Abstract The rising complexity of cutting-edge cryogenic systems is currently imposing challenging technical constraints to the monitoring of ultra-cold temperatures through standard commercially available sensors. Among different alternative technologies, superconducting microwave resonators have been recently investigated as ideal candidates for performing on-chip cryogenic thermometry, in reason of their intrinsically low power dissipation, typically large temperature sensitivities and excellent sub- μ K resolution below 10 K. In such a framework, through this study we aim at demonstrating the possibility to enhance the temperature performance of superconducting microwave resonators by means of surface nanostructuring. More specifically, different arrays of nanotrenches are strategically patterned on the inductive line of a 1.3 GHz planar resonator, by partially etching a Nb 50 Ti 50 thin-film, in order to tune the critical transition of the material and, therefore, increase the curvature of the f res ( T ) response. Although the presence of such thinned superconducting regions introduces larger microwave losses, a 1.5 K decrease of T C is recorded, which directly translates into an enhancement of the temperature sensitivity by a factor 10, with respect to a reference non-nanostructured sensor. In particular, a maximum value of d f res / d T ≃ 62 MHz/K , at 4.2 K, is achieved for the device showing the largest nanotrench width of about 350 nm. These results demonstrate that such a surface nanostructuring approach can be exploited as an effective design strategy to tune the response of superconducting microwave resonators and enhance their temperature sensitivity around a target operating condition. Although this technique is found to introduce additional RF losses into the superconducting device, thereby limiting the achievable temperature resolution to the few- μ K/Hz 1 / 2 range (at 1 Hz and 4.2 K), we believe that similar approaches could be further investigated for the development of future cryogenic sensors.
Abstract The rising complexity of cutting-edge cryogenic systems is currently imposing challenging technical constraints to the monitoring of ultra-cold temperatures through standard commercially available sensors. Among different alternative technologies, superconducting microwave resonators have been recently investigated as ideal candidates for performing on-chip cryogenic thermometry, in reason of their intrinsically low power dissipation, typically large temperature sensitivities and excellent sub- μ K resolution below 10 K. In such a framework, through this study we aim at demonstrating the possibility to enhance the temperature performance of superconducting microwave resonators by means of surface nanostructuring. More specifically, different arrays of nanotrenches are strategically patterned on the inductive line of a 1.3 GHz planar resonator, by partially etching a Nb 50 Ti 50 thin-film, in order to tune the critical transition of the material and, therefore, increase the curvature of the f res ( T ) response. Although the presence of such thinned superconducting regions introduces larger microwave losses, a 1.5 K decrease of T C is recorded, which directly translates into an enhancement of the temperature sensitivity by a factor 10, with respect to a reference non-nanostructured sensor. In particular, a maximum value of d f res / d T ≃ 62 MHz/K , at 4.2 K, is achieved for the device showing the largest nanotrench width of about 350 nm. These results demonstrate that such a surface nanostructuring approach can be exploited as an effective design strategy to tune the response of superconducting microwave resonators and enhance their temperature sensitivity around a target operating condition. Although this technique is found to introduce additional RF losses into the superconducting device, thereby limiting the achievable temperature resolution to the few- μ K/Hz 1 / 2 range (at 1 Hz and 4.2 K), we believe that similar approaches could be further investigated for the development of future cryogenic sensors.
Cryogenic systems are essential to many modern scientific and technological applications, including MRI superconducting magnets, particle accelerators, astrophysical detectors and quantum computing platforms, all of which operate at temperatures well below 120 K. In this framework, accurate temperature monitoring is, therefore, critical. However, conventional Resistance Temperature Detectors (RTDs) suffer from significant limitations in cryogenic environments, such as wiring complexity, power dissipation, limited low-temperature operation and large footprint, which restrict their integration in increasingly complex cryogenic infrastructures. Superconducting devices offer a promising alternative due to their high sensitivity at low temperatures, low power dissipation and compatibility with integrated quantum technologies. Inspired by Microwave Kinetic Inductance Detectors (MKIDs), this work investigates superconducting microwave resonators as minimally invasive, frequency-multiplexed cryogenic thermometers operating below 12 K. In particular, strategies to tune and enhance temperature sensitivity are explored by studying the effects of the superconducting thin-film thickness and surface nanostructuring. The first part of the study examines NbTi(N) planar resonators with thicknesses ranging from 20 nm to 150 nm, where temperature sensing is based on the temperature dependence of the kinetic inductance. S-shaped split-ring resonators resonating near 1.1 GHz are inductively coupled to a coplanar transmission line and characterized under cryogenic conditions. A clear trade-off between temperature sensitivity and quality factor is observed: thinner films achieve higher sensitivity, up to approximately 19 MHz/K for 20 nm thick devices, while the quality factor, typically exceeding 10^4, is found to degrade when the thickness is reduced. This trade-off leads to an optimal temperature resolution, with sub-microkelvin noise-equivalent temperature (NET) values. In particular, a minimum NET of (0.53±0.09) µK/Hz^(1/2) at 4.2 K is achieved for a 100 nm thick resonator, which is also exploited to study low-frequency temperature fluctuations in liquid helium. In the second part, a possible approach to enhance the temperature sensitivity, through surface nanostructuring, is investigated. Arrays of nanogaps are patterned in high-current regions of a 1.3 GHz resonator, in order to locally suppress superconductivity, reduce the critical temperature of the film and, therefore, accentuate the slope of the temperature-sensitive curve. These weak-links are realized by partially etching a 100 nm NbTi film, to leave 20-30 nm thick remaining nanogaps. Measurements reveal a significant increase in temperature sensitivity, reaching values as high as up to (62±1) MHz/K, which correspond to one order-of-magnitude improvement over non-nanostructured devices. Although this enhancement comes with increased noise-equivalent temperature, the results demonstrate the feasibility of engineering superconducting weak links to improve RF cryogenic thermometry and provide a solid foundation for future optimization. In reason of the achieved results, such an approach could find successful applications for a sub-µK high-resolution cryogenic temperature monitoring, specifically for integrated quantum architectures, further benefiting from the frequency-multiplexing that naturally arises from the multiple allocation of different superconducting microwave resonators.
