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arXiv:2605.24581

Dissipative acousto-mechanical parametric interface between high-overtone acoustics and flexural phonons

Xun Ji, Huanying Sun, Longhao Wu, Qichun Liu, Yulong Liu, Mika A. Sillanpää, Tiefu Li

quant-phcond-mat.mes-hallphysics.opticsSubmitted May 23, 2026• Announced May 26, 2026• Revised Sep 17, 2026 (v2)
v1 · May 23, 2026v2 · Sep 17, 2026
arXivHTMLPDF

Abstract

High-overtone bulk acoustic wave resonators (HBARs) promise advanced phononics, yet achieving nonlinearity remains challenging. We demonstrate a radiation-pressure-type parametric interaction between GHz HBARs and low-frequency flexural modes in a suspended silicon nitride membrane, where mechanical displacement modulates the external dissipation rate to enable dissipative acousto-mechanical coupling. Benefiting from the high quality factor, the system enters the resolved-sideband regime at room temperature, yielding acousto-mechanically induced transparency. We observe tunable Kerr nonlinearity and generate coherent HBAR frequency combs via two-tone driving. Notably, our dissipative coupling strength is 20 times larger than the dispersive coupling, the highest ratio among reported hybrid dissipative-dispersive coupling systems, resulting in the experimental observation of amplification in the reflection spectra under red-sideband driving. The ability to interface dense HBAR modes with a common mechanical resonator provides a scalable on-chip platform for multimode phononic information processing, with quantum phononics potentially achievable at sub-Kelvin temperatures.

