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Process Optimization and Formation Mechanism of Nitrogen-Vacancy Centers in Diamond Fabricated by Microwave Plasma Chemical Vapor Deposition

Tengfei Lu, Qijun Wang, Tian Min Shao, Jiajun Xu, Diwei Zou, Wei Shen, Gai Wu

Published Jan 1, 2025• 0 citations
Publisher
DOI
10.2139/ssrn.5932786

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Group IV color centers in diamond are promising single-photon emitters for quantum information processing and networking. Among them, the tin-vacancy (SnV) center stands out due to its long spin coherence times at cryogenic temperatures above 1 K. While SnV centers have been realized using various fabrication routes, their in situ formation via microwave plasma-enhanced chemical vapor deposition (MW PE CVD) remains relatively unexplored. In this study, SnV centers, identified by a zero-phonon line (ZPL) near 620 nm, were synthesized in nanocrystalline diamond and free-standing microcrystalline diamond using tin oxide (SnO 2 ) as a dopant source at substrate temperatures of 750°C and 850°C. Photoluminescence measurements reveal that lowering the substrate temperature enhances both the ZPL intensity and spatial uniformity of SnV centers. These results highlight substrate temperature as a key parameter for controlling SnV incorporation during MW PE CVD growth and provide insights into optimizing fabrication strategies for diamond-based quantum technologies.
We demonstrate the coupling of single color centers in diamond to plasmonic and dielectric photonic structures to realize novel nanophotonic devices. Nanometer spatial control in the creation of single color centers in diamond is achieved by implantation of nitrogen atoms through high-aspect-ratio channels in a mica mask. Enhanced broadband single-photon emission is demonstrated by coupling nitrogen-vacancy centers to plasmonic resonators, such as metallic nanoantennas. Improved photon-collection efficiency and directed emission is demonstrated by solid immersion lenses and micropillar cavities. Thereafter, the coupling of diamond nanocrystals to the guided modes of micropillar resonators is discussed along with experimental results. Finally, we present a gas-phase-doping approach to incorporate color centers based on nickel and tungsten, in situ into diamond using microwave-plasma-enhanced chemical vapor deposition. The fabrication of silicon-vacancy centers in nanodiamonds by microwave-plasma-enhanced chemical vapor deposition is discussed in addition.
The nitrogen-vacancy (NV) color center in diamond has emerged as a promising candidate for quantum sensing. In this study, we propose a diamond-embedded metal antenna for magnetic detection utilizing NV center ensembles. Our approach involved employing nanofabrication and microwave plasma chemical vapor deposition techniques to fabricate the metal antenna and diamond epilayer. By directly embedding the antenna into the diamond, we effectively minimize external environmental interference, leading to improved device stability and reusability. Moreover, this integration enhances the device's compactness, making it highly suitable for on-chip quantum sensing applications. The innovative antenna design holds great potential for the development of future integrated quantum sensing devices based on NV centers in diamond.