling junctions. The mixers utilize a quasi-optical configuration which consists of a planar twin-slot antenna and antisymmetrically-fed two-junctions on an antireflection-coated silicon hyperhemispherical lens. On-chip integrated tuning circuits, in the form of microstrip lines, are used to obtain maximum coupling efficiency in the designed frequency band. To reduce the rf losses in the integrated tuning circuits above the superconducting Nb gap frequency (~ 700 GHz), normal-metal Al is used to replace Nb as the tuning circuits. To account the rf losses in the micros trip lines, we calculated the surface impedance of the AI films using the nonlocal anomalous skin effect for finite thickness films. Nb films were calculated using the Mattis-Bardeen theory in the extreme anomalous limit. Our calculations show that the losses of the Al and Nb microstrip lines are about equal at 830 GHz. For Al-wiring and Nb-wiring mixers both optimized at 1050 GHz, the RF coupling efficiency of Al-wiring mixer is higher than that of Nb-wiring one by almost 50%. We have designed both Nb-wiring and Al-wiring mixers below and above the gap frequency. A Fourier transform spectrometer (FTS) has been constructed especially for the study of the frequency response of SIS receivers. This FTS features large aperture size (10 inch) and high frequency resolution (114 MHz). The FTS spectra, obtained using the SIS receivers as direct detectors on the FTS, agree quite well with our theoretical simulations. We have also, for the first time, measured the FTS heterodyne response of an SIS mixer at sufficiently high resolution to resolve the LO and the sidebands. Heterodyne measurements of our SIS receivers with Nb-wiring or Al-wiring have yielded results which arc among the best reported to date for broadband heterodyne receivers. The Nb-wiring mixers, covering 400 - 850 GHz band with four separate fixed-tuned mixers, have uncorrected DSB receiver noise temperature around 5hv/kb to 700 GHz, and better than 540 K at 808 GHz. An Al-wiring mixer designed for 1050 GHz band has an uncorrected DSB receiver noise temperature 840 K at 1042 GHz and 2.5 K bath temperature. Mixer performance analysis shows that Nb junctions can work well up to twice the gap frequency and the major cause of loss above the gap frequency is the rf losses in the microstrip tuning structures. Further advances in THz SIS mixers may be possible using circuits fabricated with higher-gap superconductors such as NbN. However, this will require high-quality films with low RF surface resistance at THz frequencies.

•Sep 1, 1997•8 citations

A 665 GHz Waveguide Receiver Using a Tuned 0.5 μm 2 Nb/AlO x /Nb SIS Tunnel Junction

J. Kooi, Mansun Chan, Henry George LeDuc +1 more

We report recent results on a 580-740 GHz SIS heterodyne receiver employing a tuned 0.50Am Nb/A10x/Nb SIS tunnel junction. The receiver has been successfully installed at the Caltech Submillimeter Observatory, Hawaii. Results of an untuned device in the same waveguide block were presented at the fifth International THz Conference. Since the mixer is meant to be operated near the superconducting gap frequency of niobium (2,L/h 690 GHz), special has been taken to minimize the absorption loss in the rf matching network. To this effect we propose the use of a RF matching network that constitutes a hybrid between the well know end-loaded stub and radial stub matching networks. We have measured uncorrected DSB receiver temperatures as low as 160K from 680to 702 Gliz, 200K at 725GHz and 120K from 585-640 GHz. The uncorrected mixer noise temperature at 702 Gliz is about 125K, of which 62K can be directly contributed to the front end optics loss. Mixer conversion loss at 702 GHz is 7dB, of which 0.9dB is due to the absorption loss in the Nb film. This results in a corrected mixer noise temperature of 63K, 1.7 times the quantum noise limit.

