Building a practical quantum processor involves integrating millions of physical qubits along with the necessary components for individual qubit manipulation and readout. Arrays of gated silicon spins offer a promising route toward achieving this goal. Optimized radio frequency resonators with high internal quality factor are based on superconducting inductors and enable fast spin readout. All-electrical spin control and gate-dispersive readout remove the need for additional device components and simplify scaling. However, superconducting high-Q tank circuits are susceptible to crosstalk-induced ringup from electrical qubit control pulses, which causes fluctuations of the quantum dot potential and is suspected to degrade qubit performance. Here, we report on the coherent and all-electrical control of a hole spin qubit at 1.5 K , integrated into a silicon fin field-effect transistor and connected to a niobium nitride nanowire inductor gate-sensor. Our experiments show that qubit control pulses with their broad range of higher harmonics ring up the tank when the control pulse spectrum overlaps with the tank resonance. This can cause a reduction of the readout visibility if the tank ringing amplitude exceeds the excited state splitting of the quantum dot, lifting Pauli spin blockade and thus leading to state preparation and measurement errors. We demonstrate how to circumvent these effects by engineering control pulses around the tank resonances. Importantly, we find that the ringup does not limit the spin coherence time, indicating that efficient high-Q resonators in gate-sensing are compatible with all-electrical spin control.
Building a practical quantum processor involves integrating millions of physical qubits along with the necessary components for individual qubit manipulation and readout. Arrays of gated silicon spins offer a promising route toward achieving this goal. Optimized radio frequency resonators with high internal quality factor are based on superconducting inductors and enable fast spin readout. All-electrical spin control and gate-dispersive readout remove the need for additional device components and simplify scaling. However, superconducting high-Q tank circuits are susceptible to crosstalk-induced ringup from electrical qubit control pulses, which causes fluctuations of the quantum dot potential and is suspected to degrade qubit performance. Here, we report on the coherent and all-electrical control of a hole spin qubit at 1.5 K , integrated into a silicon fin field-effect transistor and connected to a niobium nitride nanowire inductor gate-sensor. Our experiments show that qubit control pulses with their broad range of higher harmonics ring up the tank when the control pulse spectrum overlaps with the tank resonance. This can cause a reduction of the readout visibility if the tank ringing amplitude exceeds the excited state splitting of the quantum dot, lifting Pauli spin blockade and thus leading to state preparation and measurement errors. We demonstrate how to circumvent these effects by engineering control pulses around the tank resonances. Importantly, we find that the ringup does not limit the spin coherence time, indicating that efficient high-Q resonators in gate-sensing are compatible with all-electrical spin control.
In gate-based dispersive sensing, the response of a resonator attached to a quantum dot gate is detected by a reflected radio frequency signal. This enables fast readout of spin qubits and tune up of arrays of quantum dots but comes at the expense of increased susceptibility to crosstalk, as the resonator can amplify spurious signals and induce fluctuations in the quantum dot potential. We attach tank circuits with superconducting NbN inductors and internal quality factors Qi>1000 to the interdot barrier gate of silicon double quantum dot devices. Measuring the interdot transition in transport, we quantify radio frequency crosstalk that results in a ring-up of the resonator when neighboring plunger gates are driven with frequency components matching the resonator frequency. This effect complicates qubit operation and scales with the loaded quality factor of the resonator, the mutual capacitance between device gate electrodes, and with the inverse of the parasitic capacitance to ground. Setting qubit frequencies below the resonator frequency is expected to substantially suppress this type of crosstalk.
