Superconducting microwave circuits are shaped by their local electromagnetic environment, yet standard microwave measurements do not resolve the local fields and device features that govern their behavior. Here, we combine microwave spectroscopy, nanoscale magnetic sensing, and topographic imaging in a single tapping-mode SQUID-on-tip microscope. The nonlinear Josephson response converts local GHz excitations into Shapiro steps, enabling quantitative measurements of microwave frequency signals and their excitation strength using only DC readout. Applied to a superconducting coplanar waveguide resonator, local spectroscopy reproduces the power-dependent resonance and nonlinear bifurcation observed in microwave transmission measurements. Spatially resolved measurements map the microwave response while simultaneously recording topography and static magnetic features, including vortices and Meissner screening currents. Electromagnetic simulations reveal how coupling through the superconducting probe leads limits spatial resolution and guides localized detector designs. Together, these capabilities establish a platform for correlating microwave circuit dynamics with the local structural and magnetic environment of superconducting devices.
Superconducting microwave circuits are shaped by their local electromagnetic environment, yet standard microwave measurements do not resolve the local fields and device features that govern their behavior. Here, we combine microwave spectroscopy, nanoscale magnetic sensing, and topographic imaging in a single tapping-mode SQUID-on-tip microscope. The nonlinear Josephson response converts local GHz excitations into Shapiro steps, enabling quantitative measurements of microwave frequency signals and their excitation strength using only DC readout. Applied to a superconducting coplanar waveguide resonator, local spectroscopy reproduces the power-dependent resonance and nonlinear bifurcation observed in microwave transmission measurements. Spatially resolved measurements map the microwave response while simultaneously recording topography and static magnetic features, including vortices and Meissner screening currents. Electromagnetic simulations reveal how coupling through the superconducting probe leads limits spatial resolution and guides localized detector designs. Together, these capabilities establish a platform for correlating microwave circuit dynamics with the local structural and magnetic environment of superconducting devices.
We have designed and characterized a micro-SQUID with dispersive readout for use in low temperature scanning probe microscopy systems. The design features a capacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12 GHz, micrometer spatial resolution, and integrated superconducting coils for local application of magnetic fields. The SQUID is operated as a nonlinear oscillator with a flux- and power-dependent resonance frequency. Measurements for device characterization and noise benchmarking were carried out at 4 K. The measured flux noise above 10 kHz at 4 K is 80 nΦ0 Hz−1∕2 at a bandwidth of 200 MHz. Estimations suggest that one can benefit from parametric gain based on inherent nonlinearity of the Josephson junction and reduce the flux noise to 30 nΦ0Hz–1∕2 at 100 mK, which corresponds to 10.6 μBHz–1∕2 for a magnetic moment located at the center of the pickup loop.Measuring the magnetic response of mesoscopic samples or mapping it vs. position for extended systems is effective methods for revealing the fundamental quantum properties of condensed matter systems. Over the past few decades, many advanced magnetic imaging schemes have been developed, including magnetic force microscopy,1 scanning Hall probe microscopy,2 superconducting interference devices (SQUIDs),3,4 and NV center based magnetometry.5 The high sensitivity, low back action, and low power dissipation of SQUIDs make them attractive for many types of low temperature experiments. One classic example is the central role of scanning SQUID microscopy in tests of pairing symmetry of high-Tc cuprate superconductors.6 Other prominent applications are the thermodynamic characteristics of persistent currents in normal metal rings7 and proof of edge states in topological insulators in the quantum spin Hall regime.8A key performance for a SQUID is its flux sensitivity. Parametric amplification has been harnessed in nano-SQUIDs based on aluminum junctions9,10 in order to reduce the flux noise down to 30 nΦ0Hz–1∕2 with a bandwidth exceeding 60 MHz.10 Recent studies on parametric amplifiers and dispersive readout of superconducting qubits also harness the nonlinearity of the Josephson junction to boost sensitivity.11–13In scanning SQUID microscopy, signal sources often behave dipole-like, such as superconducting vortices in mesoscopic dots or currents in mesoscopic rings. Smaller SQUIDs provide better coupling to smaller samples which leads to higher spin sensitivity3,14 as the magnetic field of a dipole