Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

arXiv:0901.0308 · Applied Physics Letters

A terraced scanning super conducting quantum interference device susceptometer with submicron pickup loops

Nicholas C. Koshnick, M. E. Huber, Julie A. Bert, Clifford W. Hicks, Jeff Large, Hal Edwards, Kathryn A. Moler

Published Dec 15, 2008• 67 citations
arXivHTMLPDF

Abstract

Superconducting quantum interference devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pickup loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300nm from the sample. The 600nm–2μm pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of ∼70 electron spins per root hertz at 4K.

DOI
10.1063/1.3046098

Related papers

A micro-SQUID with dispersive readout for magnetic scanning microscopy

Foroughi, F., Mol, J.-M., T. Müller +3 more

We have designed and characterized a micro-SQUID with dispersive readout for use in low temperature scanning probe microscopy systems. The design features a capacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12 GHz, micrometer spatial resolution, and integrated superconducting coils for local application of magnetic fields. The SQUID is operated as a nonlinear oscillator with a flux- and power-dependent resonance frequency. Measurements for device characterization and noise benchmarking were carried out at 4 K. The measured flux noise above 10 kHz at 4 K is 80 nΦ0 Hz−1∕2 at a bandwidth of 200 MHz. Estimations suggest that one can benefit from parametric gain based on inherent nonlinearity of the Josephson junction and reduce the flux noise to 30 nΦ0Hz–1∕2 at 100 mK, which corresponds to 10.6 μBHz–1∕2 for a magnetic moment located at the center of the pickup loop.Measuring the magnetic response of mesoscopic samples or mapping it vs. position for extended systems is effective methods for revealing the fundamental quantum properties of condensed matter systems. Over the past few decades, many advanced magnetic imaging schemes have been developed, including magnetic force microscopy,1 scanning Hall probe microscopy,2 superconducting interference devices (SQUIDs),3,4 and NV center based magnetometry.5 The high sensitivity, low back action, and low power dissipation of SQUIDs make them attractive for many types of low temperature experiments. One classic example is the central role of scanning SQUID microscopy in tests of pairing symmetry of high-Tc cuprate superconductors.6 Other prominent applications are the thermodynamic characteristics of persistent currents in normal metal rings7 and proof of edge states in topological insulators in the quantum spin Hall regime.8A key performance for a SQUID is its flux sensitivity. Parametric amplification has been harnessed in nano-SQUIDs based on aluminum junctions9,10 in order to reduce the flux noise down to 30 nΦ0Hz–1∕2 with a bandwidth exceeding 60 MHz.10 Recent studies on parametric amplifiers and dispersive readout of superconducting qubits also harness the nonlinearity of the Josephson junction to boost sensitivity.11–13In scanning SQUID microscopy, signal sources often behave dipole-like, such as superconducting vortices in mesoscopic dots or currents in mesoscopic rings. Smaller SQUIDs provide better coupling to smaller samples which leads to higher spin sensitivity3,14 as the magnetic field of a dipole decreases with 1/r3. Various approaches have been pursued to reduce the size. The smallest nano-SQUID to date has been fabricated by evaporating Nb or Pb15 onto the apex of a sharp quartz tip reaching a loop diameter of below nm and a spin sensitivity of 0.38 μBHz−1/2 at tens of kHz bandwidth. Compared to such size-optimized devices, micro-SQUIDs fabricated using a standard Nb technique have the advantage of on-chip field coils and modulation coils,14 and can be operated at 4 K allowing for a wide range of applications. However, these come at the cost of larger pick-up loops of a few microns and a resulting poorer spin sensitivity of 200 μBHz−1/2 for a magnetic moment located at the center of the pickup loop.The limitation of large pickup loops was previously only overcome by devices with pickup loops defined by the focused-ion-beam,16 but has recently also been achieved by improvements in lithography and shown to offer better spatial resolution as well.17 Here, we present a scanning micro-SQUID which is based on the same fabrication technology incorporating another major advancement. Our design exploits the parametric amplification based on nonlinearities of the SQUID to boost sensitivity. The combination of a smaller pickup loop and parametric amplification of the signal leads to better spin sensitivity (10.6 μBHz−1/2) and higher bandwidth (200 MHz) compared to traditional DC micro-SQUIDs in which the flux sensitivity is mainly limited by internal dissipation.Our devices were fabricated at Hypres Inc. using planarized Nb/AlOx/Nb trilayer Josephson junction technology, including two planarized Nb layers with approximately 0.8 μm minimum feature size. The SQUID consists of a superconducting ring shunted by one Josephson junction with a designed critical current of 20 μA [Fig. 1(a)]. With this geometry, the SQUID is gradiometric, i.e., the effect of any homogeneous background magnetic field approximately cancels out. The smallest pickup loops implemented have an inner (outer) diameter of 1 μm (2 μm). The superconducting loop is shunted by an on-chip parallel-plate capacitor with amorphous silicon dioxide as dielectric which was designed to have a capacitance of 80 pF. The superconducting loop and the capacitor form a resonator with a flux dependent resonance frequency from 5 to 12 GHz. The pickup loops are placed on opposite corners of the parallel-plate capacitor at a distance of about 450 μm so that one loop can be located in close proximity to the sample while the other is kept far away from it. External fields can be applied to the sample by local single-turn field coils situated around each pickup loop. The field coils are fully integrated into the chip layout and can also be used to bias the SQUID at its most sensitive point. Compared to using additional modulation coils,14 this approach has the advantage of reducing the total device inductance, which leads to a higher sensitivity.18 In a scanning microscope, the field coil at the rear end (away from the sample) can be used to bias the SQUID or operate it in flux feedback such that resulting stray fields will not act on the sample, apart from a weak screening current through the pickup loop. The effective diameter of each coil is 7.5 μm, resulting in a mutual inductance of about 0.34 Φ0/mA (for the smallest pickup loop). The SQUID resonator is connected by an on-chip Z0 = 50 Ω coplanar waveguide (CPW) transmission line to the bonding pads. The two field coils are connected by two smaller CPWs to the bottom edge bonding pads [Fig. 1(c)], ending in two parallel-stripline waveguides running alongside the edges of the capacitor towards the respective field coils. Based on estimations, it should thus be possible to apply high frequency signals of at least several GHz to SQUID and sample.

