In recent years, with the high attention of various technological powers and giants, superconducting quantum computing technology has developed rapidly. In less than 10 years, the decoherence time of a single superconducting qubit has increased by 5 orders of magnitude, from nanoseconds to hundreds of microseconds, and is expected to increase to millisecond or even second levels. The preparation of superconducting qubit chips is the foundation for achieving superconducting quantum computing. As the sixth article in the “Introduction to Physical Frontiers—Superconducting Quantum Computing” series, this article systematically elaborates on the micro-fabrication methods for preparing superconducting qubits and co-auxiliary device chips, and looks forward to the development trend of fabrication methods. Through this article, the aim is to help university physics teachers, senior undergraduate and graduate students, as well as readers with a background in science and engineering who are interested in superconducting quantum computing, systematically understand the micro-fabrication methods and processes for implementing superconducting qubit chips, and gain a comprehensive and practical understanding of superconducting quantum computing technology.
In recent years, with the high attention of various technological powers and giants, superconducting quantum computing technology has developed rapidly. In less than 10 years, the decoherence time of a single superconducting qubit has increased by 5 orders of magnitude, from nanoseconds to hundreds of microseconds, and is expected to increase to millisecond or even second levels. The preparation of superconducting qubit chips is the foundation for achieving superconducting quantum computing. As the sixth article in the “Introduction to Physical Frontiers—Superconducting Quantum Computing” series, this article systematically elaborates on the micro-fabrication methods for preparing superconducting qubits and co-auxiliary device chips, and looks forward to the development trend of fabrication methods. Through this article, the aim is to help university physics teachers, senior undergraduate and graduate students, as well as readers with a background in science and engineering who are interested in superconducting quantum computing, systematically understand the micro-fabrication methods and processes for implementing superconducting qubit chips, and gain a comprehensive and practical understanding of superconducting quantum computing technology.
Superconducting quantum circuits (SQCs), composed of superconducting capacitors, inductances, Josephson junctions, and transmission lines, exhibit macroscopic quantum effects at ultra-low temperatures. Due to the extremely low dissipation of superconductors, an important application of SQCs is superconducting qubits with long coherence time. Quantum computing based on superconducting qubits is a leading physical realization method of quantum computing, which is theoretically capable of accelerating many computational problems including quantum simulation, database searching, and optimization. In the long run, to use the power of quantum computing to its full extent, universal quantum computers should be constructed with quantum error correction. In the short term, one of the most pressing targets of the superconducting quantum computing community is to demonstrate quantum advantage using noisy intermediate-scale quantum chips. Both goals rely on the increasing of the number of coupled qubits in a quantum circuit and the quality of these qubits, which dictate the breadth and the depth of a problem it can solve, respectively. The fabrication of SQCs has adopted a few manufacturing processes from conventional integrated circuits. Quantum chips containing multiple superconducting qubits can be made and packaged on a large scale. “Quantum supremacy” has been demonstrated on a quantum chip with fifty-three qubits fabricated using the flip-chip bonding technology. However, to demonstrate quantum advantage, the quality and quantity of qubits need to increase simultaneously. Dissipative channels emerge in circuit design, material preparation, chip fabrication, and working environment, limiting the lifetime of superconducting qubits. For quantum chips with tens to hundreds of qubits, the integration will also introduce extra processing steps which may degrade the qubits, and unwanted coupling to loss channels. Most of these channels are microscopically related to materials constructing the quantum chips, chip surfaces, and material interfaces. Thus, it is important to investigate the material growth and device fabrication of SQCs, and to understand the material related loss mechanisms. This review paper investigates the material related topics in superconducting quantum circuits pertinent to the quantum computing application from a comprehensive perspective. The history of SQCs is briefly mentioned, followed by the peculiar characteristics as an engineerable quantum system, and a roadmap to quantum advantage and universal quantum computing in the next a few years. Technically, the superconducting quantum computer is compared to a Schrodinger’s cat, and can be boiled down into three parts, i.e., quantum chips, the environment, and the operating system, corresponding to the cat, the box, and the observer, respectively. The material related decoherence channels of the SQCs can be sorted into four categories; each will be discussed in details. To fabricate SQCs with minimal loss, the processing technologies are elaborated, including qubit design, material selection, surface treatments, film growth, and Josephson junction, etc. Though there are general guidelines that amorphous materials should be avoided and processing induced damage should be minimized, more is to be investigated due to the emerging of new materials and new fabrication methods. The last part presents the potential application of the superconducting quantum computer and its current state of play. SQC for quantum computing is a multi-discipline research topic, demanding joint efforts from different scientific and technical areas. Materials science and device processing will play important roles along the way to quantum practicality.
