Silicon nitride as a platform for integrated quantum photonics

Joshua W. Silverstone, Damien Bonneau, Jeremy L. O’Brien +1 more

Alexander V. Senichev, Samuel Peana, Zachariah O. Martin +5 more

Silicon nitride has great potential for integrated quantum photonics. We demonstrate monolithic integration of intrinsic quantum emitters in SiN with waveguides which show a room-temperature off-chip count rate of ~104 counts/s and clear antibunching behavior.

Sourav Dev, Mircea Traian Catuneanu, Menglong He +20 more

In this paper, we report on a silicon-nitride-based integrated photonic platform. Various electro-optic structures were designed to be included in this platform. Moreover, the process of packaging the silicon nitride chips and their applications for random number generation are discussed.

Chunghyun Ahn, Yongjin Hwang, Sangbaek Lee +7 more

Integrated quantum photonics requires compact, efficient, and low-power phase modulators. While silicon nitride (SiN) is a promising platform, existing modulators suffer from high power consumption, thermal crosstalk, or high driving voltages. Liquid crystal (LC) offers a compelling alternative because of the large index changes and industrial maturity. However, their suitability for supporting various applications in the photonic quantum system has not been experimentally confirmed.Here, we report the first experimental demonstration that LC-based phase modulators integrated on a SiN platform show highly visible quantum interference. We fabricated a liquid-crystal integrated Mach-Zehnder interferometer (LC-MZI) that achieved CMOS-compatible performance with V_pi * L < 1 V-mm. In two-photon interference experiments, the devices exhibited high-visibility quantum interference (~98.5%) with voltage-tunable phase control. Furthermore, we validated the scalability of our approach by demonstrating wafer-scale fabrication using stepper lithography. This work establishes LC-integrated SiN photonics as a scalable, reconfigurable, and energy-efficient platform for quantum photonic circuits.

Damien Bonneau, Joshua W. Silverstone, Mark G. Thompson

Yasutomo Ota, Ryota Katsumi, Alto Osada +4 more