•Jan 1, 2018•14 citations

Measurement of the spatial sensitivity of miniature SQUIDs using magnetic-tipped STM

Patrick Josephs-Franks, L Hao, Alexander Ya. Tzalenchuk +5 more

Large area superconducting quantum interference devices (SQUIDs) are known to be ultimate sensors of magnetic flux. By diminishing the size of a SQUID loop, the energy sensitivity of the device can be increased to near quantum-limited operation whilst also making it less sensitive to external magnetic field noise and improving its coupling to any nano-scale magnetic particle within the loop. This makes it an ideal nano-sensor for magnetic particles including single molecules. It is, however, important to optimize the coupling between any magnetic nano-particle placed within the SQUID and the SQUID itself in order to achieve maximum sensitivity for the spin detection. We have made some preliminary calculations of the expected SQUID response to a magnetic particle placed at different locations within the SQUID device, and using a magnetic tip in a scanning tunnelling microscope (STM) we are able to produce a spatial map of the SQUID sensitivity. Initial results on a 3 µm diameter loop SQUID are presented to demonstrate this method.

Superconductor Science and Technology•Nov 13, 2003•23 citations

Octagonal washer DC SQUIDs and integrated susceptometers fabricated in a planarized sub- mu m Nb-AlO/sub x/-Nb technology

M. B. Ketchen, Dale J. Pearson, Kevin G. Stawiasz +9 more

The authors have designed, fabricated, and measured a number of Nb-AlO/sub x/-Nb octagonal washer DC superconducting quantum interference devices (SQUIDs) and miniature DC SQUID susceptometers having minimum feature size down to 0.5 mu m. With SQUID inductance values on the order of 100 pH, typical noise performance is better than 1 mu Phi /sub 0// square root Hz. The small minimum feature size of input coils and pickup loop structures will facilitate tight coupling to a wide variety of systems ranging from submicron particles and structures to conventional approximately mu H input circuits. A single-washer SQUID with an 80-turn 0.5- mu m-linewidth, 630-nH input coil has user-friendly V- Phi (voltage-flux) curves and a coupled energy sensitivity of 20 h at 4.2 K. Susceptometers with pickup loops ranging from 20- mu m to 0.8- mu m across have very user-friendly V- Phi curves and a resolution of order 100 mu /sub B// square root Hz at 4.2 K for devices with the smallest loops.>

