Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Applied Physics Letters

Frequency control of superconducting resonators using integrated interferometers

Irina E. Tarasova, Sergey V. Egorov, Ivan A. Nazhestkin, Sergey V. Bakurskiy, A. S. Ionin, N. G. Ismailov, V. V. Ryazanov, N. V. Klenov, Igor I. Soloviev, Dmitry S. Yakovlev

Published Aug 24, 2026• 0 citations
Publisher

Abstract

Predictable frequency trimming of superconducting resonators at liquid-helium temperatures requires a tuning element whose usable range remains well defined despite screening currents and hysteresis. Here, we realize flux-controlled λ/4 coplanar-waveguide resonators terminated by two-junction DC superconducting quantum interference devices (SQUIDs) fabricated in a standard Nb/Al-AlOx/Nb multilayer process. Integrated on-chip flux-bias lines allow the resonant frequency to be controlled at 4.2 K. RF measurements show periodic frequency modulation with applied flux, with a maximum shift of δfr=8.63 MHz and a single-valued tuning interval of δfr0=2.85 MHz. Near half-integer flux quanta, the response exhibits hysteretic jumps caused by the finite SQUID loop inductance, so that the usable single-valued tuning interval is smaller than the full modulation range. We develop a semi-analytical model of the frequency–flux response, supported by numerical simulations and 3D electromagnetic extraction of the device parameters, which reproduces the measured hysteretic branches and identifies the SQUID loop inductance and junction critical current as the main parameters limiting the usable tuning range. These results provide a quantitative design framework for MHz-scale frequency trimming of Nb superconducting resonators in 4 K cryogenic readout circuits.

DOI
10.1063/5.0329256

Related papers

Efficient flip-chip and on-chip-based modulation of flux-tunable superconducting resonators

Achintya Paradkar, Paul Nicaise, Karim Dakroury +5 more

We demonstrate the efficient modulation of flux-tunable superconducting resonators (FTRs) using flip-chip or on-chip-based input coils. The FTRs we use are aluminum-based quarter-wave coplanar waveguide resonators terminated with 100um or 200um-wide square loop dc superconducting quantum interference devices (SQUIDs) employing 1um-sized Josephson junctions. We employ SQUIDs with a geometric loop inductance of up to 0.7nH to increase the flux transfer efficiency. The geometric inductance of the SQUID results in a non-zero screening parameter $β_L$, whose branch switching effect is mitigated by using asymmetric junctions. We achieve flux modulation of the FTRs by more than one GHz and flux responsivities of up to tens of GHz/$Φ_0$ with uA-scale on-chip currents. We compare flip-chip with on-chip input-coil-based flux modulation, where the former is realized through galvanically connected and closely spaced chips, while the latter is achieved through superconducting air-bridge connections. We achieve a flux-transfer efficiency from the input coil to the SQUID loop of up to 20%. Our work paves the way for efficient low current flux modulation of FTRs and sensitive measurement of flux signals.

quant-pharXiv:2512.23119•Dec 30, 2025•0 citations

Flux-coupled tunable superconducting resonator

Juliang Li, Peter S. Barry, Tom Cecil +6 more

We present a design and implementation of a frequency-tunable superconducting resonator. The resonance frequency tunability is achieved by flux-coupling a superconducting LC loop to a current-biased feedline; the resulting screening current leads to a change of the kinetic inductance and shift in the resonance frequency. The thin-film aluminum resonator consists of an interdigitated capacitor and thin line inductors forming a closed superconducting loop. The magnetic flux from the nearby niobium current feedline induces Meissner shielding currents in the resonator loop leading to a change in the kinetic part of the total inductance of the resonator. We demonstrate continuous frequency tuning within 160 MHz around the resonant frequency of 2.7 GHz. We show that: (1) frequency up-conversion is achieved when a kilohertz ac modulation signal is superimposed onto the dc bias resulting in sidebands to the resonator tone; (2) three-wave mixing is attained by parametrically pumping the nonlinear kinetic inductance using a strong rf pump signal in the feedline. The simple architecture is amenable to large-array multiplexing and on-chip integration with other circuit components. The concept could be applied in flux magnetometers, up-converters, and parametric amplifiers operating above 4 K when alternative high-critical-temperature material with high kinetic inductance is used.

