Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Atomoptische Interferenz- und Lithographieexperimente mit metastabilem Helium

S. Nowak

Published Jan 1, 1998• 0 citations
OpenAlex

Abstract

In this thesis experiments are described, where a beam of metastable helium is used for atom optic interferometry experiments as well as for lithography. The broad potential of atom optics for fundamental as well as applied research could thus be used. In the first experiment described in this work, dealing with atom lithography, a lithographic resist technique was implemented, basing on the structural changes of single molecules of a self-assembling monolayer of dodecanethiol due to Penning processes induced by metastable helium atoms. This molecular layer could be laterally structured with respect to its hydrophobicity properties. In a chemical etching step, the structure in the local wetability could be transferred into an underlying gold layer, producing sharp structures there. It could be shown experimentally, that this change of the wetability is essential for the process. In the second experiment, the Talbot effect was investigated with de-Broglie waves, which is the phenomenon of interferometric self imaging of a transmission grating at the characteristic distance of the Talbot length from the grating. Special interest was taken in the demonstration of the fractional Talbot effect, that is the self imaging of the transmission grating with reduced period, because this effect is in principle useful for the production of very small structures in the atomic density distribution of an atom beam. Fractional self imaging up to seventh order with periods of one micron could be observed in the experiment. The third experiment is on diffraction of de-Broglie waves by a wire and on refraction of atomic de-Broglie waves by a rotationally symmetric potential. The Poisson interference spot in the center of the shadow of the wire was experimentally demonstrated as well as Fresnel diffraction fringes at the edges of the wire. Well defined voltages could be applied to two plate electodes opposite the wire, producing a radial electric field in the vicini

Related papers

Neutral atom lithography using the 389 nm transition in metastable helium

Jason R. Reeves

Resist based neutral atom lithography with metastable 23S1 helium(He. ) has been used to produce small structures in both goldand palladium. A beam of He. from a reverse flow, DC dischargesource is collimated by the bichromatic optical force followed bythree optical molasses velocity compression stages. The He. beamthen crosses a region where a mechanical or optical mask createsthe desired pattern.In the first experiments, a self assembled monolayer (SAM) ofnonanethiol is grown on a gold coated silicon wafer and then exposedto the bright, collimated beam of He. after a Nickel micromesh mask. The mesh protects parts of the SAM from the 20 eVof internal energy deposited by the impact of a He. atom onto thesample surface. The pattern of the mesh is transferred into the~200 Å gold layer with a standard selective etch that removes theGold from under the damaged SAM molecules. The samples wereanalyzed with an Atomic Force Microscope and Scanning ElectronMicroscope.The second set of experiments were performed using an opticalmask to pattern a gold coated silicon wafer. In the optical mask,the He. atoms experience the dipole force while traversing a standinglight wave of &lambda1<\sub> = 1083 nm light tuned 490 MHz above the 23S1<\sub>→ 23P2 transition or, in separate experiments, &lambda2<\sub> = 389 nmlight tuned 80 MHz below the 23S1<\sub>→ 33P2 transition. Using theoptical masks, He. can be focused or channeled into parallel linesseparated by &lambda/2 by varying the intensity of the standing lightwave.The small structures created by the 389 nm optical mask beganapproaching the gold surface granularity. A ~200 Å layer of palladium on silicon was chosen as the palladium granularity is muchsmaller and the SAM of nonanethiol will still form on the surface.Experiments using a nickel micro mesh as a mechanical mask havedemonstrated similar features to those in gold.

•Aug 1, 2010•0 citations

High-order Talbot fringes for atomic matter waves

S. Nowak, Christian Kurtsiefer, Christian Dávid +2 more

Summary form only given.Recent developments in atom optics have led to different approaches to lithographic techniques with neutral atoms. One of these is the use of diffraction from free-standing masks, which is sometimes called atom holography. There, narrow structures arise due to matter-wave interference in the Fresnel regime. In the presented experiment, we demonstrate that the wave nature of atoms can be used to produce periodic structures with small periodicities. We used the Talbot effect in the Fresnel diffraction regime behind a microfabricated transmission grating. The Talbot effect is the self-imaging of a grating of periodicity d illuminated with plane coherent waves.