DOI
10.1103/c2yn-qqv9
Comments
7 pages, 4 figures

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High-overtone bulk acoustic wave resonators (HBARs) promise advanced phononics, yet achieving nonlinearity remains challenging. We demonstrate a radiation-pressure-type parametric interaction between GHz HBARs and low-frequency flexural modes in a suspended silicon nitride membrane, where mechanical displacement modulates the external dissipation rate to enable dissipative acousto-mechanical coupling. Benefiting from the high quality factor, the system enters the resolved-sideband regime at room temperature, yielding acousto-mechanically induced transparency. We observe tunable Kerr nonlinearity and generate coherent HBAR frequency combs via two-tone driving. Notably, our dissipative coupling strength is 20 times larger than the dispersive coupling, the highest ratio among reported hybrid dissipative-dispersive coupling systems, resulting in the experimental observation of amplification in the reflection spectra under red-sideband driving. The ability to interface dense HBAR modes with a common mechanical resonator provides a scalable on-chip platform for multimode phononic information processing, with quantum phononics potentially achievable at sub-Kelvin temperatures.
Mechanical resonators are a promising way for interfacing qubits in order to realize hybrid quantum systems that offer great possibilities for applications. Mechanical systems can have very long energy lifetimes, and they can be further interfaced to other systems. Moreover, integration of a mechanical oscillator with qubits creates a potential platform for the exploration of quantum physics in macroscopic mechanical degrees of freedom. The utilization of high overtone bulk acoustic resonators coupled to superconducting qubits is an intriguing platform towards these goals. These resonators exhibit a combination of high-frequency and high-quality factors. They can reach their quantum ground state at dilution refrigeration temperatures and they can be strongly coupled to superconducting qubits via their piezoelectric effect. In this paper, we demonstrate our system where bulk acoustic phonons of a high overtone resonator are coupled to a transmon qubit in a planar circuit architecture. We show that the bulk acoustic phonons are interacting with the qubit in a simple design architecture at the quantum level, representing further progress towards the quantum control of mechanical motion.
Circuit quantum acoustodynamics (cQAD) devices have a wide range of applications in quantum science, all of which depend crucially on the quantum coherence of the mechanical subsystem. In this context, high-overtone bulk acoustic-wave resonators (HBARs) are particularly promising, since they have shown very high quality factors with negligible dephasing. However, the introduction of piezoelectric films, which are necessary for coupling to a superconducting circuit, can lead to additional loss channels, such as surface scattering and two-level systems. Here, we study the acoustic dissipation of HBAR resonators in cQAD systems and find that the defect density of the piezoelectric material and its interface with the bulk are limiting factors for the coherence. We measure acoustic modes with phonon lifetimes up to 400 mu s and lifetime-limited coherence times approaching 1 ms in the quantum regime. When coupled to a superconducting qubit, this leads to a hybrid system with a large quantum coherence cooperativity of CT2 1/4 1.1 & times; 105. These results represent a new milestone for the performance of cQAD devices and offer concrete paths forward for further improvements.
In recent years, remarkable progress has been made towards encoding and processing quantum information in the large Hilbert space of bosonic modes. Mechanical resonators are of great interest for this purpose, since they confine many high quality factor modes into a small volume and can be easily integrated with many different quantum systems. An important yet challenging task is to create direct interactions between different mechanical modes. Here we demonstrate an in-situ tunable beam-splitter-type interaction between several mechanical modes of a high-overtone bulk acoustic wave resonator. The engineered interaction is mediated by a parametrically driven superconducting transmon qubit, and we show that it can be tailored to couple pairs or triplets of phononic modes. Furthermore, we use this interaction to demonstrate the Hong-Ou-Mandel effect between phonons. Our results lay the foundations for using phononic systems as quantum memories and platforms for quantum simulations.
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Acoustic modes—in the form of collective vibrations trapped between the parallel and polished surfaces of a crystalline cavity—provide an intriguing opportunity for probing the quantum-mechanical regime of macroscopical mechanical resonators. Moreover, the exceptional quality factors in a compact size from mm to μm motivate the integration of acoustic resonators into quantum circuits to explore the applications of a quantum hybrid system.While the acoustic modes of a crystal are commonly isolated from electrical dynamics, piezoelectricityis employed to transduce energy between the two domains. In the first part of this thesis, we investigate the means to improve the quality factor of a low frequency plano-convex monolithic quartz resonator. The resonator is 7mm indiameter and 250 μm in thickness, made only of only piezoelectric crystalline material. By the removal of clamping losses and incorporating a distant non-contact measurement setup,we demonstrate quality factors as high as 108 at cryogenic temperatures close to the quantumground state. Additionally, we model the electromechanical clamping losses of a particular grounding setup using temperature-dependent data and the acoustic transmission line based Mason’s model. In the latter part of this thesis, we couple a bulk acoustic high-overtone resonator (HBAR) with a transmon qubit. The electrical actuation of GHz-frequency sound in a HBAR is based on a μm-thin piezo film grown on a low-loss crystalline non-piezo bulk substrate. With an analogy to an acoustic musical instrument, the driven oscillations are amplified at the resonant frequencies of the acoustic cavity, with the addition that a small subset of such modes are selectively listened by the qubit. By the introduction of the acoustic overtones, high quality factors are accessible at the high frequencies of a transmon qubit,while the coupling between the two systems is distributed over the multitude of modes. I model this coupling in detail with respect to the system parameters for guiding the design of related quantum acoustic devices. I cover several different parameter regimes and explore the rich physics taking place in the multimodal hybrid system: Landau-Zener Stuckelberg interference, photon assisted sideband transitions and parametrically modulated coupling that involve the resonant periodical exchange of energy quanta known as vacuum Rabi oscillations, and drive-dependent multiphonon transitions. Despite the otherwise common difficulty to observe quantum mechanics in a harmonic oscillator, we observe purely quantum mechanical effects in the macroscopic resonator, such as a specific square root dependence of the transition energies on the quantum number.
Circuit quantum acoustodynamics (cQAD) devices have a wide range of applications in quantum science, all of which depend crucially on the quantum coherence of the mechanical subsystem. In this context, high-overtone bulk acoustic-wave resonators (HBARs) are particularly promising, since they have shown very high quality factors with negligible dephasing. However, the introduction of piezoelectric films, which are necessary for coupling to a superconducting circuit, can lead to additional loss channels, such as surface scattering and two-level systems (TLS). Here, we study the acoustic dissipation of HBAR resonators in cQAD systems and find that the defect density of the piezoelectric material and its interface with the bulk are limiting factors for the coherence. We measure acoustic modes with phonon lifetimes up to 400 μμμs and lifetime-limited coherence times approaching one millisecond in the quantum regime. When coupled to a superconducting qubit, this leads to a hybrid system with a large quantum coherence cooperativity of CT2=1.1×105C_{T_2}=1.1\times10^5CT2​​=1.1×105. These results represent a new milestone for the performance of cQAD devices and offer concrete paths forward for further improvements.