IEEE Transactions on Applied Superconductivity•Mar 1, 1993•27 citations

Design concepts for an improved integrated scanning SQUID

Nicholas C. Koshnick, John R. Kirtley, Kathryn A. Moler

In this paper we discuss design concepts for increasing the spatial resolution, improving the sensitivity, and reducing the invasiveness in scanning Superconducting Quantum Interference Device (SQUID) microscope sensors with integrated flux pickup loops. This can be done not only by reducing the ground-rule line widths and spacings, but also by taking advantage of planarization, reducing flux noise through reducing the SQUID inductance, and reducing back-action through dispersive readouts or on-chip filtering.

arXiv:1002.1529•Feb 8, 2010•2 citations

Three-dimensional nanoscale superconducting quantum interference device pickup loops

Edward J. Romans, Edward J. Osley, L. Young +2 more

Nanoscale superconducting quantum interference devices (SQUIDs) have sensitivities approaching that required for single-spin detection, but they only measure fields perpendicular to their plane and can be difficult to tightly couple to magnetic sources on the same chip. To remove these limitations we used focused-ion-beam-induced chemical vapor deposition to directly write a SQUID structure with three-dimensional, freestanding pickup loops using superconducting tungsten nanowires. By applying a localized field, we investigated the pickup loop response, and found that it exhibits Meissner screening corresponding to a penetration depth λ(T) consistent with BCS theory in the dirty limit and λ(0)=330 nm.

Applied Physics Letters•Nov 29, 2010•55 citations

Measurement and noise performance of nano-superconducting-quantum-interference devices fabricated by focused ion beam

L. Hao, J.C. Macfarlane, John C. Gallop +4 more

Science and industry demand ever more sensitive measurements on ever smaller systems, as exemplified by spintronics, nanoelectromechanical system, and spin-based quantum information processing, where single electronic spin detection poses a grand challenge. Superconducting quantum interference devices (SQUIDs) have yet to be effectively applied to nanoscale measurements. Here, we show that a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale SQUIDs. We present results of noise measurements on these nanoSQUIDs which correspond to a magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2. This represents one of the lowest noise values achieved for a SQUID device operating above 1K.