Conference on Lasers and Electro-Optics•Nov 27, 2002•0 citations

Diffraction of metastable helium atoms by a transmission grating

O. Carnal, A. Faulstich, J. Mlynek

We have measured the diffraction of metastable helium atoms by a transmission grating with a period of 500 nm. The atomic beam is derived from a supersonic nozzle by adiabatic gas expansion with a velocity ratio v/Δv 20; with the nozzle cooled to liquid nitrogen temperature, the corresponding de Broglie wave length of the helium atoms is 1.08 Å. We have observed diffraction peaks up to the third order with a good signal-to-noise ratio. The position and the height of the different orders are in satisfactory agreement with the measured grating shape and the mean velocity in the atomic beam. As was pointed out previously, such transmission gratings offer one way to realize an atom-wave interferometer.1 In this context, our results demonstrate that an efficient diffraction can also be obtained with excited-state atoms: Here the use of metastable rare-gas atoms is of special interest because they are easy to handle and can be detected on almost zero background. As an alternative to the use of transmission gratings in matter-wave interferometry, we also discuss a simple double-slit arrangement that may provide another approach to the study of atomic interference phenomena.

Annual Meeting Optical Society of America•Jan 1, 1990•0 citations

Free-standing, axially-symmetric diffraction gratings for neutral matter-waves: experiments and fabrication

Thomas J.G. Reisinger

Since de Broglie’s famous postulation of the wave-nature of material particles and its subsequent experimental verification, it is known that atoms and molecules behave like waves on a small scale. The investigation of matter waves is a fundamental topic in quantum mechanics. Furthermore, matter waves have many applications in a number of scientific fields. For example they are used to investigate materials by studying the diffraction of atoms (Helium Atom Scattering) or electrons (Low-energy electron-diffraction) from the material’s surface. The topic of this thesis has been to make nano-structured optical elements for matter-waves and use them in a number of experiments. A major result of this thesis is the performance of the classical Poisson-spot experiment with neutral matter-waves. The Poisson-spot refers to the bright interference spot observed in the shadow of a circular obstacle. The experiment gave convincing evidence of the wave nature of light at the beginning of the 19th century. The first two articles (A&B) in this thesis are concerned with the Poisson-spot experiment for matter waves and its applications. The experiment was performed using low-energy deuterium molecules (normal D2, 23.5 meV), which is described in the first article. In the second article the feasibility of using the Poisson-spot experiment to demonstrate the wave-nature of large molecules is studied. The wave properties of large molecules are an important topic in current research. The remaining three articles are concerned with Fresnel zone-plates. Fresnel zoneplates are axially symmetric diffraction gratings that can be used to focus waves. Loosely formulated the relationship between Fresnel zone-plates and the circular object in the Poissonspot experiment is the same as the relationship between multiple-slit gratings and a single straight edge. Paper C studies the application of microscopy with neutral atoms and molecules and the limitations of focusing matter waves with zone plates. The fabrication of the nanostructured free-standing zone-plates using electron-beam lithography is the topic of paper D. A second, new application of Fresnel zone-plates is introduced in paper E: There a zone plate is used for a direct size measurement of the so-called virtual source in a supersonic expansion. The main-result from the Poisson-spot experiment was the observation of the Poisson spot with a molecular-deuterium beam and the successful comparison of the collected experimental data with Fresnel-diffraction theory. The wave-length independence of the on-axis interferencecondition in the Poisson-spot experiment and the weak constraints on angular alignment and position of the circular object led us to conclude that the Poisson spot is a good candidate for demonstrating the wave nature of larger molecules. This idea is studied further in paper B, where among other things the feasibility of a Poissonspot experiment with the fullerene molecule C70 is examined. The main conclusion from this article was that the wave-nature of a molecular-beam can be demonstrated in diffraction experiments with circular discs that have varying amount of intended edge-corrugation. This is because the dependence of the bright spot on the edge-corrugation in the particle-model is different than in the wave-model. The result for the C70 Poisson-spot was that the experiment would be very challenging with count rates as low as 10−4 s−1. However, one possibility would be, due to the simplicity of the setup, to parallelize the experiment and measure the diffraction pattern behind many circular discs at once. This could be realized using the fabrication techniques discussed in chapter 4. Other applications of the Poisson spot could include the study of the Casmir-Polder potential, molecule-lithography and diffraction experiments with atom-lasers from Bose-Einstein condensates. While Fresnel zone-plates can be used to focus any type of wave they suffer from strong chromatic aberration since their focal length is inversely proportional to wavelength. In the case of neutral atom and molecule focusing this is what limits resolution. Paper C presents the highest resolution helium transmission-images hitherto and results from the first focusing of molecular deuterium with a zone plate. In addition the paper discusses the resolution-limit and finds that with presently available techniques a minimal spot size of 300 nm full-width-athalf- maximum is feasible using a zone plate of 200 μm diameter and a beam with speed ratio of about 500. The Fresnel zone-plates used to focus the supersonic-expansion beams need to be freestanding, since the low-energy atoms and molecules do not penetrate any material. In paper D an electron-beam lithography fabrication-process for free-standing zone-plates is presented. The process uses a 200-nm-thin layer of low-stress silicon-nitride for the material of the zone plates. The fabricated zone plates were tested in the supersonic-expansion beam apparatus. The transmission and first-order diffraction-efficiency are close to the theoretical prediction for the smaller 190 μm-diameter zone plates patterned with a single electron-beam write-field. A reduction to 70 % for the 388-μm-diameter zone-plate was observed which was attributed to stitching errors since it was stitched together from four write-fields. In chapter 4 additional unpublished results are presented on spatial-phase-locked electron-beam lithography, which aims at the reduction of stitching errors and other pattern-placement errors in electron-beam lithography. Finally in paper E one of the fabricated zone plates in addition to a previously existing one is used to measure the virtual source-width of a molecular deuterium supersonic-expansion beam. The virtual source-width is a measure of the beam’s temperature perpendicular to the beam axis. The beam’s energy distribution along the beam axis is measured using the timeof- flight method. Data sets for source temperatures T0=310 K and T0=106 K were collected in the stagnation pressure ranges p0=3-171 bar and p0=3-131 bar, respectively. The measured parameters were compared to a simple model of the expansion which explicitly includes the coupling between translational and rotational degrees of freedom. The data generally corresponded very well to the model, except for the virtual source size which was systematically about 2/3 of the model’s prediction. For the cold source-conditions the beam is increasingly heated due to condensation effects at increasing pressures, which results in a clear deviation from the model. This could be used to estimate the fraction of condensed molecules in the beam.