arXiv:2312.12755•Physical Review Applied•Jul 30, 2024•9 citations

Tunable Superconducting Cavity using Superconducting Quantum Interference Device Metamaterials

Samuel Kim, David B. Shrekenhamer, K. McElroy +2 more

Abstract Here we consider a tunable superconducting cavity that can be used either as a tunable coupler to a qubit inside the cavity or as a tunable low noise, low temperature, RF filter. Our design consists of an array of radio-frequency superconducting quantum interference devices (rf SQUIDs) inside a superconducting cavity. This forms a tunable metamaterial structure which couples to the cavity through its magnetic plasma frequency. By tuning the resonant frequency of the metamaterial through an applied magnetic flux, one can tune the cavity mode profile. This allows us to detune the cavity initially centered at 5.593 GHz by over 200 MHz. The maximum quality factor approaches that of the empty cavity, which is 4.5 × 106. The metamaterial electromagnetic response is controlled via a low-frequency or dc magnetic flux bias, and we present a control line architecture that is capable of applying sufficient magnetic flux bias with minimal parasitic coupling. Together this design allows for an in-situ tunable cavity which enables low-temperature quantum control applications.

Scientific Reports•Mar 15, 2019•12 citations

Dually tunable YBCO coplanar waveguide resonators based on helium-ion-generated Josephson inductances

Kenny Fohmann, Timo J. Glebe-Märklin, Benedikt Wilde +5 more

Superconducting microwave circuits with and without Josephson inductances are the Swiss Army knife for many experiments and technologies from quantum information science to astrophysical particle detectors. Despite a large variety of existing circuit types, thin film materials and Josephson junction technologies, a flexible and reliable platform for high-magnetic-field and high-temperature applications is yet to be found. In this manuscript, we investigate coplanar waveguide cavities made of the high-temperature cuprate superconductor YBa$_2$Cu$_3$O$_7$ (YBCO), integrated with Josephson inductances and quantum interferometers that are generated by the controlled local irradiation of the YBCO with a focused helium ion beam. We obtain strongly flux-tunable microwave resonators, which not only display periodic interferometer oscillations of resonance frequency and decay rate, but also a superimposed Fraunhofer-like modulation pattern. The latter originates from the magnetic field tuning of the individual Josephson junction critical currents due to the out-of-plane junction barriers. It allows adjusting resonance frequency and flux responsivity independently of each other, potentially enabling tunable microwave circuits with low sensitivity to external magnetic-field noise over a broad range of frequencies. Finally, we investigate the temperature dependence of the cavities, show that they have promising characteristics up to 14$\,$K, and present a model for the junction-induced cavity losses.

quant-pharXiv:2605.30425•Jun 1, 2026•0 citations

Microwave photon generation in a doubly tunable superconducting resonator

I-M. Svensson, M. Pierre, Michaël Simoen +7 more

We have created a doubly tunable resonator, with the intention to simulate relativistic motion of the resonator boundaries in real space. Our device is a superconducting coplanar-waveguide microwave resonator, with fundamental resonant frequency ω 1 / (2 π ) ~ 5 GHz. Both of its ends are terminated to ground via dc-SQUIDs, which serve as magnetic-flux-controlled inductances. Applying a flux to either SQUID allows the tuning of ω 1 / (2 π ) by approximately 700 MHz. Using two separate on-chip magnetic-flux lines, we modulate the SQUIDs with two tones of equal frequency, close to 2 ω 1 . We observe photon generation, at ω 1 , above a certain pump amplitude threshold. By varying the relative phase of the two pumps we are able to control this threshold, in good agreement with a theoretical model. At the same time, some of our observations deviate from the theoretical predictions, which we attribute to parasitic couplings resulting in current driving of the SQUIDs.