Spin qubits in gate-defined semiconductor quantum dots are a promising platform for realising a scalable quantum computer. This platform encodes quantum information into the intrinsic angular momentum (spin) of individual electrons or holes. In particular, hole spins in quantum dots enable the possibility of all-electrical spin control due to their intrinsic spin-orbit coupling. One important criterion of a quantum computer is the ability to reliably read out the state of the qubit. This is done by mapping spin information to the charge degree of freedom, combined with a method for charge detection. Charge detection can be facilitated by coupling a resonator directly to the quantum dot gate or to a charge sensor and measuring the resonator's phase or amplitude response. In this thesis, we describe a set of experiments relating to the implementation of hole spin qubit readout with superconducting resonators. First, we study gate-based charge sensing in a Si fin field-effect transistor (finFET) device using a superconducting NbN nanowire resonator. We find that the resonator amplifies capacitive crosstalk when electrical control pulses are applied to gate electrodes in this device. This occurs whenever a spectral component of qubit control pulses overlaps with the resonance frequency, which we show may occur for both baseband and radio-frequency (RF) drive signals. We quantify this crosstalk in a transport-based method, and attribute its source to the capacitance between the bondpads of neighbouring gate electrodes. In a second experiment, we use an RF charge sensor with the same nanowire technology to read out hole spin qubits formed in the quantum well of a Ge/SiGe heterostructure. A screening layer approach is used to facilitate RF matching due to large RF dissipation found in the heterostructure. We implement a double-latched readout scheme in this system to reduce errors arising from both spin and charge decay during readout. The spin-to-charge conversion process and its dependence on magnetic field orientation is studied. Spin and charge decay processes arising after spin-to-charge conversion are mitigated by choosing an optimal working point for the field orientation, field amplitude and readout pulse times. By doing so, we achieve an average single-shot state-preparation-and-measurement fidelity of 97%, primarily bounded by imperfect state preparation and limited signal-to-noise ratio. Finally, we study coplanar waveguide resonators fabricated from NbN. We investigate the feasibility of integrating this type of resonator onto the same chip as the Si finFET quantum dots. We then develop a novel resonator readout technique by the interference of two microwave sidebands. We demonstrate the insensitivity of this technique to common-mode phase and amplitude noise both theoretically and experimentally. This technique is then used to study resonator noise arising from two-level system defects. These results highlight both the practical constraints and the potential for achieving high readout fidelities using resonator-based hole spin qubit readout. This work establishes a blueprint for mitigating resonator-induced crosstalk and enabling high-fidelity readout in lossy materials by incorporating a screening layer.
Hybrid circuit quantum electrodynamics (cQED) aims at coupling various quantum degrees of freedom, among which are spin and charge degrees of freedom in gate defined quantum dots, phonons or magnons... with quantized electromagnetic fields in superconducting microwave cavities to investigate fundamental physics questions or for quantum computation and simulation. However, low microwave losses, key for many hybrid cQED experiments, are challenging to achieve given the often exotic and/or complex material stacks (e.g. semiconducting material, ferromagnets, or piezoelectric materials) required to host the various quantum degrees of freedom. In this work, we present a 3D-integration process to overcome this challenge for semi-industrial silicon MOS spin qubits. The process is based on dense indium bump interconnects at a pitch of 10 μm and superconducting thin films of Niobium Nitride (NbN). First, we report on DC and RF interconnect properties that demonstrate a high galvanic interconnection yield and internal quality factors above 105 in the single photon regime for NbN resonators interrupted by a single indium bump interconnect. Eventually, we fabricated a 3D-integrated hybrid circuit quantum electrodynamics (cQED) device based on a semi-industrial MOS hole double quantum dot and a high impedance NbN resonator. For this device, we report a cavity internal quality factor above 10000 and demonstrate record sensitivity for gate-based dispersive readout of the charge degree of freedom with an SNR of 100 in 300 ns. Finally, we demonstrate strong spin-photon coupling of gs/2π = 75 MHz, which highlights the viability of 3D-integration for quantum dot based hybrid spin circuit quantum electrodynamics and opens to high-fidelity spin readout and microwave photon-based remote spin qubit entanglement.
