We demonstrate a hybrid device architecture where the charge states in a double quantum dot (DQD) formed in a Si/SiGe heterostructure are read out using an on-chip superconducting microwave cavity. A quality factor Q = 5400 is achieved by selectively etching away regions of the quantum well and by reducing photon losses through low-pass filtering of the gate bias lines. Homodyne measurements of the cavity transmission reveal DQD charge stability diagrams and a charge-cavity coupling rate gc/2π= 23 MHz. These measurements indicate that electrons trapped in a Si DQD can be effectively coupled to microwave photons, potentially enabling coherent electron-photon interactions in silicon.
We demonstrate a hybrid device architecture where the charge states in a double quantum dot (DQD) formed in a Si/SiGe heterostructure are read out using an on-chip superconducting microwave cavity. A quality factor Q = 5400 is achieved by selectively etching away regions of the quantum well and by reducing photon losses through low-pass filtering of the gate bias lines. Homodyne measurements of the cavity transmission reveal DQD charge stability diagrams and a charge-cavity coupling rate gc/2π= 23 MHz. These measurements indicate that electrons trapped in a Si DQD can be effectively coupled to microwave photons, potentially enabling coherent electron-photon interactions in silicon.
Coherent charge-photon and spin-photon coupling has recently been achieved in silicon double quantum dots (DQDs). Here, we demonstrate a versatile split-gate cavity-coupler that allows more than one DQD to be coupled to the same microwave cavity. Measurements of the cavity transmission as a function of level detuning yield a charge cavity coupling rate of gc/2π= 58 MHz, a charge decoherence rate of γc/2π= 36 MHz, and a cavity decay rate of κ/2π= 1.2 MHz. The charge cavity coupling rate is in good agreement with device simulations. Our coupling technique can be extended to enable simultaneous coupling of multiple DQDs to the same cavity mode, opening the door to long-range coupling of semiconductor qubits using microwave frequency photons.
Coherent and strong coupling between photons and solid-state qubits, in the form of circuit quantum electrodynamics (QED), has been harnessed for two-qubit gates mediated by photons and high-fidelity quantum non-demolition readout, which are the building blocks of large-scale quantum computation. Recently, circuit QED has been extended to gate-defined semiconductor quantum dots. In this thesis, we develop a novel hybrid circuit QED architecture composed of a high-impedance superconducting microwave resonator and spins localized in silicon-MOS quantum dots. To control and measure the spin degrees of freedom, this hybrid system needs to operate at finite magnetic field. Consequently, we develop and characterize microwave resonators based on thin niobium nitride (NbN) films featuring a high kinetic inductance. We demonstrate high-impedance resonators with magnetic field resilience and low photon loss rates. We then co-integrate the NbN resonators on silicon spin qubit chips. With a hole confined in a double quantum dot (DQD), we report the first realization of a strong hole charge-photon interaction bordering the ultra-strong coupling regime. At finite magnetic field, putting the spin transition energy in resonance with the microwave cavity, we observe large vacuum Rabi mode splittings, signature of a strong spin-photon coupling. Our findings are well captured by the modelling of a hole DQD with different anisotropic Zeeman response in each dot and spin-orbit coupling dependent tunnel rates. We also find a sizeable spin-photon coupling when the hole is localized in the single quantum dot, in line with recent theoretical predictions. The different works presented in this manuscript pave the way for circuit QED with hole spins in gate-defined semiconductor quantum dots.
Hybrid circuit quantum electrodynamics (cQED) aims at coupling various quantum degrees of freedom, among which are spin and charge degrees of freedom in gate defined quantum dots, phonons or magnons... with quantized electromagnetic fields in superconducting microwave cavities to investigate fundamental physics questions or for quantum computation and simulation. However, low microwave losses, key for many hybrid cQED experiments, are challenging to achieve given the often exotic and/or complex material stacks (e.g. semiconducting material, ferromagnets, or piezoelectric materials) required to host the various quantum degrees of freedom. In this work, we present a 3D-integration process to overcome this challenge for semi-industrial silicon MOS spin qubits. The process is based on dense indium bump interconnects at a pitch of 10 μm and superconducting thin films of Niobium Nitride (NbN). First, we report on DC and RF interconnect properties that demonstrate a high galvanic interconnection yield and internal quality factors above 105 in the single photon regime for NbN resonators interrupted by a single indium bump interconnect. Eventually, we fabricated a 3D-integrated hybrid circuit quantum electrodynamics (cQED) device based on a semi-industrial MOS hole double quantum dot and a high impedance NbN resonator. For this device, we report a cavity internal quality factor above 10000 and demonstrate record sensitivity for gate-based dispersive readout of the charge degree of freedom with an SNR of 100 in 300 ns. Finally, we demonstrate strong spin-photon coupling of gs/2π = 75 MHz, which highlights the viability of 3D-integration for quantum dot based hybrid spin circuit quantum electrodynamics and opens to high-fidelity spin readout and microwave photon-based remote spin qubit entanglement.
