arXiv:2506.20713 · Materials for Quantum Technology
Laser-cut patterned, micrometer-thin diamond membranes with coherent color centers for open microcavities
Yanik Herrmann, Julia M. Brevoord, Julius Fischer, Stijn Scheijen, Colin Sauerzapf, Nina Codreanu, Leonardo G. C. Wienhoven, Yuran M Q van der Graaf, Cornelis F. J. Wolfs, Régis Méjard, Maximilian Ruf, Nick de Jong, Ronald Hanson
Abstract Micrometer-scale thin diamond devices are key components for various quantum sensing and networking experiments, including the integration of color centers into optical microcavities. In this work, we introduce a laser-cutting method for patterning microdevices from millimeter-sized diamond membranes. The method can be used to fabricate devices with micrometer thicknesses and edge lengths of typically 10–100 µm. We compare this method with an established nanofabrication process based on electron-beam lithography, a two-step transfer pattern utilizing a silicon nitride hard mask material, and reactive ion etching. Microdevices fabricated using both methods are bonded to a cavity Bragg mirror and characterized using scanning cavity microscopy. We record two-dimensional cavity finesse maps over the devices, revealing insights about the variation in diamond thickness, surface quality, and strain. The scans demonstrate that devices fabricated by laser-cutting exhibit similar properties to devices obtained by the conventional method. Finally, we show that the devices host optically coherent Tin- and Nitrogen-Vacancy centers suitable for applications in quantum networking.
Abstract Micrometer-scale thin diamond devices are key components for various quantum sensing and networking experiments, including the integration of color centers into optical microcavities. In this work, we introduce a laser-cutting method for patterning microdevices from millimeter-sized diamond membranes. The method can be used to fabricate devices with micrometer thicknesses and edge lengths of typically 10–100 µm. We compare this method with an established nanofabrication process based on electron-beam lithography, a two-step transfer pattern utilizing a silicon nitride hard mask material, and reactive ion etching. Microdevices fabricated using both methods are bonded to a cavity Bragg mirror and characterized using scanning cavity microscopy. We record two-dimensional cavity finesse maps over the devices, revealing insights about the variation in diamond thickness, surface quality, and strain. The scans demonstrate that devices fabricated by laser-cutting exhibit similar properties to devices obtained by the conventional method. Finally, we show that the devices host optically coherent Tin- and Nitrogen-Vacancy centers suitable for applications in quantum networking.
Abstract Diamond membrane devices containing optically coherent nitrogen-vacancy (NV) centers are key to enable novel cryogenic experiments such as optical ground-state cooling of hybrid spin-mechanical systems and efficient entanglement distribution in quantum networks. Here, we report on the fabrication of a (3.4 ± 0.2) μm thin, smooth (surface roughness rq < 0.4 nm over an area of 20 μm by 30 μm) diamond membrane containing individually resolvable, narrow linewidth (< 100 MHz) NV centers. We fabricate this sample via a combination of high-energy electron irradiation, high-temperature annealing, and an optimized etching sequence found via a systematic study of the diamond surface evolution on the microscopic level in different etch chemistries. Although our particular device dimensions are optimized for cavity-enhanced entanglement generation between distant NV centers in open, tunable microcavities, our results have implications for a broad range of quantum experiments that require the combination of narrow optical transitions and micrometer-scale device geometry.
Diamond has superlative material properties for a broad range of quantum and electronic technologies. However, heteroepitaxial growth of single crystal diamond remains limited, impeding integration and evolution of diamond-based technologies. Here, we directly bond single-crystal diamond membranes to a wide variety of materials including silicon, fused silica, sapphire, thermal oxide, and lithium niobate. Our bonding process combines customized membrane synthesis, transfer, and dry surface functionalization, allowing for minimal contamination while providing pathways for near unity yield and scalability. We generate bonded crystalline membranes with thickness as low as 10 nm, sub-nm interfacial regions, and nanometer-scale thickness variability over 200 by 200 μm2 areas. We measure spin coherence times T2 for nitrogen vacancy centers in 150 nm-thick bonded membranes of up to 623 ± 21 μs, suitable for advanced quantum applications. We demonstrate multiple methods for integrating high quality factor nanophotonic cavities with the diamond heterostructures, highlighting the platform versatility in quantum photonic applications. Furthermore, we show that our ultra-thin diamond membranes are compatible with total internal reflection fluorescence (TIRF) microscopy, which enables interfacing coherent diamond quantum sensors with living cells while rejecting unwanted background luminescence. The processes demonstrated herein provide a full toolkit to synthesize heterogeneous diamond-based hybrid systems for quantum and electronic technologies. Development of diamond-based quantum and electronic technologies requires heterogeneous integration, which has remained challenging. This work realizes direct bonding of single crystal diamond membranes to a broad range of technology-relevant substrates while maintaining quantum coherence for hosted qubits.