Softwaretechnik-Trends•Mar 1, 1996•1 citation

A wideband fixed-tuned SIS receiver for 200-GHz operation

R. Blundell, Edward Tong, D. C. Papa +6 more

We report on the design and development of a heterodyne receiver, designed to cover the frequency range 176-256 GHz. This receiver incorporates a niobium superconductor-insulator-superconductor (SIS) tunnel junction mixer, which, chiefly for reasons of reliability and ease of operation, is a fixed-tuned waveguide design. On-chip tuning is provided to resonate out the junction's geometric capacitance and produce a good match to the waveguide circuit. Laboratory measurements on the first test receiver indicate that the required input bandwidth (about 40%) is achieved with an average receiver noise temperature of below 50 K. Mixer conversion gain is observed at some frequencies, and the lowest measured receiver noise is less than 30 K. Furthermore, the SIS mixer used in this receiver is of simple construction, is easy to assemble and is therefore a good candidate for duplication.>

IEEE Transactions on Microwave Theory and Techniques•Apr 1, 1995•69 citations

Micromachined Millimeter- and Submillimeter-wave SIS Heterodyne Receivers for Remote Sensing

Qing Hu

A heterodyne mixer with a micromachined horn antenna and a superconductor -insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30+/-3 K without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.

•May 29, 1997•0 citations

Performance Characterization of a 600-700 GHz SIS Mixer

M. J. Wang, Rey Chin, Wenlei Shan +4 more

A 600-700GHz SIS mixer with the twin-junction tuning circuit has been designed and fabricated [1] The surface impedance of thin-film superconducting microstrip lines, based on Mattis-Bardeen theory [2], is included in the optimization of RF impedance matching. The receiver noise temperature measured in the frequency range of 630-660GHz is below 200K and the lowest receiver noise temperature of 181K is achieved at 656GHz. The FTS response of the SIS mixer shows a good RF coupling from 600GHz to 700GHz. Both the noise performance and the FTS response can be quantitatively described by numerical results using the quantum theory of mixing. Some detail considerations on the mixer model calculation, such as spreading inductance around the junction tuning structure and mixer's embedding impedance, are discussed. Introduction Nb-based superconductor-insulator-superconductor (SIS) mixers have been used very successfully in sub-mm wavelength detection. Their receiver noise temperature has reached to three times the quantum limit, —3 hfrkB, below the junction's gap frequency. However, at high frequency bands, Nb SIS mixers need to be designed carefully because the photon energy is close to or higher than the gap energy of Nb, A-1.4meV. When the frequency band covers the gap frequency of Nb, —670GHz, the RF loss of Nb superconducting transmission lines increases dramatically and the surface impedance has strong frequency dependence. Usually, the RF properties of a superconducting transmission line can be described by the Mattis-Bardeen theory [2] in good accuracy. From results reported so far [4-9], the best receiver noise temperature is close to 5 hi7kB in the band of 600-700GHz. Despite of the input loss contributed by the experimental setup, some other properties of SIS mixers should be taken into account. In this paper, we characterize the performance of a 600-700GHz mixer by comparing the experimental and simulated results.

