Toward nano-process applications with laser-cooled silicon atoms
Hiroshi Kumagai, Yuichi Asakawa, Katsumi Midorikawa +1 more
We have developed an all-solid-state 252nm coherent light source for laser cooling of silicon atoms with tow-stage highly efficient frequency conversions with external cavities. With the coherent light source, it is possible to manipulate the atomic motion of the silicon atoms towards nano-process applications. In this paper, deflection, collimation, and axial velocity selection of the silicon atomic beam with the coherent light source are discussed.
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE•Feb 21, 2003•2 citations