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arXiv:2304.10227 · ACS Photonics

Heterogeneous Integration of Solid-State Quantum Systems with a Foundry Photonics Platform

Hao‐Cheng Weng, Jorge Monroy-Ruz, Jonathan C. F. Matthews, John Rarity, Krishna C. Balram, Joe A. Smith

Published Aug 31, 2023• 14 citations
arXivHTMLPDF

Abstract

Diamond color centers are promising optically addressable solid-state spins that can be matter-qubits, mediate deterministic interaction between photons, and act as single photon emitters. Useful quantum computers will comprise millions of logical qubits. To become useful in constructing quantum computers, spin-photon interfaces must, therefore, become scalable and be compatible with mass-manufacturable photonics and electronics. Here, we demonstrate the heterogeneous integration of NV centers in nanodiamond with low-fluorescence silicon nitride photonics from a standard 180 nm CMOS foundry process. Nanodiamonds are positioned over predefined sites in a regular array on a waveguide in a single postprocessing step. Using an array of optical fibers, we excite NV centers selectively from an array of six integrated nanodiamond sites and collect the photoluminescence (PL) in each case into waveguide circuitry on-chip. We verify single photon emission by an on-chip Hanbury Brown and Twiss cross-correlation measurement, which is a key characterization experiment otherwise typically performed routinely with discrete optics. Our work opens up a simple and effective route to simultaneously address large arrays of individual optically active spins at scale, without requiring discrete bulk optical setups. This is enabled by the heterogeneous integration of NV center nanodiamonds with CMOS photonics.

