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Science China Physics Mechanics and Astronomy

Chip-scale quantum magnetometer empowered by reflector-integrated all-in-one atomic vapor cell

Yintao Ma, Yuehua Chen, Mingzhi Yu, Yanbin Wang, Ju Feng Guo, Ping Yang, Qijing Lin, Yang Lv, Xiaowei Hou, Libo Zhao

Published Jan 4, 2026• 7 citations
Publisher
DOI
10.1007/s11433-025-2802-7

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We investigate the architecture of microfabricated vapor cells with reflective sidewalls for applications in chip scale atomic sensors. The optical configuration in operation is suitable for both one-beam and two-beam (pump & probe) schemes. In the miniaturized vapor cells, the laser beam is reflected twice by the aluminum reflectors on the wet etched 54.7° sidewalls to prolong the optical length significantly, thus resulting in a return reflectance that is three times that of bare silicon sidewalls. To avoid limitations faced in the fabrication process, a simpler, more universal and less constrained fabrication process of microfabricated vapor cells for chip scale atomic sensors with uncompromised performance is implemented, which also decreases the fabrication costs and procedures. Characterization measurements show that with effective sidewall reflectors, mm³ level volume and feasible hermeticity, the elongated miniature vapor cells demonstrate a linear absorption contrast improvement by 10 times over the conventional micro-electro-mechanical system (MEMS) vapor cells at ~50 °C in the rubidium D1 absorption spectroscopy experiments. At the operating temperature of ~90 °C for chip scale atomic sensors, a 50% linear absorption contrast enhancement is obtained with the reflective cell architecture. This leads to a potential improvement in the clock stability and magnetometer sensitivity. Besides, the coherent population trapping spectroscopy is applied to characterize the microfabricated vacuum cells with 46.3 kHz linewidth in the through cell configuration, demonstrating the effectiveness in chip scale atomic sensors.
The designs of microfabricated alkali vapor cells play an important role when the atomic magnetometers are developing toward on-chip integration. This paper presents microfabricated spherical alkali vapor cells with improved sensitivity for chip-scale atomic magnetometers. A microfabricated spherical rubidium vapor cell and a traditional microfabricated planar rubidium vapor cell are designed for comparison, which are of the same volume and interconnected by a microchannel to acquire equal inner buffer gas pressure. In chip-scale spin-exchange relaxation-free (SERF) atomic magnetometers, the rubidium polarization lifetimes of three pairs of spherical and planar vapor cells at different buffer gas pressures of 0.35, 0.73, and 2.00 amg are measured, respectively. The sensitivity of SERF atomic magnetometers using the vapor cells at a 0.35-amg buffer gas pressure is also measured. The results show that the transverse polarization lifetime of the spherical vapor cell is 2.46, 1.44, and 1.05 times that of the planar one at 0.35-, 0.73-, and 2.00-amg buffer gas pressures, respectively. Combining the improved polarization lifetime and increased optical path length, chip-scale SERF atomic magnetometer using the microspherical vapor cell has the sensitivity of 60 fT/Hz1/2from 5 to 15 Hz, while that based on the planar one is demonstrated with the sensitivity of 400 fT/Hz1/2from 5 to 15 Hz.
Wafer-level integration of micro heater on an alkali vapor cell for chip-scale SERF magnetometers is presented. In order to obtain a suitable resistivity, polysilicon and aluminum are mixed as the target material. Magnetron sputtering is adopted to fabricate the heater on the surface of the alkali vapor cell. Various voltages are applied to the heater, of which the temperatures are measured by thermal sensitive sensors. Spin exchange relaxation free (SERF) atomic magnetometer with the heater integrated on the alkali vapor cell is characterized. Results show that the micro heater is successfully integrated on the alkali vapor cell. With the integrated heater, the rubidium vapor cell is heated up to 120°C by a 445kHz AC current. The sensitivity of the SERF magnetometer is 6.3pT/Hz1/2. Results also indicate that it provides an effective and low-cost solution for the miniaturization of atomic magnetometers.