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arXiv:2509.07669

On-chip microwave sensing of quasiparticles in tantalum superconducting circuits on silicon for scalable quantum technologies

Shima Poorgholam-Khanjari, Paniz Foshat, Mingqi Zhang, Valentino Seferai, Martin P. Weides, Kaveh Delfanazari

Published Sep 9, 2025• 0 citations
arXivHTMLPDF

Abstract

The performance and scalability of superconducting quantum circuits are fundamentally constrained by non-equilibrium quasiparticles, which induce microwave losses that limit resonator quality factors and qubit coherence times. Understanding and mitigating these excitations is therefore central to advancing scalable quantum technologies. Here, we demonstrate on-chip microwave sensing of quasiparticles in high-Q α-tantalum coplanar waveguide resonators on silicon, operated in the single-photon regime. Temperature-dependent measurements reveal persistent non-equilibrium quasiparticles at millikelvin temperatures, producing a measurable suppression of the internal quality factor (Qi) relative to theoretical expectations. By benchmarking across materials, we find that the quasiparticle density in α-Ta is approximately one-third that of NbN at equivalent normalised temperatures (T/Tc), directly correlating with reduced microwave loss. Our methodology establishes a scalable platform for probing quasiparticle dynamics and points towards new routes for engineering superconducting circuits with improved coherence, with impact on qubit readout resonators, kinetic-inductance detectors, and emerging quantum processors and sensors.

