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Superconducting Single-Photon Detectors on Lithium Niobate-on-Insulator

Christian Schmid, Fabian Wietschorke, Lucio Zugliani, Stefanie Grotowski, Stefan Strohauer, Matthias Althammer, Rudolf Groß, Jonathan James Finley, Kai Müller

Published Jan 1, 2025• 0 citations
Publisher

Abstract

We improve the performance of superconducting single-photon detectors on lithium niobite-on-insulator by determining the influence of deposition conditions and substrates on the properties of sputtered NbTiN thin film and of nanowires made from them.
DOI
10.1364/cleo_at.2025.jps100_145

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We demonstrate waveguide-integrated superconducting nanowire single-photon detectors on thin-film lithium niobate (LN). Using a 250 um-long NbN superconducting nanowire lithographically defined on top of a 125 um-long LN nanowaveguide, on-chip detection efficiency of 46% is realized with simultaneous high performance in dark count rate and timing jitter. As LN possesses high second-order nonlinear \c{hi}(2) and electro-optic properties, an efficient single-photon detector on thin-film LN opens up the possibility to construct small scale fully-integrated quantum photonic chip which includes single-photon sources, filters, tunable quantum gates and detectors.
We demonstrate waveguide-integrated superconducting nanowire single-photon detectors on thin-film lithium niobate (LiNbO3, LN). Using a 250 μm-long NbN superconducting nanowire lithographically defined on top of a 125 μm-long LN nanowaveguide, an on-chip detection efficiency of 46% is realized with simultaneous high performance in dark count rates and timing jitter. As LN possesses high χ(2) second-order nonlinear and electro-optic properties, an efficient single-photon detector on thin-film LN opens up the possibility to construct a small-scale fully integrated quantum photonic chip, which includes single-photon sources, filters, tunable quantum gates, and detectors.
Lithium niobate-on-insulator (LNOI) is an emerging photonic platform with high potential for scalable quantum information processing due to its strong second-order nonlinearity. However, little progress has been made in developing on-chip single-photon detectors on LNOI. Niobium tita nium nitride (NbTiN) superconducting nanowire single-photon detectors (SNSPDs) are a promising candidate for this application. In this work, we use DC reactive magnetron sputtering to grow high quality NbTiN thin films using an ultra-high vacuum deposition system with a base pressure lower than 2×10‾¹⁰ mbar. Enabled by the low concentration of background impurities in this system, we investigate the impact of substrate temperature during NbTiN growth. We achieve four nm thick superconducting films with a critical temperature (Tc) of 12.3 K grown at a substrate temperature of 825 K. We find that the NbTiN films grow in the (111) orientation and evolve from a porous pillar structure when grown at low temperatures to densely packed fibrous grains at higher temper atures. Furthermore, we demonstrate that the increased substrate temperature reduces the oxygen concentration in our films and improves the overall stoichiometry. In addition, we integrate these films with the LNOI platform and investigate the obtained interface quality. Lastly, we fabricate SNSPDs from the NbTiN film on LNOI and characterize the detector performance.
Here, we demonstrate waveguide-integrated superconducting nanowire single-photon detectors on thin-film lithium niobate (LiNbO3, LN). Using a 250 μm-long NbN superconducting nanowire lithographically defined on top of a 125 μm-long LN nanowaveguide, an on-chip detection efficiency of 46% is realized with simultaneous high performance in dark count rates and timing jitter. As LN possesses high χ(2) second-order nonlinear and electro-optic properties, an efficient single-photon detector on thin-film LN opens up the possibility to construct a small-scale fully integrated quantum photonic chip, which includes single-photon sources, filters, tunable quantum gates, and detectors.
We demonstrate an amorphous molybdenum–rhenium (MoRe) film on a thin-film lithium niobate substrate as an efficient superconducting nanowire single-photon detector (SNSPD) operating at T = 2.5 K. MoRe films were deposited by DC magnetron sputtering with a composite target of 56 at. % Mo and 44 at. % Re on lithium niobate on insulator substrates at room temperature. We investigated the spectral and temporal performance of MoRe SNSPDs as well as the detection regimes of one and multiple photons. The fabricated detector with a nanowire width of about 150 nm shows an internal detection efficiency of approximately 98% and 73.5% for the most crucial wavelengths for integration on the chip, 780 and 1550 nm, respectively. Our results show great potential for the use of MoRe for scalable and cryogenic tunable quantum photonic integrated circuits.