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arXiv:2602.08890

Multiplexed microwave resonators by frequency comb spectroscopy

Angelo Greco, Jukka-Pekka Kaikkonen, Luca Chirolli, Alberto Ronzani, Jorden Senior, Francesco Giazotto, Alessandro Crippa

quant-phcond-mat.supr-conSubmitted Feb 9, 2026• Announced Feb 10, 2026• 0 citations
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Abstract

Coplanar waveguide resonators are central to the thriving field of circuit quantum electrodynamics. Recently, we have demonstrated the generation of a broadband microwave-frequency comb spectrum using a superconducting quantum interference device (SQUID) driven by a time-dependent magnetic field. Here, the frequency comb is used to spectroscopically probe a bank of coplanar microwave resonators, inductively coupled to a common transmission line, a standard circuit with a variety of applications. We compare the resonator line shape obtained from signals synthesized at room temperature using conventional electronics with the radiation produced in the cryogenic environment by our source, showing substantial equivalence in the estimation of the resonator quality factors. To measure non-uniformly spaced resonant frequencies, we drive the generator with a bi-chromatic tone to generate intermodulation products. Such a dense frequency comb spectrum enables simultaneous addressing of a few resonators via frequency multiplexing. Finally, we discuss the criteria for achieving effective spectroscopic coverage of a given frequency bandwidth.

