arXiv:1201.0637 · Physical Review Letters
Sub-Rayleigh Lithography Using High Flux Loss-Resistant Entangled States of Light
Shamir Rosen, I. Afek, Yonatan Israel, O. Ambar, Yaron R. Silberberg
Abstract
Quantum lithography achieves phase superresolution using fragile, experimentally challenging entangled states of light. We propose a scalable scheme for creating features narrower than classically achievable with reduced use of quantum resources and, consequently, enhanced resistance to loss. The scheme is an implementation of interferometric lithography using a mixture of a spontaneous parametric down-converted entangled state with intense classical coherent light. We measure coincidences of up to four photons mimicking multiphoton absorption. The results show a narrowing of the interference fringes of up to 30% with respect to the best analogous classical scheme using only 10% of the nonclassical light required for creating NOON states.