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arXiv:2009.10101 · Journal of Applied Physics

Cryogenic microwave loss in epitaxial Al/GaAs/Al trilayers for superconducting circuits

C. R. H. McRae, A. McFadden, R. Zhao, H. Wang, J. L. Long, T. Zhao, S. Park, M. Bal, C. J. Palmstrøm, D. P. Pappas

Published Jan 12, 2021• 15 citations
arXivHTMLPDF

Abstract

Epitaxially grown superconductor/dielectric/superconductor trilayers have the potential to form high-performance superconducting quantum devices and may even allow scalable superconducting quantum computing with low-surface-area qubits such as the merged-element transmon. In this work, we measure the power-independent loss and two-level-state (TLS) loss of epitaxial, wafer-bonded, and substrate-removed Al/GaAs/Al trilayers by measuring lumped element superconducting microwave resonators at millikelvin temperatures and down to single-photon powers. The power-independent loss of the device is (4.8±0.1)×10−5, and the resonator-induced intrinsic TLS loss is (6.4±0.2)×10−5. Dielectric loss extraction is used to determine a lower bound of the intrinsic TLS loss of the trilayer of 7.2×10−5. The unusually high power-independent loss is attributed to GaAs’s intrinsic piezoelectricity.

DOI
10.1063/5.0029855

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Epitaxially grown superconductor/dielectric/superconductor trilayers have the potential to form high-performance superconducting quantum devices and may even allow scalable superconducting quantum computing with low-surface-area qubits such as the merged-element transmon. In this work, we measure the power-independent loss and two-level-state (TLS) loss of epitaxial, wafer-bonded, and substrate-removed Al/GaAs/Al trilayers by measuring lumped element superconducting microwave resonators at millikelvin temperatures and down to single-photon powers. The power-independent loss of the device is (4.8±0.1)×10−5, and the resonator-induced intrinsic TLS loss is (6.4±0.2)×10−5. Dielectric loss extraction is used to determine a lower bound of the intrinsic TLS loss of the trilayer of 7.2×10−5. The unusually high power-independent loss is attributed to GaAs’s intrinsic piezoelectricity.
The investigation of two-level-state (TLS) loss in dielectric materials and interfaces remains at the forefront of materials research in superconducting quantum circuits. We demonstrate a method of TLS loss extraction of a thin film dielectric by using a lumped element resonator fabricated from a superconductor-dielectric-superconductor trilayer. We extract the dielectric loss by formulating a circuit model for a lumped element resonator with TLS loss and then fitting to this model using measurements from a set of three resonator designs: a coplanar waveguide resonator, a lumped element resonator with an interdigitated capacitor, and a lumped element resonator with a parallel plate capacitor that includes the dielectric thin film of interest. Unlike the commonly used single measurement technique, this method allows the accurate measurement of materials with TLS loss lower than 10−6. We demonstrate this method by extracting a TLS loss of 1.00×10−3 for sputtered Al2O3 using a set of samples fabricated from an Al/Al2O3/Al trilayer. We compare this method with the single measurement technique and observe a difference of 11% in extracted loss of the trilayer.
We have characterized the microwave loss of high-Q parallel plate capacitors fabricated from thin-film Al/Al2O3/Re heterostructures on (0001) Al2O3 substrates. The superconductor-insulator-superconductor trilayers were grown in situ in a hybrid deposition system: the epitaxial Re base and polycrystalline Al counterelectrode layers were grown by sputtering, while the epitaxial Al2O3 layer was grown by pulsed laser deposition. Structural analysis indicates a highly crystalline epitaxial Al2O3 layer and sharp interfaces. The measured intrinsic (low-power, low-temperature) quality factor of the resonators is as high as 3 × 104. These results indicate that low-loss grown Al2O3 is an attractive candidate dielectric for high-fidelity superconducting qubit circuits.
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The integration of low-loss dielectrics into superconducting circuits is of importance to the functionality of quantum computers and sensors. In this work, we fabricate and measure niobium resonators atop few-layer, epitaxial hexagonal boron nitride (hBN) grown by Molecular Beam Epitaxy on a sapphire substrate and compare against a control counterpart without hBN. We conduct radiofrequency measurements which probe the responses to power, temperature, and temporal fluctuations of two-level systems. The resonators integrating hBN maintain low dielectric loss with a low-power internal loss tangent on the order of 10−610^{-6}10−6, and demonstrate hBN can be added to the conventional superconducting qubit stack with minimal degradation of the quality factor. This research represents a first step towards a materials-driven strategy to eliminate phonon-mediated correlated errors in solid-state quantum systems, which leverages the thermal properties of 2D materials to prevent athermal phonons excited in the device substrate from transmitting across the superconductor-substrate interface. The same technique applied to quantum sensors would maximize phonon collection by blocking phonons from entering passive metal films.
The performance of superconducting circuits for quantum computing is limited by materials losses. In particular, coherence times are typically bounded by two-level system (TLS) losses at single photon powers and millikelvin temperatures. The identification of low loss fabrication techniques, materials, and thin film dielectrics is critical to achieving scalable architectures for superconducting quantum computing. Superconducting microwave resonators provide a convenient qubit proxy for assessing performance and studying TLS loss and other mechanisms relevant to superconducting circuits such as non-equilibrium quasiparticles and magnetic flux vortices. In this review article, we provide an overview of considerations for designing accurate resonator experiments to characterize loss, including applicable types of losses, cryogenic setup, device design, and methods for extracting material and interface losses, summarizing techniques that have been evolving for over two decades. Results from measurements of a wide variety of materials and processes are also summarized. Finally, we present recommendations for the reporting of loss data from superconducting microwave resonators to facilitate materials comparisons across the field.
Materials that feature very high permittivity and very low losses at low temperatures offer interesting opportunities for improving the performance of a variety of microwave-optical devices such as phase shifters and quantum transducers. In this Letter, superconducting Al coplanar waveguide resonators between 4 and 6 GHz were used to determine the complex permittivity and loss of thin film SrTiO3 on Si at cryogenic temperatures. We report a permittivity of 1950 ± 140 and a high-power loss tangent (tan δSTO) of 3.4 ± 0.1×10−4 at millikelvin temperatures. To further investigate the potential of SrTiO3 for use in emerging quantum technology applications, the transition of tan δSTO into the single photon regime was analyzed. Our findings reveal a loss scaling that aligns closely with a two-level system loss mechanism. We observe a nearly two orders of magnitude difference in tan δSTO between high and low input power levels, consistent with that two-level system loss picture.