Comments
4 main figures and 5 others in the appendices

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Coplanar waveguide resonators are central to the thriving field of circuit quantum electrodynamics. Recently, we have demonstrated the generation of a broadband microwave-frequency comb spectrum using a superconducting quantum interference device (SQUID) driven by a time-dependent magnetic field. Here, the frequency comb is used to spectroscopically probe a bank of coplanar microwave resonators, inductively coupled to a common transmission line, a standard circuit with a variety of applications. We compare the resonator line shape obtained from signals synthesized at room temperature using conventional electronics with the radiation produced in the cryogenic environment by our source, showing substantial equivalence in the estimation of the resonator quality factors. To measure non-uniformly spaced resonant frequencies, we drive the generator with a bi-chromatic tone to generate intermodulation products. Such a dense frequency comb spectrum enables simultaneous addressing of a few resonators via frequency multiplexing. Finally, we discuss the criteria for achieving effective spectroscopic coverage of a given frequency bandwidth.
Frequency combs are useful in a wide range of applications, such as optical metrology and high-precision spectroscopy. We experimentally study a controllable frequency comb generated in a tunable superconducting coplanar-waveguide resonator in the microwave regime. A two-tone drive is applied on one of the resonance modes of the resonator and comb generation is observed around the resonance frequency of the resonator. Both central frequency and teeth density of the comb are precisely controllable, and the teeth spacing can be adjusted from Hz to MHz. Moreover, we show that a few hundreds of sidebands can be generated using a sufficiently strong drive power and the weakest drive power needed to generate the comb can be reduced to approach the quantum limit. These experimental results can be qualitatively explained via theoretical analysis.
High quality on-chip microwave resonators have recently found prominent new applications in quantum optics and quantum information processing experiments with superconducting electronic circuits, a field now known as circuit quantum electrodynamics (QED). They are also used as single photon detectors and parametric amplifiers. Here we analyze the physical properties of coplanar waveguide resonators and their relation to the materials properties for use in circuit QED. We have designed and fabricated resonators with fundamental frequencies from 2 to 9 GHz and quality factors ranging from a few hundreds to a several hundred thousands controlled by appropriately designed input and output coupling capacitors. The microwave transmission spectra measured at temperatures of 20 mK are shown to be in good agreement with theoretical lumped element and distributed element transmission matrix models. In particular, the experimentally determined resonance frequencies, quality factors, and insertion losses are fully and consistently explained by the two models for all measured devices. The high level of control and flexibility in design renders these resonators ideal for storing and manipulating quantum electromagnetic fields in integrated superconducting electronic circuits.
Frequency combs represent exceptionally precise measurement tools due to the coherence of their spectral lines. While optical frequency comb sources constitute a well-established technology, superconducting circuits provide a relatively unexplored on-chip platform for low-dissipation comb emitters able to span from gigahertz to terahertz frequencies. We demonstrate coherent microwave frequency comb generation by leveraging the ac Josephson effect in a superconducting quantum interference device. A time-dependent magnetic drive periodically generates voltage pulses, which in the frequency domain correspond to a comb with dozens of spectral modes here reported up to mode 46. The emitted power at the device level ranges from -170 dBm to -130 dBm per harmonic, corresponding to 40 dB dynamic range in the 4-8 GHz bandwidth. The micrometer-scale footprint and minimal dissipation inherent to superconducting systems foster the integration of our comb generator with advanced cryogenic electronics. Transferring optical techniques to the solid-state domain may enable new applications in quantum technologies.
In this paper, we present a novel design of a compact, double-fold half-wave superconducting coplanar waveguide resonator, specifically optimized for quantum readout. The geometry offers advantages in terms of scalability and allows for a more compact integration of qubits per unit area. The superconducting resonators are designed to operate within a fundamental frequency range of 1.9 GHz$-1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q1.95 GHz, utilizing both gap and finger coupling schemes. The devices are fabricated using thin aluminum films deposited on high-resistivity sapphire substrates. The proposed resonators exhibit quality factor (Q1.95GHz,utilizingbothgapandfingercouplingschemes.Thedevicesarefabricatedusingthinaluminumfilmsdepositedonhigh−resistivitysapphiresubstrates.Theproposedresonatorsexhibitqualityfactor(Q_{L})of2.9×) of 2.9 ×)of2.9× 10^{5}$and 1.58 ×10310^{3}103for gap coupled and finger coupled, respectively, during experimental measurements. The simulated QL_{L}L​of single-folded meander line resonators are found to be 4.65 ×10510^{5}105and 258.42, for gap coupled and finger coupled, respectively, for comparison purpose at similar operating frequency. A comprehensive analysis of the microwave transmission spectra was conducted at cryogenic temperatures near 10 mK, across very high input drive powers ($-30dBmto30 dBm to30dBmto-10dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.210 dBm). Experimental results show a good agreement with simulations and the equivalent lumped circuit model. Notably, the proposed design reduces the physical footprint of the resonator devices up to 28.210dBm).Experimentalresultsshowagoodagreementwithsimulationsandtheequivalentlumpedcircuitmodel.Notably,theproposeddesignreducesthephysicalfootprintoftheresonatordevicesupto28.2\%comparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQcompared to conventional single-fold meandered structures. The resonators demonstrate strong potential for integrating qubits with readout and control buses in quantum information processing which require a Qcomparedtoconventionalsingle−foldmeanderedstructures.TheresonatorsdemonstratestrongpotentialforintegratingqubitswithreadoutandcontrolbusesinquantuminformationprocessingwhichrequireaQ_{L}$between10410^{4}104−-−10510^{5}105. They also being well-suited for cryogenic detector applications that utilize microwave kinetic inductance detector (MKID) arrays in frequency multiplexing for different coupling schemes.
Microwave frequency combs constitute promising resources for quantum technologies, cryogenic electronics, and multiplexed sensing architectures. In this work, we propose a frequency-comb generator based on a Josephson field-effect transistor operated in a relaxation-oscillation regime. The device comprises a gate-tunable ballistic superconductor-semiconductor-superconductor junction embedded in a resistively shunted circuit, in which electrostatic control of the carrier density enables in situ tuning of both the critical current and the Josephson inductance. Time-domain circuit simulations indicate that the resulting oscillator produces coherent voltage pulses whose Fourier spectrum forms a microwave frequency comb. In contrast to conventional Josephson-based comb architectures, the proposed platform provides direct electrical control of the comb spacing, emission frequencies, and modal power distribution via a gate electrode. For a representative Al/InAs implementation, we demonstrate continuous frequency coverage in the technologically relevant 1-10 GHz range. Furthermore, the concept is shown to be compatible with higher-TcT_cTc​ superconductors, underscoring its potential as a compact and scalable microwave source for cryogenic quantum information and sensing applications.
This thesis describes a multiplexer of Superconducting Quantum Interference Devices (SQUIDs) with low-noise, ultra-low power dissipation, and great scalability. The multiplexer circuit measures the magnetic flux in a large number of unshunted rf SQUIDs by coupling each SQUID to a superconducting microwave resonator tuned to a unique resonance frequency and driving the resonators from a common feedline. A superposition of microwave tones measures each SQUID simultaneously using only two coaxial cables between the cryogenic device and room temperature. This multiplexer will enable the instrumentation of arrays with hundreds of thousands of low-temperature detectors for new applications in cosmology, materials analysis, and nuclear non-proliferation.\nThe driving application of the Microwave SQUID Multiplexer is the readout of large arrays of superconducting transition-edge sensors, by some figures of merit the most sensitive detectors of electromagnetic signals over a span of more than nine orders of magnitude in energy, from 40 GHz microwaves to 200 keV gamma rays. Modern transition-edge sensors have noise-equivalent power as low as 10-20 W / [square root] Hz and energy resolution as good as 2 eV at 6 keV. These per-pixel sensitivities approach theoretical limits set by the underlying signals, motivating a rapid increase in pixel count to access new science. Compelling applications, like the non-destructive assay of nuclear material for treaty verification or the search for primordial gravity waves from inflation use arrays of these detectors to increase collection area or tile a focal plane.\nWe developed three generations of SQUID multiplexers, optimizing the first for flux noise (0.17 mu Phi0 / [square root] Hz) the second for input current noise (19 pA / [square root] Hz) and the last for practical multiplexing of large arrays of cosmic microwave background polarimeters based on transition-edge sensors. Using the last design we demonstrated multiplexed readout of prototype polarimeters with the performance required for the future development of a large-scale astronomical instrument.