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Photonics with color centers in thin-film 4H-silicon carbide for quantum technology applications

Jonathan Körber

Published Jan 1, 2025• 0 citations
Publisher
DOI
10.18419/opus-17591

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quant-pharXiv:2601.08945•Physical Review Applied•Jan 15, 2026•0 citations
An outstanding challenge for color center-based quantum information processing technologies is the integration of optically-coherent emitters into scalable thin-film photonics. Here, we report on the integration of near-transform-limited silicon vacancy (VSi_{\text{Si}}Si​) defects into microdisk resonators fabricated in a CMOS-compatible 4H-Silicon Carbide-on-Insulator platform. We demonstrate a single-emitter cooperativity of up to 0.8 as well as optical superradiance from a pair of color centers coupled to the same cavity mode. We investigate the effect of multimode interference on the photon scattering dynamics from this multi-emitter cavity quantum electrodynamics system. These results are crucial for the development of quantum networks in silicon carbide and bridge the classical-quantum photonics gap by uniting optically-coherent spin defects with wafer-scalable, state-of-the-art photonics.
Engineering the photonic interface with spins in color centers, such as the $N\phantom{\rule{0}{0ex}}V$ center in diamond or the neutral divacancy in silicon carbide, is crucial for applications in quantum communication and precision sensing. Exploiting SiC's compatibility with conventional thin-film fabrication, the authors use on-chip nanoscale photonic crystal cavities to dramatically enhance the measurement of the spin and optical properties of color-center ensembles. These results bring us a step closer to realizing scaled-up defect-based quantum technologies.
This work presents an industrially scalable, power-efficient and high-performance quantum magnetometer chip based on proprietary 4H-silicon carbide (SiC) technology, leveraging wafer-scale fabrication techniques to optimize V2 silicon vacancy color centers for highly reproducible, industry-grade fabrication with precise control of depth and density. The integration of these color center ensembles into a planar silicon carbide waveguide enables efficient excitation of a large ensemble and simplifies fluorescence extraction compared to standard confocal methods. We report continuous-wave (CW) optically detected magnetic resonance measurements, complemented by Rabi, Ramsey, and Hahn-echo sequences, which demonstrate coherent capabilities of the large embedded ensemble of V2 centers. Based on the data, our device exhibits sensor shot-noise limited sensitivities 2-3 orders of magnitude lower compared to more complex confocal techniques. Collectively, these advancements simplify the quantum sensor architecture, enhance sensitivity, and streamline optical excitation and collection, thereby paving the way for the development of next-generation SiC-quantum sensing technologies.