Spin qubits in semiconductor quantum dots constitute one of the leading platforms for quantum information processing, combining long coherence times, high-fidelity gate operations, and compatibility with semiconductor industry technologies. In particular, holes confined in planar Ge/SiGe heterostructures have recently emerged as promising qubit candidates owing to their low effective mass, high mobility, low percolation density, absence of valley states, and strong spin-orbit interaction, which enables fast all-electrical spin control. At the same time, spin-orbit interaction also gives rise to a highly anisotropic and electrically tunable gyromagnetic response. Understanding and controlling this response is therefore essential for high-fidelity single- and multi-qubit operations. The realization of scalable quantum processors also requires efficient qubit readout and long-range connectivity. Circuit quantum electrodynamics (cQED), based on the coupling between artificial atoms and microwave photons confined in superconducting resonators, provides a natural framework to address these challenges. However, the implementation of hybrid semiconductor-superconductor devices in planar Ge has so far been hindered by large microwave losses originating from the heterostructure. In this thesis, we demonstrate, for the first time in planar Ge, strong coupling between a hole charge qubit in a double quantum dot and a high-impedance microwave resonator, reaching a cooperativity of C â 100. In addition, we leverage the frequency tunability of the resonator to perform detailed spectroscopy of a multi-level energy spectrum of low-lying states arising from strong Coulomb-correlation effects. To further improve the quality of the hole-photon interface, we investigate the source of microwave losses in different Ge/SiGe heterostructures, identifying defects at the lattice-mismatched Si/Ge interface as the dominant source of resonator losses in reverse-graded heterostructures. To mitigate this limitation, a deep tapered-etching approach is introduced, enabling the fabrication of superconducting resonators directly on etched heterostructures. This method yields internal quality factors exceeding Qint > 10 000 for high-impedance Josephson junction array resonators and Qint > 100 000 for 50 â Nb resonators. Finally, this thesis explores the spin properties of multi-hole quantum dots beyond the conventional single-orbital picture. By reconstructing and electrically tuning the g tensors of holes confined in different orbital states, we show that confinement can substantially modify both their magnitude and orientation. These results open new opportunities for engineering qubit properties through orbital occupation. Furthermore, highly coherent singlet-triplet oscillations are demonstrated in the seven-hole regime, yielding a quality factor of approximately 330 at in-plane magnetic fields as low as 2.5 mT. Together, these results establish a foundation for high-fidelity hole-spin-qubit operation based on g-tensor engineering and for the integration of planar Ge quantum dots with superconducting quantum circuits.
Three key metrics for readout systems in quantum processors are measurement speed, fidelity and footprint. Fast high-fidelity readout enables mid-circuit measurements, a necessary feature for many dynamic algorithms and quantum error correction, while a small footprint facilitates the design of scalable, highly-connected architectures with the associated increase in computing performance. Here, we present two complementary demonstrations of fast high-fidelity single-shot readout of spins in silicon quantum dots using a compact, dispersive charge sensor: a radio-frequency single-electron box. The sensor, despite requiring fewer electrodes than conventional detectors, performs at the state-of-the-art achieving spin read-out fidelity of 99.2% in less than 6 μs. We demonstrate that low-loss high-impedance resonators, highly coupled to the sensing dot, in conjunction with Josephson parametric amplification are instrumental in achieving optimal performance. We quantify the benefit of Pauli spin blockade over spin-dependent tunneling to a reservoir, as the spin-to-charge conversion mechanism in these readout schemes. Our results place dispersive charge sensing at the forefront of readout methodologies for scalable semiconductor spin-based quantum processors.
In semiconductor single-spin qubits, high-fidelity quantum gates have been demonstrated; however, achieving consistent performance remains challenging due to variations in driven qubit coherence, which is less explored than free-evolution coherence such as T2∗. Here, we report single-qubit gate fidelities above 99.999%, achieved by dramatically extending the driven-spin coherence time and suppressing off-resonant driving effects that are detrimental to accurate fidelity benchmarking. We demonstrate that removing proximal reservoirs significantly enhances the spin-locking coherence time (T1ρ), a critical metric for qubits under microwave driving. Furthermore, we reveal that in typical spin qubit setups using parity readout and rectangular pulses, off-resonant excitation of neighboring qubits causes substantial benchmarking artifacts. By optimizing device conditions to mitigate microwave-induced degradation and implementing spectrally tailored pulse shaping, we achieve a π/2 gate fidelity of 99.99920(2)%, with remaining errors primarily limited by incoherent noise. These results showcase the mechanisms that bound fidelity benchmarking in state-of-the-art silicon spin qubits and provide practical guidelines for achieving and verifying high fidelities in these systems.