Over the past two decades significant advances have been made in the research of superconducting quantum computing and quantum simulation, in particular of the device design and fabrication that leads to ever-increasing superconducting qubit coherence times and scales. With Google’s announcement of the realization of “quantum supremacy”, superconducting quantum computing has attracted even more attention. Superconducting qubits are macroscopic objects with quantum properties such as quantized energy levels and quantum-state superposition and entanglement. Their quantum states can be precisely manipulated by tuning the magnetic flux, charge, and phase difference of the Josephson junctions with nonlinear inductance through electromagnetic pulse signals, thereby implementing the quantum information processing. They have advantages in many aspects and are expected to become the central part of universal quantum computing. Superconducting qubits and auxiliary devices prepared with niobium or other hard metals like tantalum as bottom layers of large-area components have unique properties and potentials for further development. In this paper the research work in this area is briefly reviewed, starting from the design and working principle of a variety of superconducting qubits, to the detailed procedures of substrate selection and pretreatment, film growth, pattern transfer, etching, and Josephson junction fabrication, and finally the practical superconducting qubit and their auxiliary device fabrications with niobium base layers are also presented. We aim to provide a clear overview for the fabrication process of these superconducting devices as well as an outlook for further device improvement and optimization in order to help establish a perspective for future progress.
Build quantum computers using superconducting qubits and microwave cavity technology Creating qubits with sufficiently long coherence times remains one of the central challenges in building practical quantum computers. Quantum Computing with Superconducting Qubits and Cavities unites the latest advances in superconducting qubits, ultra-high-Q microwave cavities, and cavity–transmon architectures that are emerging as one of the leading platforms for scalable, fault-tolerant quantum computing. By combining conceptual insight with practical implementation, the book equips readers to understand not only how these systems work, but why they are at the forefront of the quantum technology revolution. The book explores quantum computation using bosonic modes, Fock states, qudits, quantum memories, and modern bosonic error-correcting codes including cat, binomial, and GKP encodings. Fundamental concepts are developed through clear physical explanations, while rigorous mathematical treatments are introduced where needed to provide a deeper understanding. Dedicated reviews of the underlying principles of quantum physics make the material accessible to newcomers without sacrificing the depth expected by researchers and practicing engineers. Quantum Computing with Superconducting Qubits and Cavities also includes: Design principles and operation of superconducting transmon qubits integrated with high-coherence microwave cavities for scalable quantum architectures. Bosonic quantum error-correction strategies that dramatically extend coherence and move quantum computing closer to fault-tolerant operation. Applications of quantum computing, including integer factoring, database searching, quantum chemistry, condensed-matter physics, and materials science simulations beyond the reach of classical computers. Materials science, fabrication methods, and surface treatments that continue to drive record improvements in qubit and cavity coherence. The global race toward quantum computing, including major international investments and the rapidly expanding role of superconducting quantum technologies. Written for physicists, materials scientists, electrical engineers, computer scientists, graduate students, and researchers entering quantum information science, this book provides both the theoretical foundation and the practical knowledge needed to engage with one of the fastest-growing fields in modern science and engineering.
This chapter explores the evolution of superconducting qubits from traditional superconductors, tracing the scientific and technological milestones that have led to their central role in quantum computing. Beginning with an overview of superconductivity, the Josephson effect, qubits, and their types, the chapter highlights superconducting qubits with their theoretical implementation. It then transitions to the development of modern qubit architectures – charge, flux, and transmon qubits – emphasizing advances in material purity, fabrication, and coherence enhancement. Special focus is given to a short description of fabricating granular aluminum qubits for quantum engineering applications. The chapter concludes with current challenges, including decoherence mitigation, material scalability, and integration with hybrid quantum systems. This work aims to provide readers with a comprehensive understanding of the journey from conventional superconductors to quantum information devices.
Quantum computing offers a powerful new paradigm of information processing that has the potential to transform a wide range of industries. In the pursuit of the tantalizing promises of a universal quantum computer, a multitude of new knowledge and expertise has been developed, enabling the construction of novel quantum algorithms as well as increasingly robust quantum hardware. In particular, we have witnessed rapid progress in the circuit quantum electrodynamics (cQED) technology, which has emerged as one of the most promising physical systems that is capable of addressing the key challenges in realizing full-stack quantum computing on a large scale. In this article, we present some of the most crucial building blocks developed by the cQED community in recent years and a précis of the latest achievements towards robust universal quantum computation. More importantly, we aim to provide a synoptic outline of the core techniques that underlie most cQED experiments and offer a practical guide for a novice experimentalist to design, construct, and characterize their first quantum device