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Philosophical Transactions of the Royal Society A Mathematical Physical and Engineering Sciences

Nitrogen concentration control during diamond growth for NV − centre formation

Tokuyuki Teraji, Chikara Shinei, Y. MASUYAMA, Masashi Miyakawa, Takashi Taniguchi

Published Dec 3, 2023• 20 citations
Publisher

Abstract

Negatively charged nitrogen-vacancy (NV − ) centres formed in diamond crystals are point defects that have potential applications in various quantum devices such as highly sensitive magnetic sensors. To improve the sensitivity of magnetic sensors using NV − centres, it is essential to precisely control the nitrogen concentration in the crystals. In this paper, we demonstrated that nitrogen concentration in diamond can be controlled with high precision for the following two representative growth methods. One is the high-pressure/high-temperature (HPHT) synthesis method and the other is the chemical vapour deposition (CVD) method. The nitrogen concentration of HPHT-grown diamond decreased semi-logarithmically with increasing contents of titanium or aluminium as nitrogen getter materials. The nitrogen concentration of CVD-grown diamond increased linearly with increasing the flow rate ratio of nitrogen to carbon. NV − centres were formed by controlling the total fluence of electron beams so that approximately 20% of the nitrogen became NV − centres. The coherence time of electron spin of NV − centres obtained by the Hahn-echo pulse sequence T 2 of these diamond crystals was inversely proportional to the nitrogen concentration. A comparison of T 2 of the NV − centres for HPHT-synthesized and CVD-grown diamonds showed no significant difference between them. This article is part of the Theo Murphy meeting issue ‘Diamond for quantum applications’.

