We present the development of a high-power ultraviolet laser system operating at a wavelength of 325 nm for Rydberg excitation from the
3P2 state of ytterbium. Utilizing a two-stage frequency doubling scheme, we achieved an output power exceeding 800 mW. The system effectively suppresses frequency noise in the MHz range, which is critical for achieving high Rydberg excitation fidelity, through the use of a filtering cavity. Using this system, we demonstrated coherent excitation of the
(6s71s)3S1 Rydberg state with a Rabi frequency of 2.13(3) MHz. Combined with our successful manipulations on the
1S0−3P2 transition, this work represents a foundational step toward achieving high-fidelity Rydberg excitation, enabling advancements in quantum simulation and computing with neutral atom arrays.