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Optics Express

Alignment-tolerant hybrid integration of a diamond quantum sensor on a silicon nitride photonic waveguide

Kosuke Takada, Ryota Katsumi, Kenta Kawai, Daichi Sato, Takashi Yatsui

Published Apr 11, 2025• 5 citations
Publisher

Abstract

Hybrid-integrated photonic circuits play a crucial role in recent quantum technologies. However, deterministic and alignment-tolerant methods are still lacking, and their development is crucial for accelerating the scalable fabrication of quantum systems. In this study, we demonstrate alignment-tolerant coupling between diamond and silicon nitride waveguides using the deterministic transfer-printing method. To validate this approach, we also demonstrate the capability of on-chip quantum sensing using nitrogen vacancy centers in diamond waveguides. These results pave the way for compact packaging of highly sensitive quantum sensors based on photonic integrated circuits.

DOI
10.1364/oe.559486

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Hybrid-integrated photonic circuits play a crucial role in recent quantum technologies. However, deterministic and alignment-tolerant methods are still lacking, and their development is crucial for accelerating the scalable fabrication of quantum systems. In this study, we demonstrate alignment-tolerant coupling between diamond and silicon nitride waveguides using the deterministic transfer-printing method. To validate this approach, we also demonstrate the capability of on-chip quantum sensing using nitrogen vacancy centers in diamond waveguides. These results pave the way for compact packaging of highly sensitive quantum sensors based on photonic integrated circuits.
Diamond has emerged as a leading host material for solid-state quantum emitters, quantum memories, and quantum sensors. However, the challenges in fabricating photonic devices in diamond have limited its potential for use in quantum technologies. While various hybrid integration approaches have been developed for coupling diamond color centers with photonic devices defined in a heterogeneous material, these methods suffer from either large insertion loss at the material interface or evanescent light-matter coupling. Here, we present a new technique that enables the deterministic assembly of diamond color centers in a silicon nitride photonic circuit. Using this technique, we observe Purcell enhancement of silicon vacancy centers coupled to a silicon nitride ring resonator. Our hybrid integration approach has the potential for achieving the maximum possible light-matter interaction strength while maintaining low insertion loss and paves the way toward scalable manufacturing of large-scale quantum photonic circuits integrated with high-quality quantum emitters and spins.
Diamond's nitrogen vacancy (NV) center is an optically active defect with long spin coherence times, showing great potential for both efficient nanoscale magnetometry and quantum information processing schemes. Recently, both the formation of buried 3D optical waveguides and high-quality single NVs in diamond were demonstrated using the versatile femtosecond laser-writing technique. However, until now, combining these technologies has been an outstanding challenge. In this Letter, we fabricate laser-written photonic waveguides in quantum grade diamond which are aligned to within micron resolution to single laser-written NVs, enabling an integrated platform providing deterministically positioned waveguide-coupled NVs. This fabrication technology opens the way toward on-chip optical routing of single photons between NVs and optically integrated spin-based sensing.
Diamond's nitrogen vacancy (NV) center is an optically active defect with long spin coherence times, showing potential for efficient nanoscale magnetometry and entanglement schemes. Recently, both the formation of buried 3D optical waveguides and high quality single NVs in diamond were demonstrated using femtosecond laser-writing. However, until now, combining these technologies has been an outstanding challenge. In this work, we fabricate laser-written photonic circuits in diamond aligned within micron resolution to single laser-written NVs, enabling an integrated platform providing deterministically positioned waveguide-coupled NVs. This fabrication technology opens the way towards on-chip optical routing of single photons between NVs and optically integrated spin-based magnetometry.
Quantum sensors have the potential to transform numerous applications across a broad range of fields from precision timing to electro-magnetic field sensing, medical imaging, gravimetry, to inertial sensing. Despite promising performances in laboratory experiments, quantum sensors have yet to be widely deployed in real-world applications at large scale. The large-scale adoption of quantum sensors has been hampered by the high SWaP-c and their sensitivity to environmental factors. Photonic integrated circuits have emerged as an enabling technology for quantum sensors to reduce SWaP-c, enhance fieldability, and add enhanced functionality. Honeywell has developed state-of-the-art capabilities in Silicon Nitride (SiN) and other photonics platforms, to enable low-swap quantum sensors ranging from atomic clocks, Rydberg electromagnetic field sensors, and NV diamond magnetometers among others. In this talk we will give an overview of how Honeywell is using photonic integrated circuits to enable a variety of quantum sensing and timing technologies for aerospace applications. Low-loss SiN waveguides can be used to deliver light to the quantum system in a compact form factor, produce high Q-optical cavities for narrow-linewidth lasers, tunably filter frequency components, or to generate optical combs. Mode-matched edge couplers can efficiently transfer light from fiberto- chip or chip-to-chip. Other photonic platforms such as diamond or thin-film lithium niobate (TFLN) can be integrated with a SiN platform in either hybrid or heterogenous configurations to enable quantum magnetometry and laser frequency tuning or modulation in ultra-compact form factors. We will discuss the advantages and remaining challenges for using photonic integrated circuits to advance quantum sensors to the point where they can be adopted in mainstream applications.
Negatively charged nitrogen-vacancy (NV) centers in diamond have emerged as promising candidates for a wide range of quantum applications, especially quantum sensing of magnetic field. Implementation of nanostructure into diamond is powerful for efficient photon collection of NV centers and chip-scale miniaturization of the device, which is crucial for sensitive and practical diamond magnetometers. However, fabrication of the diamond nanostructure involves technical limitations and can degrade the spin coherence of the NV centers. In this study, we demonstrate the hybrid integration of a silicon nitride grating structure on a single-crystal diamond by utilizing transfer printing. This approach allows the implementation of the nanostructure in diamond using a simple pick-and-place assembly, facilitating diamond-based quantum applications without any complicated diamond nanofabrication. We observed the intensity enhancement in the collected NV emissions both theoretically and experimentally using the integrated grating structure. By applying the increased photon intensity, we demonstrate the improved magnetic sensitivity of the fabricated device. The proposed hybrid integration approach will offer a promising route toward a compact and sensitive diamond NV-based magnetometer.