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Journal of Low Temperature Physics

Array of Optical Transition-Edge Sensors Fabricated by Ion-Milling Process Evaluated with Microwave Multiplexer for 100 or More Sensors

Takahiro Kikuchi, Takeshi Jodoi, Nao Kominato, Ryota Hayakawa, Tetsuya Tsuruta, Go Fujii, K. Hattori, Daiji Fukuda, Fuminori Hirayama, Akira Sato

Published Aug 19, 2025• 2 citations
Publisher
DOI
10.1007/s10909-025-03324-0

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IEEE Transactions on Applied Superconductivity•Jan 14, 2026•2 citations
Superconducting transition-edge sensors (TESs) are highly sensitive detectors and can detect electromagnetic wave radiations from millimeter/submillimeter, optical to 𝑥/γrays, suitable for cosmology, astrophysics, quantum information, and biosensing. In principle, thousands of TESs even more are required to enhance the detection efficiency for large-scale survey. Among other multiplexing schemes, microwave SQUID multiplexer (μMUX), consisting of resonators and RF SQUIDs, has a bandwidth of several GHz, thus multiplexing factor on the order of thousands, more suitable for readout of large TES arrays. We designed and fabricated superconducting coplanar waveguide (CPW) resonators with a high qualityfactor and second-order gradient RF SQUID with two inductive coupling structures respectively. Then, we optimized the critical current density of the Josephson junction and measured the mutual inductance parameters of the second-order gradient structure SQUID, which are consistent with the simulation results. Finally, we fabricated a cryogenic μMUX chip based on RF SQUID and resonator. We discussed the results of the development of μMUX in more detail.
Superconducting transition-edge sensors (TESs) with high sensitivity can detect electromagnetic wave radiations from millimeter/submillimeter, optical to x/γ rays, and have been successfully used in many fields. To improve detection efficiency and sensitivity, large-scale TES arrays are required in combination with multiplexing readout electronics. Compared to other multiplexing schemes, microwave SQUID multiplexing (μMUX), consisting of high-quality microwave superconducting resonators and RF SQUIDs, is most suitable since it provides a wider bandwidth (GHz) and consequently higher multiplexing factor. We designed two types of circuits with different mutual inductances (MT) between the resonator and the RF SQUID: 2.3 pH for the weak-coupling channel and 6.5 pH for the strong- coupling channel. The resonator and RF SQUID washers made of 150 nm Nb are first fabricated by magnetron-sputtering and reactive ion etching (RIE), followed by deposition of Nb/Al-AlOx/Nb trilayer and definition of the Josephson junctions of the RF SQUIDs. This work presents a μMUX demonstration chip with five channels with Q1values of 787 and 3626, and the measured frequency shifts (Δfpp) of ∼500 kHz and 4 MHz for the weak- and strong-coupling channels, respectively. The open-loop equivalent noise current, obtained from the measured phase noise and resonator responsivity, is ∼80 pA/ √Hz with the strong-coupling channel.