arXiv:1706.06821•Journal of Physics Conference Series•Mar 1, 2018•15 citations

Radio frequency bias current scheme for dc superconducting quantum interference device

Y. Zhang, Dongfeng He, N. Wolters +7 more

We have developed a radio frequency bias current scheme with reversal frequency up to 50 MHz for dc superconducting quantum interference devices (SQUIDs). The SQUID and the readout electronics, were connected via a quarter wavelength (/spl lambda//4) transmission line. This transmission line not only transported the SQUID signal, but also served as the resonant matching circuit. For a dc SQUID of inductance 115 pH (loop size 75/spl times/75 /spl mu/m/sup 2/), we measured a flux noise of 33 /spl mu//spl phi//sub 0///spl radic/Hz at 77 K in the flux locked loop configuration. The corner frequency of 1/f noise was less than 0.5 Hz.

IEEE Transactions on Applied Superconductivity•Jun 1, 1999•0 citations
Predictable frequency trimming of superconducting resonators at liquid-helium temperatures requires a tuning element whose usable range remains well defined despite screening currents and hysteresis. Here, we realize flux-controlled λ/4 coplanar-waveguide resonators terminated by two-junction DC superconducting quantum interference devices (SQUIDs) fabricated in a standard Nb/Al-AlOx/Nb multilayer process. Integrated on-chip flux-bias lines allow the resonant frequency to be controlled at 4.2 K. RF measurements show periodic frequency modulation with applied flux, with a maximum shift of δfr=8.63 MHz and a single-valued tuning interval of δfr0=2.85 MHz. Near half-integer flux quanta, the response exhibits hysteretic jumps caused by the finite SQUID loop inductance, so that the usable single-valued tuning interval is smaller than the full modulation range. We develop a semi-analytical model of the frequency–flux response, supported by numerical simulations and 3D electromagnetic extraction of the device parameters, which reproduces the measured hysteretic branches and identifies the SQUID loop inductance and junction critical current as the main parameters limiting the usable tuning range. These results provide a quantitative design framework for MHz-scale frequency trimming of Nb superconducting resonators in 4 K cryogenic readout circuits.
We demonstrate the efficient modulation of flux-tunable superconducting resonators (FTRs) using flip-chip or on-chip-based input coils. The FTRs we use are aluminum-based quarter-wave coplanar waveguide resonators terminated with 100um or 200um-wide square loop dc superconducting quantum interference devices (SQUIDs) employing 1um-sized Josephson junctions. We employ SQUIDs with a geometric loop inductance of up to 0.7nH to increase the flux transfer efficiency. The geometric inductance of the SQUID results in a non-zero screening parameter βLβ_LβL​, whose branch switching effect is mitigated by using asymmetric junctions. We achieve flux modulation of the FTRs by more than one GHz and flux responsivities of up to tens of GHz/Φ0Φ_0Φ0​ with uA-scale on-chip currents. We compare flip-chip with on-chip input-coil-based flux modulation, where the former is realized through galvanically connected and closely spaced chips, while the latter is achieved through superconducting air-bridge connections. We achieve a flux-transfer efficiency from the input coil to the SQUID loop of up to 20%. Our work paves the way for efficient low current flux modulation of FTRs and sensitive measurement of flux signals.
We present a design and implementation of a frequency-tunable superconducting resonator. The resonance frequency tunability is achieved by flux-coupling a superconducting LC loop to a current-biased feedline; the resulting screening current leads to a change of the kinetic inductance and shift in the resonance frequency. The thin-film aluminum resonator consists of an interdigitated capacitor and thin line inductors forming a closed superconducting loop. The magnetic flux from the nearby niobium current feedline induces Meissner shielding currents in the resonator loop leading to a change in the kinetic part of the total inductance of the resonator. We demonstrate continuous frequency tuning within 160 MHz around the resonant frequency of 2.7 GHz. We show that: (1) frequency up-conversion is achieved when a kilohertz ac modulation signal is superimposed onto the dc bias resulting in sidebands to the resonator tone; (2) three-wave mixing is attained by parametrically pumping the nonlinear kinetic inductance using a strong rf pump signal in the feedline. The simple architecture is amenable to large-array multiplexing and on-chip integration with other circuit components. The concept could be applied in flux magnetometers, up-converters, and parametric amplifiers operating above 4 K when alternative high-critical-temperature material with high kinetic inductance is used.