This dissertation describes a set of experiments with the goal of creating a super-conductor-semiconductor hybrid circuit quantum electrodynamics architecture with single electron spins. Single spins in silicon quantum dots have emerged as attractive qubits for quantum computation. However, how to scale up spin qubit systems remains an open question. The hybrid architecture considered here could provide a route to realizing large networks of quantum dot–based spin qubit registers. The first experiment in this thesis is aimed at achieving strong coupling between a single electron spin and a single microwave photon. The electron is trapped in a gate-defined double quantum dot in a Si/SiGe heterostructure and the photon is stored in an on-chip superconducting high-impedance NbTiN cavity. The photon is coupled directly to the electron charge, and indirectly to the electron spin, mediated through a synthetic spin-orbit field. We observe a vacuum Rabi splitting that depends on the spin-charge hybridization. The ratio of spin-photon coupling strength to decoherence rates of the spin and cavity combined is larger than unity, confirming the strong coupling regime has been reached. In addition, we find an optimal degree of spin-charge hybridization for which this ratio is maximized. The demonstration of strong spin-photon coupling not only opens a new range of physics experiments, but fulfills also a crucial requirement for coupling spin qubits at a distance via a cavity. The second experiment is focused on spin readout with the on-chip cavity. Instead of the direct dispersive readout of a single spin, we use the cavity to detect whether the electron is allowed to tunnel between the two dots or not. We benchmark the charge sensitivity and bandwidth of the detector and find that rapid detection of the electron charge with high SNR is possible. In the two-electron regime, electron tunneling is contingent on the total spin state (Pauli spin blockade). This spin-to-charge conversion scheme enables single-shot detection of singlet states with high-fidelity. The demonstration of single-shot spin readout with a cavity is an essential step towards readout in dense spin qubit arrays, such as the crossbar network, where it is not possible to integrate electrometers and accompanying reservoirs adjacent to the qubit dots. In the third experiment, we develop on-chip microwave filters to suppress microwave photon leakage from the cavity through the gate electrodes that are necessary to form quantum dots. We introduce a new cavity design that is compatible with long-distance connectivity between spins, but is also more susceptible to microwave leakage. We test and compare two low-pass filter variations in terms of performance, footprint and integrability. They use the same nanowire inductor, but different implementations of the capacitor: one with a planar interdigitated capacitor and one novel design with an overlapping thin-film capacitor. We find that both approaches are effective against microwave leakage. However, the large footprint of the interdigitated capacitor makes this solution inconvenient as the number of gate lines increases. The thin-film capacitor, with its much smaller footprint, is better suited for our devices. The final part of this dissertation contains concluding remarks and possible future directions are proposed.
High-efficiency single-photon detection in the microwave domain is a key enabling technology for various quantum applications. However, the extremely low energy of microwave photons presents a fundamental challenge, preventing direct photon-to-charge conversion as achieved in optical systems using semiconductors. Here, we demonstrate continuous microwave photon detection with an efficiency approaching 70% in the single-photon regime. We use a hybrid system comprising a gate-defined double quantum dot (DQD) charge qubit in a gallium arsenide/aluminum gallium arsenide heterostructure, coupled to a high-impedance Josephson junction array cavity. We systematically optimize the hybrid architecture to maximize the detection efficiency by leveraging strong charge-photon coupling, tunable DQD tunnel rates, and the frequency tunability of both subsystems. The system efficiency is characterized over a frequency range of 3 to 5.2 gigahertz. Our results establish semiconductor-based cavity-quantum electrodynamics architectures as a scalable and versatile platform for efficient microwave photon detection, opening promising avenues for quantum microwave optics and quantum information technologies.
High-efficiency single-photon detection in the microwave domain is a key enabling technology for various quantum applications. However, the extremely low energy of microwave photons presents a fundamental challenge, preventing direct photon-to-charge conversion as achieved in optical systems using semiconductors. Here, we demonstrate continuous microwave photon detection with an efficiency approaching 70% in the single-photon regime. We use a hybrid system comprising a gate-defined double quantum dot (DQD) charge qubit in a gallium arsenide/aluminum gallium arsenide heterostructure, coupled to a high-impedance Josephson junction array cavity. We systematically optimize the hybrid architecture to maximize the detection efficiency by leveraging strong charge-photon coupling, tunable DQD tunnel rates, and the frequency tunability of both subsystems. The system efficiency is characterized over a frequency range of 3 to 5.2 gigahertz. Our results establish semiconductor-based cavity-quantum electrodynamics architectures as a scalable and versatile platform for efficient microwave photon detection, opening promising avenues for quantum microwave optics and quantum information technologies.