Applied Physics Letters•May 12, 2008•140 citations
Superconducting quantum interference devices (SQUIDs) can have excellent spin sensitivity depending on their magnetic flux noise, pickup loop diameter, and distance from the sample. We report a family of scanning SQUID susceptometers with terraced tips that position the pickup loops 300nm from the sample. The 600nm–2μm pickup loops, defined by focused ion beam, are integrated into a 12-layer optical lithography process allowing flux-locked feedback, in situ background subtraction and optimized flux noise. These features enable a sensitivity of ∼70 electron spins per root hertz at 4K.
We have designed and characterized a micro-SQUID with dispersive readout for use in low temperature scanning probe microscopy systems. The design features a capacitively shunted RF SQUID with a tunable resonance frequency from 5 to 12 GHz, micrometer spatial resolution, and integrated superconducting coils for local application of magnetic fields. The SQUID is operated as a nonlinear oscillator with a flux- and power-dependent resonance frequency. Measurements for device characterization and noise benchmarking were carried out at 4 K. The measured flux noise above 10 kHz at 4 K is 80 nΦ0 Hz−1∕2 at a bandwidth of 200 MHz. Estimations suggest that one can benefit from parametric gain based on inherent nonlinearity of the Josephson junction and reduce the flux noise to 30 nΦ0Hz–1∕2 at 100 mK, which corresponds to 10.6 μBHz–1∕2 for a magnetic moment located at the center of the pickup loop.Measuring the magnetic response of mesoscopic samples or mapping it vs. position for extended systems is effective methods for revealing the fundamental quantum properties of condensed matter systems. Over the past few decades, many advanced magnetic imaging schemes have been developed, including magnetic force microscopy,1 scanning Hall probe microscopy,2 superconducting interference devices (SQUIDs),3,4 and NV center based magnetometry.5 The high sensitivity, low back action, and low power dissipation of SQUIDs make them attractive for many types of low temperature experiments. One classic example is the central role of scanning SQUID microscopy in tests of pairing symmetry of high-Tc cuprate superconductors.6 Other prominent applications are the thermodynamic characteristics of persistent currents in normal metal rings7 and proof of edge states in topological insulators in the quantum spin Hall regime.8A key performance for a SQUID is its flux sensitivity. Parametric amplification has been harnessed in nano-SQUIDs based on aluminum junctions9,10 in order to reduce the flux noise down to 30 nΦ0Hz–1∕2 with a bandwidth exceeding 60 MHz.10 Recent studies on parametric amplifiers and dispersive readout of superconducting qubits also harness the nonlinearity of the Josephson junction to boost sensitivity.11–13In scanning SQUID microscopy, signal sources often behave dipole-like, such as superconducting vortices in mesoscopic dots or currents in mesoscopic rings. Smaller SQUIDs provide better coupling to smaller samples which leads to higher spin sensitivity3,14 as the magnetic field of a dipole decreases with 1/r3. Various approaches have been pursued to reduce the size. The smallest nano-SQUID to date has been fabricated by evaporating Nb or Pb15 onto the apex of a sharp quartz tip reaching a loop diameter of below nm and a spin sensitivity of 0.38 μBHz−1/2 at tens of kHz bandwidth. Compared to such size-optimized devices, micro-SQUIDs fabricated using a standard Nb technique have the advantage of on-chip field coils and modulation coils,14 and can be operated at 4 K allowing for a wide range of applications. However, these come at the cost of larger pick-up loops of a few microns and a resulting poorer spin sensitivity of 200 μBHz−1/2 for a magnetic moment located at the center of the pickup loop.The limitation of large pickup loops was previously only overcome by devices with pickup loops defined by the focused-ion-beam,16 but has recently also been achieved by improvements in lithography and shown to offer better spatial resolution as well.17 Here, we present a scanning micro-SQUID which is based on the same fabrication technology incorporating another major advancement. Our design exploits the parametric amplification based on nonlinearities of the SQUID to boost sensitivity. The combination of a smaller pickup loop and parametric amplification of the signal leads to better spin sensitivity (10.6 μBHz−1/2) and higher bandwidth (200 MHz) compared to traditional DC micro-SQUIDs in which the flux sensitivity is mainly limited by internal dissipation.Our devices were fabricated at Hypres Inc. using planarized Nb/AlOx/Nb trilayer Josephson junction technology, including two planarized Nb layers with approximately 0.8 μm minimum feature size. The SQUID consists of a superconducting ring shunted by one Josephson junction with a designed critical current of 20 μA [Fig. 1(a)]. With this geometry, the SQUID is gradiometric, i.e., the effect of any homogeneous background magnetic field approximately cancels out. The smallest pickup loops implemented have an inner (outer) diameter of 1 μm (2 μm). The superconducting loop is shunted by an on-chip parallel-plate capacitor with amorphous silicon dioxide as dielectric which was designed to have a capacitance of 80 pF. The superconducting loop and the capacitor form a resonator with a flux dependent resonance frequency from 5 to 12 GHz. The pickup