Softwaretechnik-Trends•Mar 1, 2002•1 citation
A 850 GHz superconductor-insulator-superconductor (SIS) heterodyne receiver which uses a radiofrequency tuned niobium tunnel junction fabricated on a 1 micron thick silicon nitrate membrane, is reported. From video and heterodyne measurements, it was calculated that the niobium film loss in the radiofrequency matching network is about 6.8 dB at 822 GHz. These results are approximately a factor of two higher than the theoretical loss predicted by the Mattis-Bardeen theory in the extreme anomalous limit. The junction design and the receiver configuration are described, including the mixer block, the membrane construction and the cooled optics. The performance tests using a Fourier transform spectrometer to measure the response of the radiofrequency matching network, and the SIS simulations of the receiver response to cold and hot loads, the infrared noise contribution and the overall mixer conversion efficiency, are reported. It is concluded that the receiver response is limited by the absorption loss in the radiofrequency matching network.
We report on a 850-GHz superconducting-insulator-superconducting (SIS) heterodyne receiver employing an RF-tuned niobium tunnel junction with a current density of 14 kA/cm^2, fabricated on a 1-µm Si_3N_4 supporting membrane. Since the mixer is designed to be operated well above the superconducting gap frequency of niobium (2Δ/h ≈ 690 GHz), special care has been taken to minimize niobium transmission-line losses. Both Fourier transform spectrometer (FTS) measurements of the direct detection performance and calculations of the IF output noise with the mixer operating in heterodyne mode, indicate an absorption loss in the niobium film of about 6.8 dB at 822 GHz. These results are in reasonably good agreement with the loss predicted by the Mattis-Bardeen theory in the extreme anomalous limit. From 800 to 830 GHz, we report uncorrected receiver noise temperatures of 518 or 514 K when we use Callen and Welton's law to calculate the input load temperatures. Over the same frequency range, the mixer has a 4-dB conversion loss and 265 K ± 10 K noise temperature. At 890 GHz, the sensitivity of the receiver has degraded to 900 K, which is primarily the result of increased niobium film loss in the RF matching network. When the mixer was cooled from 4.2 to 1.9 K, the receiver noise temperature improved about 20% 409-K double sideband (DSB). Approximately half of the receiver noise temperature improvement can be attributed to a lower mixer conversion loss, while the remainder is due to a reduction in the niobium film absorption loss. At 982 GHz, we measured a receiver noise temperature of 1916 K.
This thesis describes the development of low-noise heterodyne receivers at THz frequencies for submillimeter astronomy using Nb-based superconductor-insulator-superconductor (SIS) tunneling junctions. The mixers utilize a quasi-optical configuration which consists of a planar twin-slot antenna and antisymmetrically-fed two-junctions on an antireflection-coated silicon hyperhemispherical lens. On-chip integrated tuning circuits, in the form of microstrip lines, are used to obtain maximum coupling efficiency in the designed frequency band. To reduce the rf losses in the integrated tuning circuits above the superconducting Nb gap frequency (~ 700 GHz), normal-metal Al is used to replace Nb as the tuning circuits. To account the rf losses in the micros trip lines, we calculated the surface impedance of the AI films using the nonlocal anomalous skin effect for finite thickness films. Nb films were calculated using the Mattis-Bardeen theory in the extreme anomalous limit. Our calculations show that the losses of the Al and Nb microstrip lines are about equal at 830 GHz. For Al-wiring and Nb-wiring mixers both optimized at 1050 GHz, the RF coupling efficiency of Al-wiring mixer is higher than that of Nb-wiring one by almost 50%. We have designed both Nb-wiring and Al-wiring mixers below and above the gap frequency. A Fourier transform spectrometer (FTS) has been constructed especially for the study of the frequency response of SIS receivers. This FTS features large aperture size (10 inch) and high frequency resolution (114 MHz). The FTS spectra, obtained using the SIS receivers as direct detectors on the FTS, agree quite well with our theoretical simulations. We have also, for the first time, measured the FTS heterodyne response of an SIS mixer at sufficiently high resolution to resolve the LO and the sidebands. Heterodyne measurements of our SIS receivers with Nb-wiring or Al-wiring have yielded results which arc among the best reported to date for broadband heterodyne receivers. The Nb-wiring mixers, covering 400 - 850 GHz band with four separate fixed-tuned mixers, have uncorrected DSB receiver noise temperature around 5hv/kb to 700 GHz, and better than 540 K at 808 GHz. An Al-wiring mixer designed for 1050 GHz band has an uncorrected DSB receiver noise temperature 840 K at 1042 GHz and 2.5 K bath temperature. Mixer performance analysis shows that Nb junctions can work well up to twice the gap frequency and the major cause of loss above the gap frequency is the rf losses in the microstrip tuning structures. Further advances in THz SIS mixers may be possible using circuits fabricated with higher-gap superconductors such as NbN. However, this will require high-quality films with low RF surface resistance at THz frequencies.