Abstract Superconducting microwave resonators have recently gained a primary importance in the development of cryogenic applications, such as circuit quantum electrodynamics, electron spin resonance spectroscopy and particles detection for high-energy physics and astrophysics. In this work, we investigate the influence of the film thickness on the temperature response of microfabricated Nb 50 Ti 50 superconducting resonators. S-shaped split ring resonators (S-SRRs), approximately 20 nm to 150 nm thick, are designed to be electromagnetically coupled with standard Cu coplanar waveguides (CPWs) and their microwave properties are characterised at temperatures below 10 K . The combined contributions of the kinetic inductance L K ( T ) increase and the decreasing loaded quality factor Q L , for thinner films, induce an optimum condition on the temperature sensitivity and resolution of the resonators. A noise equivalent temperature as low as ( 0.53 ± 0.09 ) μ K Hz − 1 / 2 , at 1 Hz , is reported for 100 nm thick resonators at 4.2 K . We also asses the possibility of implementing a multiplexed frequency readout, allowing for the simultaneous temperature tracking of several sensors along a single CPW. Such results demonstrate the possibility to perform a distributed cryogenic temperature monitoring, with a sub- μ K resolution. Thus, the application of superconducting S-SRRs, eventually benefiting from an even higher
In this work, we investigated how different under- and capping layers on patterned Nb films impacted the RF losses of flexible thin-film superconducting microstrip transmission line resonators measured in a frequency range from 2 to 20 GHz. We studied how different thicknesses of Ti(10 and 50 nm) under-layer, used for adhesion, impacts conductor losses. We also studied Cu(20, 50, 100, and 200 nm) capping layers and how they affect conductor loss. These studies were carried out on 20-μm-thick spin-on polyimide (PI-2611) thin films and characterized at various cryogenic temperatures between 1.2 and 4.2 K. The results indicate normal-superconductor (Ti/Nb) and superconductor-normal (Nb/Cu) bilayer structures have increased surface resistance, which leads to an increase in microwave loss when compared to Nb-only signal traces. We quantified this additional loss by extracting resonator quality factors for weakly coupled resonators with various conductor stack-ups. Our experimental results can help inform decisions regarding material stack-ups when designing multiconductor multilayer superconducting flexible cables intended for use with ultralow-temperature electronic systems.