DOI
10.1098/rsta.2022.0322

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Negatively charged nitrogen-vacancy (NV − ) centres formed in diamond crystals are point defects that have potential applications in various quantum devices such as highly sensitive magnetic sensors. To improve the sensitivity of magnetic sensors using NV − centres, it is essential to precisely control the nitrogen concentration in the crystals. In this paper, we demonstrated that nitrogen concentration in diamond can be controlled with high precision for the following two representative growth methods. One is the high-pressure/high-temperature (HPHT) synthesis method and the other is the chemical vapour deposition (CVD) method. The nitrogen concentration of HPHT-grown diamond decreased semi-logarithmically with increasing contents of titanium or aluminium as nitrogen getter materials. The nitrogen concentration of CVD-grown diamond increased linearly with increasing the flow rate ratio of nitrogen to carbon. NV − centres were formed by controlling the total fluence of electron beams so that approximately 20% of the nitrogen became NV − centres. The coherence time of electron spin of NV − centres obtained by the Hahn-echo pulse sequence T 2 of these diamond crystals was inversely proportional to the nitrogen concentration. A comparison of T 2 of the NV − centres for HPHT-synthesized and CVD-grown diamonds showed no significant difference between them. This article is part of the Theo Murphy meeting issue ‘Diamond for quantum applications’.
To improve the sensitivity of magnetic sensors using negatively charged nitrogen-vacancy (NV−) centers, it is essential to improve the quality of diamond crystals and precisely control the nitrogen concentration in the crystals. We have utilized high-pressure, high-temperature synthesis [1] and chemical vapor deposition [2] for the growth of nitrogen-doped diamond. The concentration of substitutional nitrogen in the neutral charge state [NS0] were evaluated by electron paramagnetic resonance (EPR) measurements. As shown in Fig. 1, [NS0] were precisely controlled by the weight ratio of nitrogen getter material in the metal solvent for the HPHT method (Fig. 1(a)) and by the carbon to nitrogen gas ratio for the CVD method (Fig. 1(b)). Then, the diamond crystals were irradiated with electron beams followed by vacuum annealing so that 10% of the nitrogen at the substitutional site became NV− centers, and the negatively charged NV− centers were successfully formed preferentially [3]. T2 of these diamond crystals was inversely proportional to the nitrogen concentration. The product of T2 and nitrogen concentration of the obtained HPHT diamond crystal is slightly higher than the maximum value reported so far [4], suggesting that the crystal is expected to have high magnetic sensitivity.
Negatively charged nitrogen vacancy (NV−) centres in diamond crystals are promising colour centres for high-sensitivity quantum sensors. A long dephasing time (T2* > 10 μs) is essential for achieving increased sensitivity and higher uniformity of T2* in millimetre-scale diamond is strongly desired for femto-tesla weak magnetic field detection. High uniformity of T2* for NV− centres is achieved herein. The median value of T2*, <T2*>, in the 12C-enriched high-pressure, high-temperature (HPHT) grown diamond with a nitrogen concentration of 1.3 ± 0.4 ppm is 4.5 μs. The variance of T2* is only 10% over a millimetre-scale region (1.1 × 1.1 mm2) within the 0.4 mm thick {111} growth sector. <T2*> is ~2/3 times the value limited by the dipole-dipole interaction from the electron-spin bath of nitrogen impurities, suggesting that the residual strain gradient in the HPHT diamond crystal partially limits T2*. Reducing the strain gradient in diamond crystals provide a pathway to achievement of high sensitivity magnetometry using NV quantum sensing. Negatively charged nitrogen vacancy centres in diamond crystals are promising for achieving high-sensitivity quantum sensors. Here, a long dephasing time with high uniformity is achieved in a millimetre-scale area along the {111} plane using 12C enriched high-pressure high-temperature diamond crystals.
Abstract Ensembles of nitrogen-vacancy (NV) centres in diamond are a leading platform for practical quantum sensors. Reproducible and scalable fabrication of NV-ensembles with desired properties is crucial, as is an understanding of how those properties influence performance. This work addresses these issues by characterising nitrogen-doped diamond produced by the chemical vapour deposition (CVD) method across a range of synthesis conditions. This is shown to produce material with widely differing absorption characteristics, which is linked to the level of defects other than substitutional nitrogen (NS) and NV. In such material, the achievable concentration of NV− ([NV−]) is found to be influenced by the as-grown properties. At the 10–20 ppm level for [NS], the production of CVD-grown material with strain levels sufficient not to limit achievable device sensitivity is demonstrated and a favourable product of [NV−] and T 2 * is obtained. Additionally, reproducible properties over a batch of 23 samples from a single synthesis run are achieved, which appears promising for the scalability efforts underway in this area of research.
Abstract The nitrogen-vacancy (NV) center in diamond is a promising quantum system for magnetometry applications exhibiting optical readout of minute energy shifts in its spin sub-levels. Key material requirements for NV ensembles are a high NV − concentration, a long spin coherence time and a stable charge state. However, these are interdependent and can be difficult to optimize during diamond growth and subsequent NV creation. In this work, we systematically investigate the NV center formation and properties in bulk chemical vapor deposition (CVD) diamond. The nitrogen flow during growth is varied by over four orders of magnitude, resulting in a broad range of single substitutional nitrogen concentrations of 0.2–20 parts per million. For a fixed nitrogen concentration, we optimize electron-irradiation fluences with two different accelerated electron energies, and we study defect formation via optical characterizations. We discuss a general approach to determine the optimal irradiation conditions, for which an enhanced NV concentration and an optimum of NV charge states can both be satisfied. We achieve spin–spin coherence times T 2 ranging from 45.5 to 549 μ s for CVD diamonds containing 168 to 1 parts per billion NV − centers, respectively. This study shows a pathway to engineer properties of NV-doped CVD diamonds for improved sensitivity.
The sensitivity of magnetic and electric field sensors based on nitrogen-vacancy (NV) center in diamond strongly depends on the available concentration of NV and their coherence properties. Achieving high coherence times simultaneously with high concentration is a challenging experimental task. Here, we demonstrate that by using a temperature gradient method of high-pressure, high-temperature growing technique, one can achieve nearly maximally possible dephasing times, limited only by carbon nuclear spins at low nitrogen concentrations or nitrogen electron spin at high nitrogen concentrations. Hahn-echo T 2 coherence times were also investigated and found to demonstrate reasonable values. Thus, the high-pressure, high-temperature technique is a strong contender to the popular chemical vapor deposition method in the development of high-sensitivity, diamond-based sensors.
Abstract Diamond hosts a wide variety of colour centres that have demonstrated outstanding optical and spin properties. Among them, the nitrogen-vacancy (NV) centre is by far the most investigated owing to its superior characteristics, which promise the development of highly sophisticated quantum devices, in particular for sensing applications. Nevertheless, harnessing the potential of these centres mainly relies on the availability of high quality and purity diamond single crystals that need to be specially designed and engineered for this purpose. Plasma assisted chemical vapour deposition (CVD) has become a key enabling technology in this field of research. Nitrogen can indeed be directly doped in situ into a high crystalline quality diamond matrix in a controlled way, allowing the production of single isolated centres or ensembles that can potentially be integrated into a device. In this paper we will provide an overview of the requirements for synthesizing ‘quantum-grade’ diamond films using CVD. These include the reduction of impurities and surrounding spins that limit coherence times, the control of NV density in a wide range of concentrations as well as their spatial localization within the diamond. Enhancing the charge state and preferential orientation of the colour centres is also discussed. These improvements in material fabrication have contributed to positioning diamond as one of the most promising solid-state quantum systems and the first industrial applications in sensing are just starting to emerge.