•Oct 4, 2011•1 citation

Atom lithography with metastable helium

Claire Allred, Jason Reeves, Christopher Corder +1 more

A bright metastable helium (He∗) beam is collimated sequentially with the bichromatic force and three optical molasses velocity compression stages. Each He∗ atom in the beam has 20 eV of internal energy that can destroy a molecular resist assembled on a gold coated silicon wafer. Patterns in the resist are imprinted onto the gold layer with a standard selective etch. Patterning of the wafer with the He∗ was demonstrated with two methods. First, a mesh was used to protect parts of the wafer making an array of grid lines. Second, a standing wave of λ=1083 nm light was used to channel and focus the He∗ atoms into lines separated by λ/2. The patterns were measured with an atomic force microscope establishing an edge resolution of 80 nm. Our results are reliable and repeatable.

Journal of Applied Physics•Feb 1, 2010•20 citations

Matter-wave/atom interferometry

John F. Clauser, Shifang Li

Although interferometry's earliest and most familiar use is with photons, the discovery of matter-wave (deBroglie-wave) interference for electrons demanded the development of quantum mechanics. Since then, matter-wave interferometry has been performed with neutrons, Cooper electron-pairs, and most recently, with whole atoms and diatomic molecules. This talk describes our recent high-flux atom interferometry experiments using the generalized Talbot-vonLau effect. Our interferometer consists of a sequence of three planar vacuum-slit diffraction gratings, microfabricated from silicon nitride membranes. DeBroglie-wave interference fringes are sensed by measuring the transmission of potassium atoms on a hot- wire as a function of grating relative position. Different spatial Fourier components (up to sixth) in the diffraction pattern are resonant in the interferometer at different atomic velocities (i.e., at different wavelengths). When a laser cooled slow atomic beam is incident, various different diffraction patterns are observed as a function of atomic velocity. In an alternative `Heisenberg Microscope' configuration an incident thermal beam produces a velocity average over different fringe Fourier components. AC modulated weak laser light passing through the interferometer interacts selectively with atoms at a specific velocity. The associated fringe pattern is then ac modulated and revealed by its selective destruction.