Superconducting microwave resonators have the potential to revolutionize submillimeter and far-infrared astronomy, and with it our understanding of the universe. The field of low-temperature detector technology has reached a point where extremely sensitive devices like transition-edge sensors are now capable of detecting radiation limited by the background noise of the universe. However, the size of these detector arrays are limited to only a few thousand pixels. This is because of the cost and complexity of fabricating large-scale arrays of these detectors that can reach up to 10 lithographic levels on chip, and the complicated SQUID-based multiplexing circuitry and wiring for readout of each detector. In order to make substantial progress, next- generation ground-based telescopes such as CCAT or future space telescopes require focal planes with large-scale detector arrays of 104–106 pixels. Arrays using microwave kinetic inductance detectors (MKID) are a potential solution. These arrays can be easily made with a single layer of superconducting metal film deposited on a silicon substrate and pattered using conventional optical lithography. Furthermore, MKIDs are inherently multiplexable in the frequency domain, allowing ∼ 103 detectors to be read out using a single coaxial transmission line and cryogenic amplifier, drastically reducing cost and complexity. An MKID uses the change in the microwave surface impedance of a superconducting thin-film microresonator to detect photons. Absorption of photons in the superconductor breaks Cooper pairs into quasiparticles, changing the complex surface impedance, which results in a perturbation of resonator frequency and quality factor. For excitation and readout, the resonator is weakly coupled to a transmission line. The complex amplitude of a microwave probe signal tuned on-resonance and transmitted on the feedline past the resonator is perturbed as photons are absorbed in the superconductor. The perturbation can be detected using a cryogenic amplifier and subsequent homodyne mixing at room temperature. In an array of MKIDs, all the resonators are coupled to a shared feedline and are tuned to slightly different frequencies. They can be read out simultaneously using a comb of frequencies generated and measured using digital techniques. This thesis documents an effort to demonstrate the basic operation of ∼ 256 pixel arrays of lumped-element MKIDs made from superconducting TiNx on silicon. The resonators are designed and simulated for optimum operation. Various properties of the resonators and arrays are measured and compared to theoretical expectations. A particularly exciting observation is the extremely high quality factors (∼ 3 × 107) of our TiNx resonators which is essential for ultra-high sensitivity. The arrays are tightly packed both in space and in frequency which is desirable for larger full-size arrays. However, this can cause a serious problem in terms of microwave crosstalk between neighboring pixels. We show that by properly designing the resonator geometry, crosstalk can be eliminated; this is supported by our measurement results. We also tackle the problem of excess frequency noise in MKIDs. Intrinsic noise in the form of an excess resonance frequency jitter exists in planar superconducting resonators that are made on dielectric substrates. We conclusively show that this noise is due to fluctuations of the resonator capacitance. In turn, the capacitance fluctuations are thought to be driven by two-level system (TLS) fluctuators in a thin layer on the surface of the device. With a modified resonator design we demonstrate with measurements that this noise can be substantially reduced. An optimized version of this resonator was designed for the multiwavelength submillimeter kinetic inductance camera (MUSIC) instrument for the Caltech Submillimeter Observatory.
Abstract The performance of superconducting microwave circuits is strongly influenced by the material properties of the superconducting film and substrate. While progress has been made in understanding the importance of surface preparation and the effect of surface oxides, the complex effect of superconductor film structure on microwave losses is not yet fully understood. In this study, we investigate the microwave properties of niobium resonators with different crystalline properties and related surface topographies. We analyze a series of magnetron sputtered films in which the Nb crystal orientation and surface topography are changed by varying the substrate temperatures between room temperature and 975 K. The lowest-loss resonators that we measure have quality factors of over 10 6 at single-photon powers, among the best ever recorded using the Nb on sapphire platform. We observe the highest quality factors in films grown at an intermediate temperature regime of the growth series (550 K) where the films display both preferential ordering of the crystal domains and low surface roughness. Furthermore, we analyze the temperature-dependent behavior of our resonators to learn about how the quasiparticle density in the Nb film is affected by the niobium crystal structure and the presence of grain boundaries. Our results stress the connection between the crystal structure of superconducting films and the loss mechanisms suffered by the resonators and indicate that even a moderate change in temperature during thin film deposition can significantly affect the resulting quality factors.
We describe a novel class of devices based on the nonlinearity of the kinetic inductance of a superconducting thin film. By placing a current-dependent inductance in a microwave resonator, small currents can be measured through their effect on the resonator’s frequency. By using a high-resistivity material for the film and nanowires as kinetic inductors, we can achieve a large coefficient of nonlinearity to improve device sensitivity. We demonstrate a current sensitivity of 8 pA/√Hz, making this device useful for transition-edge sensor (TES) readout and other cutting-edge applications. An advantage of these devices is their natural ability to be multiplexed in the frequency domain, enabling large detector arrays for TES-based instruments. A traveling-wave version of the device, consisting of a thin-film microwave transmission line, is also sensitive to small currents as they change the phase length of the line due to their effect on its inductance. We demonstrate a current sensitivity of 5 pA/√Hz for this version of the device, making it also suitable for TES readout as well as other current-detection applications. It has the advantage of multi-gigahertz bandwidth and greater dynamic range, offering a different approach to the resonator version of the device. Finally, we also demonstrate a transmission-line resonator version of the device that combines some of the advantages of the nanowire resonator and the traveling-wave device. This version of the device has high dynamic range but can also be easily multiplexed in the frequency domain. A lumped-element resonator similar to the first device can be placed in a loop configuration to make it sensitive to magnetic fields. We demonstrate an example of such a device whose sensitivity could ultimately reach levels similar to those of state-of-the-art DC SQUIDs, making it potentially useful for many magnetometry applications given its ease of multiplexing. Finally, a similar microwave resonator is shown to exhibit parametric gain of up to 29 dB in the presence of a strong pump tone. The noise performance of this parametric amplifier approaches the quantum limit, making it useful for applications in quantum information and metrology.