Deploying nitrogen vacancy (NV) centers in diamond as nanoscale quantum sensors for condensed matter and materials physics requires placing the NV centers close to the sensing target. One solution is to fabricate diamond nanostructures and integrate them with materials and devices. However, diamond etching and ion milling can introduce subsurface damage and surface defects that degrade the charge stability and spin coherence of NV centers near the surface. Here we report a procedure for fabricating low-damage nanostructured diamond membranes, and we show that this fabrication scheme preserves the optical and spin properties of state-of-the-art shallow NV center quantum sensors, within nanometers of the diamond surface, while providing significant photonic enhancement. Furthermore, we demonstrate a pick-and-place transfer method, which enables integration with diverse sensing targets.
Diamond has superlative material properties for a broad range of quantum and electronic technologies. However, heteroepitaxial growth of single crystal diamond remains limited, impeding integration and evolution of diamond-based technologies. Here, we directly bond single-crystal diamond membranes to a wide variety of materials including silicon, fused silica, sapphire, thermal oxide, and lithium niobate. Our bonding process combines customized membrane synthesis, transfer, and dry surface functionalization, allowing for minimal contamination while providing pathways for near unity yield and scalability. We generate bonded crystalline membranes with thickness as low as 10 nm, sub-nm interfacial regions, and nanometer-scale thickness variability over 200 by 200 μm2 areas. We measure spin coherence times T2 for nitrogen-vacancy centers in bonded membranes of up to 623(21) μs, suitable for advanced quantum applications. We demonstrate multiple methods for integrating high quality factor nanophotonic cavities with the diamond heterostructures, highlighting the platform versatility in quantum photonic applications. Furthermore, we show that our ultra-thin diamond membranes are compatible with total internal reflection fluorescence (TIRF) microscopy, which enables interfacing coherent diamond quantum sensors with living cells while rejecting unwanted background luminescence. The processes demonstrated herein provide a full toolkit to synthesize heterogeneous diamond-based hybrid systems for quantum and electronic technologies.
Many quantum networking applications require efficient photonic interfaces to quantum memories which can be produced at scale and with high yield. Synthetic diamond offers unique potential for the implementation of this technology as it hosts color centers which retain coherent optical interfaces and long spin coherence times in nanophotonic structures. Here, we report a technique enabling wafer-scale processing of thin-film diamond that combines ion implantation and membrane liftoff, high-quality overgrowth, targeted color center implantation, and serial, high-throughput thermocompression bonding with yields approaching unity. The deterministic deposition of thin diamond membranes onto semiconductor substrates facilitates consistent integration of photonic crystal cavities with silicon-vacancy (SiV) quantum memories. We demonstrate reliable, strong coupling of SiVs to photons with cooperativities approaching 50. Furthermore, we show that photonic crystal cavities can be reliably fabricated across several membranes bonded to the same handling chip. Our platform enables modular fabrication where the photonic layer can be integrated with functionalized substrates featuring electronic control lines such as coplanar waveguides for microwave delivery. Finally, we implement passive optical packaging with sub-decibel insertion loss. Together, these advances pave the way to the scalable assembly of optically addressable quantum memory arrays which are a key building block for modular photonic quantum interconnects.
Color centers in diamond have widespread utility in quantum technologies, but their creation process remains stochastic in nature. Deterministic creation of color centers in device-ready diamond platforms can improve the yield, scalability, and integration. Recent work using pulsed laser excitation has shown impressive progress in deterministically creating defects in bulk diamond. Here, we extend this laser-writing process into nanophotonic devices etched into diamond membranes, including nanopillars and photonic resonators with writing and subsequent readout occurring in situ at cryogenic temperatures. We demonstrate the optically driven creation of carbon vacancy (GR1) and nitrogen vacancy (NV) centers in diamond nanopillars and observe enhanced photoluminescence collection from them. We also fabricate bullseye resonators and leverage their cavity modes to locally amplify the laser-writing field, yielding defect creation with picojoule write-pulse energies 100 times lower than those typically used in bulk diamond demonstrations.