DOI
10.48550/arxiv.2509.07669

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The performance and scalability of superconducting quantum circuits are fundamentally constrained by non-equilibrium quasiparticles, which induce microwave losses that limit resonator quality factors and qubit coherence times. Understanding and mitigating these excitations is therefore central to advancing scalable quantum technologies. Here, we demonstrate on-chip microwave sensing of quasiparticles in high-Q α-tantalum coplanar waveguide resonators on silicon, operated in the single-photon regime. Temperature-dependent measurements reveal persistent non-equilibrium quasiparticles at millikelvin temperatures, producing a measurable suppression of the internal quality factor (Qi) relative to theoretical expectations. By benchmarking across materials, we find that the quasiparticle density in α-Ta is approximately one-third that of NbN at equivalent normalised temperatures (T/Tc), directly correlating with reduced microwave loss. Our methodology establishes a scalable platform for probing quasiparticle dynamics and points towards new routes for engineering superconducting circuits with improved coherence, with impact on qubit readout resonators, kinetic-inductance detectors, and emerging quantum processors and sensors.
High Resolution Image Download MS PowerPoint Slide The performance and scalability of superconducting quantum circuits are fundamentally constrained by nonequilibrium quasiparticles, which induce microwave losses that limit resonator quality factors and qubit coherence times. Understanding and mitigating these excitations is therefore central to advancing scalable quantum technologies. Here, we demonstrate on-chip microwave sensing of quasiparticles in high- Q α -tantalum coplanar waveguide resonators on silicon, operated in the single-photon regime. Temperature-dependent measurements reveal persistent nonequilibrium quasiparticles at millikelvin temperatures, producing a measurable suppression of the internal quality factor ( Q i ) relative to theoretical expectations. By benchmarking across materials, we find that the quasiparticle density in α-Ta is approximately one-third that of NbN at equivalent normalized temperatures ( T / T c ), directly correlating with reduced microwave loss. Our methodology establishes a scalable platform for probing quasiparticle dynamics and points toward new routes for engineering superconducting circuits with improved coherence, with impact on qubit readout resonators, kinetic-inductance detectors, and emerging quantum processors and sensors.
Abstract Tantalum (Ta) has recently received considerable attention in manufacturing robust superconducting quantum circuits. Ta offers low microwave loss, high kinetic inductance compared to aluminium (Al) and niobium (Nb), and good compatibility with complementary metal-oxide-semiconductor (CMOS) technology, which is essential for quantum computing applications. Here we demonstrate the fabrication engineering of thickness-dependent high-quality-factor (high-  Qi\:{Q}_{i}Qi​ ) Ta superconducting microwave coplanar waveguide resonators. All films are deposited on high-resistivity silicon substrates at room temperature without additional substrate heating. Before Ta deposition, a niobium (Nb) seed layer is used to promote a body-centred cubic lattice (  α \:\alpha\:α -Ta) formation. We further engineer the kinetic inductance (  LK\:{L}_{K}LK​ ) of the resonators by varying Ta film thicknesses. High  LK\:{L}_{K}LK​ is a key advantage for applications because it facilitates the realisation of high-impedance, compact quantum circuits with enhanced coupling to qubits. The maximum internal quality factor  Qi\:{Q}_{i}Qi​ of  ∼ \:\sim\:∼ 3.6 × 10 6 in the high power regime and  Qi\:{Q}_{i}Qi​ of  ∼ \:\sim\:∼ 4.5 × 10 5 in the single-photon regime is achieved for 100 nm Ta which represents an improvement over previous room-temperature deposited Ta resonators on silicon substrates in the single photon regime, while the highest kinetic inductance of 0.6 pH/sq is obtained for the thinnest film, which is 40 nm. This combination of high  Qi\:{Q}_{i}Qi​ and high  LK\:{L}_{K}LK​ highlights the potential of Ta microwave circuits for high-fidelity operation of compact quantum circuits.
Tantalum (Ta) has recently received considerable attention in manufacturing robust superconducting quantum circuits. Ta offers low microwave loss, high kinetic inductance compared to aluminium (Al) and niobium (Nb), and good compatibility with complementary metal-oxide-semiconductor (CMOS) technology, which is essential for quantum computing applications. Here, we demonstrate the fabrication engineering of thickness-dependent high quality factor (high-Q_i) Ta superconducting microwave coplanar waveguide resonators. All films are deposited on high-resistivity silicon substrates at room temperature without additional substrate heating. Before Ta deposition, a niobium (Nb) seed layer is used to ensure a body-centred cubic lattice (α-Ta) formation. We further engineer the kinetic inductance (L_K) resonators by varying Ta film thicknesses. High L_K is a key advantage for applications because it facilitates the realisation of high-impedance, compact quantum circuits with enhanced coupling to qubits. The maximum internal quality factor Q_i of ~ 3.6 * 10^6 is achieved at the high power regime for 100 nm Ta, while the highest kinetic inductance is obtained to be 0.6 pH/sq for the thinnest film, which is 40 nm. This combination of high Q_i and high L_K highlights the potential of Ta microwave circuits for high-fidelity operations of compact quantum circuits.
The high critical magnetic field and relatively high critical temperature of niobium nitride (NbN) make it a promising material candidate for applications in superconducting quantum technology. However, NbN-based devices and circuits are sensitive to decoherence sources such as two-level system (TLS) defects. Here, we numerically and experimentally investigate NbN superconducting microwave coplanar waveguide resonator arrays, with a 100 nm thickness, capacitively coupled to a common coplanar waveguide on a silicon chip. We observe that the resonators' internal quality factor (Qi) decreases from Qi ~ 1.07*10^6 in a high power regime (< nph > = 27000) to Qi ~ 1.36 *10^5 in single photon regime at temperature T = 100 mK. Data from this study is consistent with the TLS theory, which describes the TLS interactions in resonator substrates and interfaces. Moreover, we study the temperature dependence internal quality factor and frequency tuning of the coplanar waveguide resonators to characterise the quasiparticle density of NbN. We observe that the increase in kinetic inductance at higher temperatures is the main reason for the frequency shift. Finally, we measure the resonators' resonance frequency and internal quality factor at single photon regime in response to in-plane magnetic fields B||. We verify that Qi stays well above 10^4 up to B|| = 240 mT in the photon number < nph > = 1.8 at T = 100 mK. Our results may pave the way for realising robust microwave superconducting circuits for circuit quantum electrodynamics (cQED) at high magnetic fields necessary for fault-tolerant quantum computing, and ultrasensitive quantum sensing.
Tantalum-based transmon qubits are a promising platform for building large-scale quantum processors. So far, these qubits have been made from tantalum films grown exclusively in the alpha phase (α-Ta). The beta phase of tantalum (\{beta}-Ta) readily nucleates at room temperature, making it attractive for scalable qubit fabrication. However, \{beta}-Ta is widely believed to be detrimental to qubit performance because it has a lower superconducting critical temperature than α-Ta. We challenge this prevailing belief by fabricating low-loss transmon qubits from \{beta}-Ta films on sapphire. Across 11 qubits, the mean time-averaged quality factor is (5.6 +/- 2.3) x 10^6, with the best qubit recording a time-averaged quality factor of (10.1 +/- 1.3) x 10^6. Resonator studies demonstrate that the dominant microwave loss channel is surface two-level systems, with the surface loss contribution for \{beta}-Ta being about twice that of α-Ta. \{beta}-Ta films exhibit significant kinetic inductance, consistent with an estimated magnetic penetration depth of (1.78 +/- 0.02) μm. This work establishes \{beta}-Ta on sapphire as a material platform for realizing low-loss transmon qubits and other superconducting devices such as compact resonators, kinetic inductance detectors, and quasiparticle traps.
The presence of quasiparticles typically degrades the performance of superconducting microwave circuits. The readout signal can generate non-equilibrium quasiparticles, which lead to excess microwave loss and decoherence. To understand this effect quantitatively, we measure quasiparticle fluctuations and extract the quasiparticle density across different temperatures, readout powers, and resonator volumes. We find that microwave power generates a higher quasiparticle density as the active resonator volume is reduced and show that this effect sets a sensitivity limit on kinetic inductance detectors. We compare our results with theoretical models of direct microwave photon absorption by quasiparticles and conclude that an unknown, indirect mechanism plays a dominant role in quasiparticle generation. These results provide a route to mitigate quasiparticle generation due to readout power in superconducting devices.