DOI
10.1021/acsphotonics.3c00713

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Diamond color centers are promising optically addressable solid-state spins that can be matter-qubits, mediate deterministic interaction between photons, and act as single photon emitters. Useful quantum computers will comprise millions of logical qubits. To become useful in constructing quantum computers, spin-photon interfaces must, therefore, become scalable and be compatible with mass-manufacturable photonics and electronics. Here, we demonstrate the heterogeneous integration of NV centers in nanodiamond with low-fluorescence silicon nitride photonics from a standard 180 nm CMOS foundry process. Nanodiamonds are positioned over predefined sites in a regular array on a waveguide in a single postprocessing step. Using an array of optical fibers, we excite NV centers selectively from an array of six integrated nanodiamond sites and collect the photoluminescence (PL) in each case into waveguide circuitry on-chip. We verify single photon emission by an on-chip Hanbury Brown and Twiss cross-correlation measurement, which is a key characterization experiment otherwise typically performed routinely with discrete optics. Our work opens up a simple and effective route to simultaneously address large arrays of individual optically active spins at scale, without requiring discrete bulk optical setups. This is enabled by the heterogeneous integration of NV center nanodiamonds with CMOS photonics.
Abstract Color centers in diamonds have emerged as a leading solid-state platform for advancing quantum technologies, satisfying the DiVincenzo criteria and recently achieving a quantum advantage in secret key distribution. Recent theoretical works estimate that general-purpose quantum computing using local quantum communication networks will require millions of physical qubits to encode thousands of logical qubits, which presents a substantial challenge to the hardware architecture at this scale. To address the unanswered scaling problem, in this work, we first introduce a scalable hardware modular architecture ''Quantum System-on-Chip'' (QSoC) that features compact two-dimensional arrays ''quantum microchiplets'' (QMCs) containing tin-vacancy (SnV^-) spin qubits integrated on a cryogenic application-specific integrated circuit (ASIC). We demonstrate crucial architectural subcomponents, including (1) QSoC fabrication via a lock-and-release method for large-scale heterogeneous integration; (2) a high-throughput calibration of the QSoC for spin qubit spectral inhomogenous registration; (3) spin qubit spectral tuning functionality for inhomogenous compensation; (4) efficient spin-state preparation and measurement for improved spin and optical properties. QSoC architecture supports full connectivity for quantum memory arrays in a set of different resonant frequencies and offers the possibility for further scaling the number of solid-state physical qubits via larger and denser QMC arrays and optical frequency multiplexing networking.
Chip integration of quantum emitters is a crucial milestone for scalable quantum photonic information processing. Among optically active defect centers for quantum photonics, diamond color centers are promising because of their long spin coherence times and high photon emission rates. However, for a coherent-photon emission, they typically require a cryogenic environment to protect optical coherence from thermal phonons, which makes chip integration challenging. In this paper, we develop a chip-integrated diamond photonic crystal cavity embedding an ensemble of nitrogen-vacancy (NV) centers. We confirm cryogenic operation by observing Purcell enhancement of NV-center emission via an edge-coupled optical fiber. This result demonstrates successful integration of diamond color centers, a photonic crystal cavity, and an optical waveguide-fiber package, representing a key step toward scalable diamond-based quantum communication platforms.
Nitrogen-vacancy (NV) centres in diamond show great promise for quantum computing, where photonic entanglement can be generated using long-lived optically-active spins [1]. A quantum processor would require a large number of interconnected NV centres, and an integrated platform becomes necessary for control and routing. Benefits of integration include nanophotonic cavities with ultra-small mode volumes [2], multilayer electronics, and use of existing integrated quantum photonic components and architectures. Pick-and-place methods have been adopted to combine diamond microchiplets with aluminium nitride [3]. Photonic and spin properties has also been measured in nanodiamond encapsulated in optimised silicon nitride (SiNx) [4]. However, challenges remain to interface diamond with photonics in a scalable and manufacturable process. In particular, the need to identify and manipulate stochastically located emitters requires precise and time-intensive confocal microscopy.
Diamond has emerged as a leading host material for solid-state quantum emitters, quantum memories, and quantum sensors. However, the challenges in fabricating photonic devices in diamond have limited its potential for use in quantum technologies. While various hybrid integration approaches have been developed for coupling diamond color centers with photonic devices defined in a heterogeneous material, these methods suffer from either large insertion loss at the material interface or evanescent light-matter coupling. Here, we present a new technique that enables the deterministic assembly of diamond color centers in a silicon nitride photonic circuit. Using this technique, we observe Purcell enhancement of silicon vacancy centers coupled to a silicon nitride ring resonator. Our hybrid integration approach has the potential for achieving the maximum possible light-matter interaction strength while maintaining low insertion loss and paves the way toward scalable manufacturing of large-scale quantum photonic circuits integrated with high-quality quantum emitters and spins.
Single-photon sources are essential for quantum technologies, supporting secure communication, quantum computing, and integrated photonic systems. Nitrogen-vacancy (NV) centers in nanodiamonds are robust emitters that operate at room temperature and can be positioned on-chip, but efficient coupling to photonic modes remains challenging. We present the design, fabrication, and experimental characterization of a silicon nitride photonic structure engineered to enhance and extract emission from NV centers. The device features a subwavelength gap between waveguides, a Bragg reflector for emission redirection, and an output waveguide for collection. Simulations guided the optimization of the geometry to increase the spontaneous emission rate through photonic confinement. Nanodiamonds were deposited into the gap using lithographic patterning and drop-casting. Fluorescence lifetime measurements confirm that the structure modifies the emission dynamics of the NV centers. The approach is compatible with scalable fabrication techniques and offers a practical route toward integrated, chip-based single-photon sources.
Color centers in diamonds have emerged as a leading solid-state platform for advancing quantum technologies, satisfying the DiVincenzo criteria and recently achieving a quantum advantage in secret key distribution. Recent theoretical works estimate that general-purpose quantum computing using local quantum communication networks will require millions of physical qubits to encode thousands of logical qubits, which presents a substantial challenge to the hardware architecture at this scale. To address the unanswered scaling problem, in this work, we first introduce a scalable hardware modular architecture "Quantum System-on-Chip" (QSoC) that features compact two-dimensional arrays "quantum microchiplets" (QMCs) containing tin-vacancy (SnV-) spin qubits integrated on a cryogenic application-specific integrated circuit (ASIC). We demonstrate crucial architectural subcomponents, including (1) QSoC fabrication via a lock-and-release method for large-scale heterogeneous integration; (2) a high-throughput calibration of the QSoC for spin qubit spectral inhomogenous registration; (3) spin qubit spectral tuning functionality for inhomogenous compensation; (4) efficient spin-state preparation and measurement for improved spin and optical properties. QSoC architecture supports full connectivity for quantum memory arrays in a set of different resonant frequencies and offers the possibility for further scaling the number of solid-state physical qubits via larger and denser QMC arrays and optical frequency multiplexing networking.