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE•Dec 12, 1994•0 citations
In this thesis experiments are described, where a beam of metastable helium is used for atom optic interferometry experiments as well as for lithography. The broad potential of atom optics for fundamental as well as applied research could thus be used. In the first experiment described in this work, dealing with atom lithography, a lithographic resist technique was implemented, basing on the structural changes of single molecules of a self-assembling monolayer of dodecanethiol due to Penning processes induced by metastable helium atoms. This molecular layer could be laterally structured with respect to its hydrophobicity properties. In a chemical etching step, the structure in the local wetability could be transferred into an underlying gold layer, producing sharp structures there. It could be shown experimentally, that this change of the wetability is essential for the process. In the second experiment, the Talbot effect was investigated with de-Broglie waves, which is the phenomenon of interferometric self imaging of a transmission grating at the characteristic distance of the Talbot length from the grating. Special interest was taken in the demonstration of the fractional Talbot effect, that is the self imaging of the transmission grating with reduced period, because this effect is in principle useful for the production of very small structures in the atomic density distribution of an atom beam. Fractional self imaging up to seventh order with periods of one micron could be observed in the experiment. The third experiment is on diffraction of de-Broglie waves by a wire and on refraction of atomic de-Broglie waves by a rotationally symmetric potential. The Poisson interference spot in the center of the shadow of the wire was experimentally demonstrated as well as Fresnel diffraction fringes at the edges of the wire. Well defined voltages could be applied to two plate electodes opposite the wire, producing a radial electric field in the vicini
Resist based neutral atom lithography with metastable 23S1 helium(He. ) has been used to produce small structures in both goldand palladium. A beam of He. from a reverse flow, DC dischargesource is collimated by the bichromatic optical force followed bythree optical molasses velocity compression stages. The He. beamthen crosses a region where a mechanical or optical mask createsthe desired pattern.In the first experiments, a self assembled monolayer (SAM) ofnonanethiol is grown on a gold coated silicon wafer and then exposedto the bright, collimated beam of He. after a Nickel micromesh mask. The mesh protects parts of the SAM from the 20 eVof internal energy deposited by the impact of a He. atom onto thesample surface. The pattern of the mesh is transferred into the~200 Å gold layer with a standard selective etch that removes theGold from under the damaged SAM molecules. The samples wereanalyzed with an Atomic Force Microscope and Scanning ElectronMicroscope.The second set of experiments were performed using an opticalmask to pattern a gold coated silicon wafer. In the optical mask,the He. atoms experience the dipole force while traversing a standinglight wave of &lambda1<\sub> = 1083 nm light tuned 490 MHz above the 23S1<\sub>→ 23P2 transition or, in separate experiments, &lambda2<\sub> = 389 nmlight tuned 80 MHz below the 23S1<\sub>→ 33P2 transition. Using theoptical masks, He. can be focused or channeled into parallel linesseparated by &lambda/2 by varying the intensity of the standing lightwave.The small structures created by the 389 nm optical mask beganapproaching the gold surface granularity. A ~200 Å layer of palladium on silicon was chosen as the palladium granularity is muchsmaller and the SAM of nonanethiol will still form on the surface.Experiments using a nickel micro mesh as a mechanical mask havedemonstrated similar features to those in gold.
Summary form only given.Recent developments in atom optics have led to different approaches to lithographic techniques with neutral atoms. One of these is the use of diffraction from free-standing masks, which is sometimes called atom holography. There, narrow structures arise due to matter-wave interference in the Fresnel regime. In the presented experiment, we demonstrate that the wave nature of atoms can be used to produce periodic structures with small periodicities. We used the Talbot effect in the Fresnel diffraction regime behind a microfabricated transmission grating. The Talbot effect is the self-imaging of a grating of periodicity d illuminated with plane coherent waves.