Abstract Here we consider a tunable superconducting cavity that can be used either as a tunable coupler to a qubit inside the cavity or as a tunable low noise, low temperature, RF filter. Our design consists of an array of radio-frequency superconducting quantum interference devices (rf SQUIDs) inside a superconducting cavity. This forms a tunable metamaterial structure which couples to the cavity through its magnetic plasma frequency. By tuning the resonant frequency of the metamaterial through an applied magnetic flux, one can tune the cavity mode profile. This allows us to detune the cavity initially centered at 5.593 GHz by over 200 MHz. The maximum quality factor approaches that of the empty cavity, which is 4.5 × 106. The metamaterial electromagnetic response is controlled via a low-frequency or dc magnetic flux bias, and we present a control line architecture that is capable of applying sufficient magnetic flux bias with minimal parasitic coupling. Together this design allows for an in-situ tunable cavity which enables low-temperature quantum control applications.
Superconducting microwave circuits with and without Josephson inductances are the Swiss Army knife for many experiments and technologies from quantum information science to astrophysical particle detectors. Despite a large variety of existing circuit types, thin film materials and Josephson junction technologies, a flexible and reliable platform for high-magnetic-field and high-temperature applications is yet to be found. In this manuscript, we investigate coplanar waveguide cavities made of the high-temperature cuprate superconductor YBa2_22​Cu3_33​O7_77​ (YBCO), integrated with Josephson inductances and quantum interferometers that are generated by the controlled local irradiation of the YBCO with a focused helium ion beam. We obtain strongly flux-tunable microwave resonators, which not only display periodic interferometer oscillations of resonance frequency and decay rate, but also a superimposed Fraunhofer-like modulation pattern. The latter originates from the magnetic field tuning of the individual Josephson junction critical currents due to the out-of-plane junction barriers. It allows adjusting resonance frequency and flux responsivity independently of each other, potentially enabling tunable microwave circuits with low sensitivity to external magnetic-field noise over a broad range of frequencies. Finally, we investigate the temperature dependence of the cavities, show that they have promising characteristics up to 14 \,K, and present a model for the junction-induced cavity losses.
We have created a doubly tunable resonator, with the intention to simulate relativistic motion of the resonator boundaries in real space. Our device is a superconducting coplanar-waveguide microwave resonator, with fundamental resonant frequency ω 1 / (2 π ) ~ 5 GHz. Both of its ends are terminated to ground via dc-SQUIDs, which serve as magnetic-flux-controlled inductances. Applying a flux to either SQUID allows the tuning of ω 1 / (2 π ) by approximately 700 MHz. Using two separate on-chip magnetic-flux lines, we modulate the SQUIDs with two tones of equal frequency, close to 2 ω 1 . We observe photon generation, at ω 1 , above a certain pump amplitude threshold. By varying the relative phase of the two pumps we are able to control this threshold, in good agreement with a theoretical model. At the same time, some of our observations deviate from the theoretical predictions, which we attribute to parasitic couplings resulting in current driving of the SQUIDs.
We have developed a radio frequency bias current scheme with reversal frequency up to 50 MHz for dc superconducting quantum interference devices (SQUIDs). The SQUID and the readout electronics, were connected via a quarter wavelength (/spl lambda//4) transmission line. This transmission line not only transported the SQUID signal, but also served as the resonant matching circuit. For a dc SQUID of inductance 115 pH (loop size 75/spl times/75 /spl mu/m/sup 2/), we measured a flux noise of 33 /spl mu//spl phi//sub 0///spl radic/Hz at 77 K in the flux locked loop configuration. The corner frequency of 1/f noise was less than 0.5 Hz.