loops are placed on opposite corners of the parallel-plate capacitor at a distance of about 450 μm so that one loop can be located in close proximity to the sample while the other is kept far away from it. External fields can be applied to the sample by local single-turn field coils situated around each pickup loop. The field coils are fully integrated into the chip layout and can also be used to bias the SQUID at its most sensitive point. Compared to using additional modulation coils,14 this approach has the advantage of reducing the total device inductance, which leads to a higher sensitivity.18 In a scanning microscope, the field coil at the rear end (away from the sample) can be used to bias the SQUID or operate it in flux feedback such that resulting stray fields will not act on the sample, apart from a weak screening current through the pickup loop. The effective diameter of each coil is 7.5 μm, resulting in a mutual inductance of about 0.34 Φ0/mA (for the smallest pickup loop). The SQUID resonator is connected by an on-chip Z0 = 50 Ω coplanar waveguide (CPW) transmission line to the bonding pads. The two field coils are connected by two smaller CPWs to the bottom edge bonding pads [Fig. 1(c)], ending in two parallel-stripline waveguides running alongside the edges of the capacitor towards the respective field coils. Based on estimations, it should thus be possible to apply high frequency signals of at least several GHz to SQUID and sample.
Large area superconducting quantum interference devices (SQUIDs) are known to be ultimate sensors of magnetic flux. By diminishing the size of a SQUID loop, the energy sensitivity of the device can be increased to near quantum-limited operation whilst also making it less sensitive to external magnetic field noise and improving its coupling to any nano-scale magnetic particle within the loop. This makes it an ideal nano-sensor for magnetic particles including single molecules. It is, however, important to optimize the coupling between any magnetic nano-particle placed within the SQUID and the SQUID itself in order to achieve maximum sensitivity for the spin detection. We have made some preliminary calculations of the expected SQUID response to a magnetic particle placed at different locations within the SQUID device, and using a magnetic tip in a scanning tunnelling microscope (STM) we are able to produce a spatial map of the SQUID sensitivity. Initial results on a 3 µm diameter loop SQUID are presented to demonstrate this method.
The authors have designed, fabricated, and measured a number of Nb-AlO/sub x/-Nb octagonal washer DC superconducting quantum interference devices (SQUIDs) and miniature DC SQUID susceptometers having minimum feature size down to 0.5 mu m. With SQUID inductance values on the order of 100 pH, typical noise performance is better than 1 mu Phi /sub 0// square root Hz. The small minimum feature size of input coils and pickup loop structures will facilitate tight coupling to a wide variety of systems ranging from submicron particles and structures to conventional approximately mu H input circuits. A single-washer SQUID with an 80-turn 0.5- mu m-linewidth, 630-nH input coil has user-friendly V- Phi (voltage-flux) curves and a coupled energy sensitivity of 20 h at 4.2 K. Susceptometers with pickup loops ranging from 20- mu m to 0.8- mu m across have very user-friendly V- Phi curves and a resolution of order 100 mu /sub B// square root Hz at 4.2 K for devices with the smallest loops.>
In this paper we discuss design concepts for increasing the spatial resolution, improving the sensitivity, and reducing the invasiveness in scanning Superconducting Quantum Interference Device (SQUID) microscope sensors with integrated flux pickup loops. This can be done not only by reducing the ground-rule line widths and spacings, but also by taking advantage of planarization, reducing flux noise through reducing the SQUID inductance, and reducing back-action through dispersive readouts or on-chip filtering.
Nanoscale superconducting quantum interference devices (SQUIDs) have sensitivities approaching that required for single-spin detection, but they only measure fields perpendicular to their plane and can be difficult to tightly couple to magnetic sources on the same chip. To remove these limitations we used focused-ion-beam-induced chemical vapor deposition to directly write a SQUID structure with three-dimensional, freestanding pickup loops using superconducting tungsten nanowires. By applying a localized field, we investigated the pickup loop response, and found that it exhibits Meissner screening corresponding to a penetration depth λ(T) consistent with BCS theory in the dirty limit and λ(0)=330 nm.
Science and industry demand ever more sensitive measurements on ever smaller systems, as exemplified by spintronics, nanoelectromechanical system, and spin-based quantum information processing, where single electronic spin detection poses a grand challenge. Superconducting quantum interference devices (SQUIDs) have yet to be effectively applied to nanoscale measurements. Here, we show that a simple bilayer deposition route, combining photolithography with focused ion beam patterning, produces high performance nanoscale SQUIDs. We present results of noise measurements on these nanoSQUIDs which correspond to a magnetic flux sensitivity of around 0.2μΦ0∕Hz1∕2. This represents one of the lowest noise values achieved for a SQUID device operating above 1K.