We have measured the diffraction of metastable helium atoms by a transmission grating with a period of 500 nm. The atomic beam is derived from a supersonic nozzle by adiabatic gas expansion with a velocity ratio v/Δv 20; with the nozzle cooled to liquid nitrogen temperature, the corresponding de Broglie wave length of the helium atoms is 1.08 Å. We have observed diffraction peaks up to the third order with a good signal-to-noise ratio. The position and the height of the different orders are in satisfactory agreement with the measured grating shape and the mean velocity in the atomic beam. As was pointed out previously, such transmission gratings offer one way to realize an atom-wave interferometer.1 In this context, our results demonstrate that an efficient diffraction can also be obtained with excited-state atoms: Here the use of metastable rare-gas atoms is of special interest because they are easy to handle and can be detected on almost zero background. As an alternative to the use of transmission gratings in matter-wave interferometry, we also discuss a simple double-slit arrangement that may provide another approach to the study of atomic interference phenomena.
Since de Broglie’s famous postulation of the wave-nature of material particles and its subsequent experimental verification, it is known that atoms and molecules behave like waves on a small scale. The investigation of matter waves is a fundamental topic in quantum mechanics. Furthermore, matter waves have many applications in a number of scientific fields. For example they are used to investigate materials by studying the diffraction of atoms (Helium Atom Scattering) or electrons (Low-energy electron-diffraction) from the material’s surface. The topic of this thesis has been to make nano-structured optical elements for matter-waves and use them in a number of experiments. A major result of this thesis is the performance of the classical Poisson-spot experiment with neutral matter-waves. The Poisson-spot refers to the bright interference spot observed in the shadow of a circular obstacle. The experiment gave convincing evidence of the wave nature of light at the beginning of the 19th century. The first two articles (A&B) in this thesis are concerned with the Poisson-spot experiment for matter waves and its applications. The experiment was performed using low-energy deuterium molecules (normal D2, 23.5 meV), which is described in the first article. In the second article the feasibility of using the Poisson-spot experiment to demonstrate the wave-nature of large molecules is studied. The wave properties of large molecules are an important topic in current research. The remaining three articles are concerned with Fresnel zone-plates. Fresnel zoneplates are axially symmetric diffraction gratings that can be used to focus waves. Loosely formulated the relationship between Fresnel zone-plates and the circular object in the Poissonspot experiment is the same as the relationship between multiple-slit gratings and a single straight edge. Paper C studies the application of microscopy with neutral atoms and molecules and the limitations of focusing matter waves with zone plates. The fabrication of the nanostructured free-standing zone-plates using electron-beam lithography is the topic of paper D. A second, new application of Fresnel zone-plates is introduced in paper E: There a zone plate is used for a direct size measurement of the so-called virtual source in a supersonic expansion. The main-result from the Poisson-spot experiment was the observation of the Poisson spot with a molecular-deuterium beam and the successful comparison of the collected experimental data with Fresnel-diffraction theory. The wave-length independence of the on-axis interferencecondition in the Poisson-spot experiment and the weak constraints on angular alignment and position of the circular object led us to conclude that the Poisson spot is a good candidate for demonstrating the wave nature of larger molecules. This idea is studied further in paper B, where among other things the feasibility of a Poissonspot experiment with the fullerene molecule C70 is examined. The main conclusion from this article was that the wave-nature of a molecular-beam can be demonstrated in diffraction experiments with circular discs that have varying amount of intended edge-corrugation. This is because the dependence of the bright spot on the edge-corrugation in the particle-model is different than in the wave-model. The result for the C70 Poisson-spot was that the experiment would be very challenging with count rates as low as 10−4 s−1. However, one possibility would be, due to the simplicity of the setup, to parallelize the experiment and measure the diffraction pattern behind many circular discs at once. This could be realized using the fabrication techniques discussed in chapter 4. Other applications of the Poisson spot could include the study of the Casmir-Polder potential, molecule-lithography and diffraction experiments with atom-lasers from Bose-Einstein condensates. While Fresnel zone-plates can be used to focus any type of wave they suffer from strong chromatic aberration