decreases with 1/r3. Various approaches have been pursued to reduce the size. The smallest nano-SQUID to date has been fabricated by evaporating Nb or Pb15 onto the apex of a sharp quartz tip reaching a loop diameter of below nm and a spin sensitivity of 0.38 μBHz−1/2 at tens of kHz bandwidth. Compared to such size-optimized devices, micro-SQUIDs fabricated using a standard Nb technique have the advantage of on-chip field coils and modulation coils,14 and can be operated at 4 K allowing for a wide range of applications. However, these come at the cost of larger pick-up loops of a few microns and a resulting poorer spin sensitivity of 200 μBHz−1/2 for a magnetic moment located at the center of the pickup loop.The limitation of large pickup loops was previously only overcome by devices with pickup loops defined by the focused-ion-beam,16 but has recently also been achieved by improvements in lithography and shown to offer better spatial resolution as well.17 Here, we present a scanning micro-SQUID which is based on the same fabrication technology incorporating another major advancement. Our design exploits the parametric amplification based on nonlinearities of the SQUID to boost sensitivity. The combination of a smaller pickup loop and parametric amplification of the signal leads to better spin sensitivity (10.6 μBHz−1/2) and higher bandwidth (200 MHz) compared to traditional DC micro-SQUIDs in which the flux sensitivity is mainly limited by internal dissipation.Our devices were fabricated at Hypres Inc. using planarized Nb/AlOx/Nb trilayer Josephson junction technology, including two planarized Nb layers with approximately 0.8 μm minimum feature size. The SQUID consists of a superconducting ring shunted by one Josephson junction with a designed critical current of 20 μA [Fig. 1(a)]. With this geometry, the SQUID is gradiometric, i.e., the effect of any homogeneous background magnetic field approximately cancels out. The smallest pickup loops implemented have an inner (outer) diameter of 1 μm (2 μm). The superconducting loop is shunted by an on-chip parallel-plate capacitor with amorphous silicon dioxide as dielectric which was designed to have a capacitance of 80 pF. The superconducting loop and the capacitor form a resonator with a flux dependent resonance frequency from 5 to 12 GHz. The pickup loops are placed on opposite corners of the parallel-plate capacitor at a distance of about 450 μm so that one loop can be located in close proximity to the sample while the other is kept far away from it. External fields can be applied to the sample by local single-turn field coils situated around each pickup loop. The field coils are fully integrated into the chip layout and can also be used to bias the SQUID at its most sensitive point. Compared to using additional modulation coils,14 this approach has the advantage of reducing the total device inductance, which leads to a higher sensitivity.18 In a scanning microscope, the field coil at the rear end (away from the sample) can be used to bias the SQUID or operate it in flux feedback such that resulting stray fields will not act on the sample, apart from a weak screening current through the pickup loop. The effective diameter of each coil is 7.5 μm, resulting in a mutual inductance of about 0.34 Φ0/mA (for the smallest pickup loop). The SQUID resonator is connected by an on-chip Z0 = 50 Ω coplanar waveguide (CPW) transmission line to the bonding pads. The two field coils are connected by two smaller CPWs to the bottom edge bonding pads [Fig. 1(c)], ending in two parallel-stripline waveguides running alongside the edges of the capacitor towards the respective field coils. Based on estimations, it should thus be possible to apply high frequency signals of at least several GHz to SQUID and sample.
Superconducting resonators are finding increasing applications in designing advanced quantum circuits for an ongoing sensing, metrology, and computing technological revolution. A detailed knowledge of the microscopic electromagnetic properties of superconducting resonators is directly relevant for their further improvements on circuitry design and device performance. Here, we introduce scanning-probe quantum microscopy to report nanoscale sensing of the microwave and static magnetic field environment of an on-chip niobium (Nb) superconducting resonator. Taking advantage of Rabi oscillation measurements, we show that microwave magnetic fields generated by the superconducting resonator mode can be utilized to achieve coherent control of a quantum spin sensor. We further visualize the static electromagnetic field response of the Nb resonator, showing magnetic field-induced formation, evolution, and depinning of superconducting vortices. Our results provide insights into future design, testing, and evaluation of solid-state superconducting resonators, highlighting the potential of quantum sensors as a local probe to investigate electromagnetic properties of superconducting quantum circuits.