We report recent results on a 580-740 GHz SIS heterodyne receiver employing a tuned 0.50Am Nb/A10x/Nb SIS tunnel junction. The receiver has been successfully installed at the Caltech Submillimeter Observatory, Hawaii. Results of an untuned device in the same waveguide block were presented at the fifth International THz Conference. Since the mixer is meant to be operated near the superconducting gap frequency of niobium (2,L/h 690 GHz), special has been taken to minimize the absorption loss in the rf matching network. To this effect we propose the use of a RF matching network that constitutes a hybrid between the well know end-loaded stub and radial stub matching networks. We have measured uncorrected DSB receiver temperatures as low as 160K from 680to 702 Gliz, 200K at 725GHz and 120K from 585-640 GHz. The uncorrected mixer noise temperature at 702 Gliz is about 125K, of which 62K can be directly contributed to the front end optics loss. Mixer conversion loss at 702 GHz is 7dB, of which 0.9dB is due to the absorption loss in the Nb film. This results in a corrected mixer noise temperature of 63K, 1.7 times the quantum noise limit.
We report on the design and development of a heterodyne receiver, designed to cover the frequency range 176-256 GHz. This receiver incorporates a niobium superconductor-insulator-superconductor (SIS) tunnel junction mixer, which, chiefly for reasons of reliability and ease of operation, is a fixed-tuned waveguide design. On-chip tuning is provided to resonate out the junction's geometric capacitance and produce a good match to the waveguide circuit. Laboratory measurements on the first test receiver indicate that the required input bandwidth (about 40%) is achieved with an average receiver noise temperature of below 50 K. Mixer conversion gain is observed at some frequencies, and the lowest measured receiver noise is less than 30 K. Furthermore, the SIS mixer used in this receiver is of simple construction, is easy to assemble and is therefore a good candidate for duplication.>
A heterodyne mixer with a micromachined horn antenna and a superconductor -insulator-superconductor (SIS) tunnel junction as mixing element is tested in the W-band (75-115 GHz) frequency range. Micromachined integrated horn antennas consist of a dipole antenna suspended on a thin Si3N4 dielectric membrane inside a pyramidal cavity etched in silicon. The mixer performance is optimized by using a backing plane behind the dipole antenna to tune out the capacitance of the tunnel junction. The lowest receiver noise temperature of 30+/-3 K without any correction) is measured at 106 GHz with a 3-dB bandwidth of 8 GHz. This sensitivity is comparable to the state-of-the-art waveguide and quasi-optical SIS receivers, showing the potential use of micromachined horn antennas in imaging arrays.
A 600-700GHz SIS mixer with the twin-junction tuning circuit has been designed and fabricated [1] The surface impedance of thin-film superconducting microstrip lines, based on Mattis-Bardeen theory [2], is included in the optimization of RF impedance matching. The receiver noise temperature measured in the frequency range of 630-660GHz is below 200K and the lowest receiver noise temperature of 181K is achieved at 656GHz. The FTS response of the SIS mixer shows a good RF coupling from 600GHz to 700GHz. Both the noise performance and the FTS response can be quantitatively described by numerical results using the quantum theory of mixing. Some detail considerations on the mixer model calculation, such as spreading inductance around the junction tuning structure and mixer's embedding impedance, are discussed. Introduction Nb-based superconductor-insulator-superconductor (SIS) mixers have been used very successfully in sub-mm wavelength detection. Their receiver noise temperature has reached to three times the quantum limit, —3 hfrkB, below the junction's gap frequency. However, at high frequency bands, Nb SIS mixers need to be designed carefully because the photon energy is close to or higher than the gap energy of Nb, A-1.4meV. When the frequency band covers the gap frequency of Nb, —670GHz, the RF loss of Nb superconducting transmission lines increases dramatically and the surface impedance has strong frequency dependence. Usually, the RF properties of a superconducting transmission line can be described by the Mattis-Bardeen theory [2] in good accuracy. From results reported so far [4-9], the best receiver noise temperature is close to 5 hi7kB in the band of 600-700GHz. Despite of the input loss contributed by the experimental setup, some other properties of SIS mixers should be taken into account. In this paper, we characterize the performance of a 600-700GHz mixer by comparing the experimental and simulated results.