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IEICE Transactions on Electronics

Ferromagnetic π Junctions on Niobium Four-Layer Structure for Superconductor Large-Scale Integrated Circuits

Akira Fujimaki, Daiki Hasegawa, Yuto Takeshita, Feng Li, Taro Yamashita, Masamitsu Tanaka

Published Feb 4, 2025• 1 citation
Publisher

Abstract

We report a hybrid fabrication process for superconductor large-scale integrated circuits (ICs) with ferromagnetic π-shifted Josephson junctions (π junctions) and conventional 0 junctions. π junctions have a Nb/PdNi/Nb sandwich structure and are formed on the reliable Nb four-layer structure used for Nb/AlOx/Nb 0-junction-based ICs. The additional process for making π junctions causes little damage to the 0 junctions. The π phase shift for the superconducting macroscopic wave function is confirmed by forming 0-0-π SQUIDs that have two 0 junctions and one π junction in a superconducting loop. The π junction serves as the π phase shifter because the critical currents of the π junctions are much larger than those of the 0 junctions. The modulation patterns of the 0-0-π SQUIDs show a clear shift by the magnetic field corresponding to the half flux quantum (HFQ). The critical currents of the 0-0-π SQUIDs without fields, which are referred to as the nominal critical currents, are reduced depending on the product of the loop inductance and the critical current of the 0 junction. The nominal critical current reaches 1/5 of the critical current of the single 0 junction. The small values of the nominal critical currents contribute to the reduction of the power consumption in the HFQ circuit directly.

DOI
10.1587/transele.2024sep0002

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We report a hybrid fabrication process for superconductor large-scale integrated circuits (ICs) with ferromagnetic π-shifted Josephson junctions (π junctions) and conventional 0 junctions. π junctions have a Nb/PdNi/Nb sandwich structure and are formed on the reliable Nb four-layer structure used for Nb/AlOx/Nb 0-junction-based ICs. The additional process for making π junctions causes little damage to the 0 junctions. The π phase shift for the superconducting macroscopic wave function is confirmed by forming 0-0-π SQUIDs that have two 0 junctions and one π junction in a superconducting loop. The π junction serves as the π phase shifter because the critical currents of the π junctions are much larger than those of the 0 junctions. The modulation patterns of the 0-0-π SQUIDs show a clear shift by the magnetic field corresponding to the half flux quantum (HFQ). The critical currents of the 0-0-π SQUIDs without fields, which are referred to as the nominal critical currents, are reduced depending on the product of the loop inductance and the critical current of the 0 junction. The nominal critical current reaches 1/5 of the critical current of the single 0 junction. The small values of the nominal critical currents contribute to the reduction of the power consumption in the HFQ circuit directly.
We successfully fabricated magnetic Josephson junctions integrated on a Nb four-layer superconducting structure for demonstrating half flux quantum (HFQ) circuits. In the developed process, we adopted a 0-0-π SQUID instead of the 0-π SQUID as the basic element of the HFQ circuits. In this work, we characterized the Nb/PdNi/Nb magnetic Josephson junctions on the Nb four-layer structures fabricated by two different processes. We measured the I-V characteristics of junctions in liquid helium at 4.2 K. The results showed that the fabricated junctions had properties comparable to conventional ones on Si wafers.
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We report on low-power operation of the half-flux-quantum (HFQ) shift-register circuit. We used a superconducting quantum interference device composed of two conventional switching junctions (0-junctions) and one π-shifted non-switching magnetic Josephson junction (π-junction) as a switching element, called 0-0-π SQUID. Because the π-shift assists switching by inducing a spontaneous current, the 0-0-π SQUID shows a nominal small critical current value and is easily switched by a weak driving force. This feature allows us to significantly reduce static and dynamic power consumption at junctions and bias-feeding resistors. We carefully designed the HFQ circuit elements using a circuit parameter optimization tool and introducing additional non-switching 0-0-π SQUIDs to compensate for superconductor phase shifts. We fabricated the test circuit of the 4-bit shift-register by forming Nb/PdNi/Nb π-junctions on the Nb four-layer, 10-kA/cm2 device. We successfully obtained correct operation with measured power consumption of 0.12-0.18 μW/bit, which was about 1/10 of the conventional single-flux-quantum shift-register designed with the 0-junctions of the same critical currents and the standard bias voltage.
Half-flux-quantum (HFQ) logic is a superconductor logic family comprising conventional Josephson junctions (0-JJs) and π Josephson junctions (π-JJs). The energy scale of HFQ logic can be flexibly reduced by phase shifts owing to π-JJs; thus, HFQ circuits are a promising building block for qubit interface circuits. In this study, we demonstrate an NbN-based HFQ circuit element compatible with NbN-based superconducting qubits for all-NbN monolithic integration of qubits and HFQ circuits. The use of NbN is beneficial for both qubits and HFQ circuits owing to its high-quality junctions and high kinetic inductance. First, we developed a prototype of an NbN-based 0-JJ/π-JJ hybrid fabrication process for designing HFQ circuits. We evaluated 0-JJs and π-JJs fabricated through the hybrid process, which demonstrated that the 0-JJs had a small deviation with regard to critical current density and the π-JJs had a sufficiently high critical current density to work as π phase shifters. Furthermore, we fabricated an HFQ superconducting quantum interference device, which is one of the most fundamental elements in HFQ circuits, and observed clear HFQ-period modulation in the magnetic flux dependence of the maximum current at 4.2 K.
We describe fabrication and testing of composite flux qubits combining Nb- and Al-based superconducting circuit technology. This hybrid approach to making qubits allows for employing π -phase shifters fabricated using well-established Nb-based technology of superconductor–ferromagnet–superconductor Josephson junctions. The important feature here is to obtain high interface transparency between Nb and Al layers without degrading sub-micron shadow mask. We achieve this by in situ Ar etching using e-beam gun. Shadow-evaporated Al/AlO x /Al Josephson junctions with Nb bias pads show the expected current–voltage characteristics with reproducible critical currents. Using this technique, we fabricated composite Nb/Al flux qubits with Nb/CuNi/Nb π -shifters and measured their magnetic field response. The observed offset between the field responses of the qubits with and without π -junction is attributed to the π phase shift. The reported approach can be used for implementing a variety of hybrid Nb/Al superconducting quantum circuits.
Abstract We directly observed π-leaps of superconducting phase differences in π-junction-based superconducting quantum interference devices (SQUIDs). The SQUIDs studied here are formed by introducing a π-junction to a conventional-junction (0-junction)-based direct current (DC)-SQUID, which is referred to as the 0-0-π SQUID. Either clockwise or counter-clockwise-circulating currents flow spontaneously in the 0-0-π SQUID because of a π-phase shift of the π-junction. In other words, the 0-0-π SQUID has a bistable state corresponding to the directions of circulating currents. π-leaps are generated by transiting between the two states of the bistable state. π-leaps are an ultra-fast phenomenon and are difficult to observe as they are. We prepared a half-flux quantum (HFQ)-SQUID that comprised two 0-0-π SQUIDs. π-leaps are reflected in a static characteristic, that is, a modulation pattern of the critical current in the HFQ-SQUID. We formed π-junctions with the PdNi layer on 0-junction-based circuits supplied by the National Institute of Advanced Industrial Science and Technology. The modulation pattern of the HFQ-SQUID had a period corresponding to π-leaps as expected, although some microstructures were observed. We demonstrated that the microstructures originated from the asymmetry inside each 0-0-π SQUID by analyzing the relationship between the phase change of 0-0-π SQUIDs and the modulation patterns.