Coplanar waveguide resonators are central to the thriving field of circuit quantum electrodynamics. Recently, we have demonstrated the generation of a broadband microwave-frequency comb spectrum using a superconducting quantum interference device (SQUID) driven by a time-dependent magnetic field. Here, the frequency comb is used to spectroscopically probe a bank of coplanar microwave resonators, inductively coupled to a common transmission line, a standard circuit with a variety of applications. We compare the resonator line shape obtained from signals synthesized at room temperature using conventional electronics with the radiation produced in the cryogenic environment by our source, showing substantial equivalence in the estimation of the resonator quality factors. To measure non-uniformly spaced resonant frequencies, we drive the generator with a bi-chromatic tone to generate intermodulation products. Such a dense frequency comb spectrum enables simultaneous addressing of a few resonators via frequency multiplexing. Finally, we discuss the criteria for achieving effective spectroscopic coverage of a given frequency bandwidth.
Superconducting resonators are finding increasing applications in designing advanced quantum circuits for ongoing sensing, metrology, and computing technological revolution. A detailed knowledge of microscopic electromagnetic properties of superconducting resonators is directly relevant for their further improvements on circuitry design and device performance. Here, we introduce scanning-probe quantum microscopy to report nanoscale sensing of microwave and static magnetic field environment of an on-chip niobium (Nb) superconducting resonator. Taking advantage of Rabi oscillation measurements, we show that microwave magnetic fields generated by the superconducting resonator mode can be utilized to achieve coherent control of a quantum spin sensor. We further visualize static electromagnetic field response of the Nb resonator, showing magnetic field-induced formation, evolution, and depinning of superconducting vortices. Our results provide insights into future design, testing and evaluation of solid-state superconducting resonators, highlighting the potential of quantum sensors as a local probe to investigate electromagnetic properties of superconducting quantum circuits.
We report on the design and performance of a cryogenic (300 mK) near-field scanning microwave microscope. It uses a microwave resonator as the near-field sensor, operating at a frequency of 6 GHz and microwave probing amplitudes down to 100 μV, approaching low enough photon population (N ∼ 1000) of the resonator such that coherent quantum manipulation becomes feasible. The resonator is made out of a miniaturized distributed fractal superconducting circuit that is integrated with the probing tip, micromachined to be compact enough such that it can be mounted directly on a quartz tuning-fork, and used for parallel operation as an atomic force microscope (AFM). The resonator is magnetically coupled to a transmission line for readout, and to achieve enhanced sensitivity we employ a Pound-Drever-Hall measurement scheme to lock to the resonance frequency. We achieve a well localized near-field around the tip such that the microwave resolution is comparable to the AFM resolution, and a capacitive sensitivity down to 6.4 × 10(-20) F/Hz, limited by mechanical noise. We believe that the results presented here are a significant step towards probing quantum systems at the nanoscale using near-field scanning microwave microscopy.
Recently the exploration of nonlinear microwave response in superconducting circuits has been extended to Nb nanobridges that can operate at higher magnetic fields, frequencies, and temperatures than their conventional Al counterparts. Nb nanobridge-based Superconducting Quantum Interference Devices (SQUIDs) have shown potential applications in quantum information processing, weak signal detection, and single spin detection. Combining such non-linear elements with circuit Quantum Electrodynamic (QED) elements like coplanar waveguide (CPW) resonators allows the study of the nonlinearity of such systems. In this work we report on the design, fabrication and dispersive microwave readout of a Nb DC nanoSQUID embedded in a superconducting quarter-wavelength resonator. The measured flux-tuneability of the resonance shows a modulation of a few MHz and fits simulations, giving a critical current of 330 μA and a screening parameterβLof 4.07. Following this we present results showing Kerr-type detuning with a pump tone applied to the device.