since their focal length is inversely proportional to wavelength. In the case of neutral atom and molecule focusing this is what limits resolution. Paper C presents the highest resolution helium transmission-images hitherto and results from the first focusing of molecular deuterium with a zone plate. In addition the paper discusses the resolution-limit and finds that with presently available techniques a minimal spot size of 300 nm full-width-athalf- maximum is feasible using a zone plate of 200 μm diameter and a beam with speed ratio of about 500. The Fresnel zone-plates used to focus the supersonic-expansion beams need to be freestanding, since the low-energy atoms and molecules do not penetrate any material. In paper D an electron-beam lithography fabrication-process for free-standing zone-plates is presented. The process uses a 200-nm-thin layer of low-stress silicon-nitride for the material of the zone plates. The fabricated zone plates were tested in the supersonic-expansion beam apparatus. The transmission and first-order diffraction-efficiency are close to the theoretical prediction for the smaller 190 μm-diameter zone plates patterned with a single electron-beam write-field. A reduction to 70 % for the 388-μm-diameter zone-plate was observed which was attributed to stitching errors since it was stitched together from four write-fields. In chapter 4 additional unpublished results are presented on spatial-phase-locked electron-beam lithography, which aims at the reduction of stitching errors and other pattern-placement errors in electron-beam lithography. Finally in paper E one of the fabricated zone plates in addition to a previously existing one is used to measure the virtual source-width of a molecular deuterium supersonic-expansion beam. The virtual source-width is a measure of the beam’s temperature perpendicular to the beam axis. The beam’s energy distribution along the beam axis is measured using the timeof- flight method. Data sets for source temperatures T0=310 K and T0=106 K were collected in the stagnation pressure ranges p0=3-171 bar and p0=3-131 bar, respectively. The measured parameters were compared to a simple model of the expansion which explicitly includes the coupling between translational and rotational degrees of freedom. The data generally corresponded very well to the model, except for the virtual source size which was systematically about 2/3 of the model’s prediction. For the cold source-conditions the beam is increasingly heated due to condensation effects at increasing pressures, which results in a clear deviation from the model. This could be used to estimate the fraction of condensed molecules in the beam.
A bright metastable helium (He∗) beam is collimated sequentially with the bichromatic force and three optical molasses velocity compression stages. Each He∗ atom in the beam has 20 eV of internal energy that can destroy a molecular resist assembled on a gold coated silicon wafer. Patterns in the resist are imprinted onto the gold layer with a standard selective etch. Patterning of the wafer with the He∗ was demonstrated with two methods. First, a mesh was used to protect parts of the wafer making an array of grid lines. Second, a standing wave of λ=1083 nm light was used to channel and focus the He∗ atoms into lines separated by λ/2. The patterns were measured with an atomic force microscope establishing an edge resolution of 80 nm. Our results are reliable and repeatable.
Although interferometry's earliest and most familiar use is with photons, the discovery of matter-wave (deBroglie-wave) interference for electrons demanded the development of quantum mechanics. Since then, matter-wave interferometry has been performed with neutrons, Cooper electron-pairs, and most recently, with whole atoms and diatomic molecules. This talk describes our recent high-flux atom interferometry experiments using the generalized Talbot-vonLau effect. Our interferometer consists of a sequence of three planar vacuum-slit diffraction gratings, microfabricated from silicon nitride membranes. DeBroglie-wave interference fringes are sensed by measuring the transmission of potassium atoms on a hot- wire as a function of grating relative position. Different spatial Fourier components (up to sixth) in the diffraction pattern are resonant in the interferometer at different atomic velocities (i.e., at different wavelengths). When a laser cooled slow atomic beam is incident, various different diffraction patterns are observed as a function of atomic velocity. In an alternative `Heisenberg Microscope' configuration an incident thermal beam produces a velocity average over different fringe Fourier components. AC modulated weak laser light passing through the interferometer interacts selectively with atoms at a specific velocity. The associated fringe pattern is then ac modulated and revealed by its selective destruction.