Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Log inSign up
Challenges
Datasets
Workspaces
Papers
Discussions
Leaderboard
Blog
Job Board
Q3AS

© 2026 Aqora Quantum S.A.S.

TermsPrivacyLegal Notice

Superconductivity

32 × 32 NbN SNSPD array based on thermally coupled row-column multiplexing architecture

TianZhu Zhang, You Xiao, Huiqin Yu, Jia Huang, Chaolin Lv, Ling-Dong Kong, Xiaoyu Liu, Hao Li, Lixing You, Zhen Wang

Published Jul 24, 2023• 14 citations
Publisher

Abstract

We report a superconducting nanowire single-photon detector (SNSPD) array aiming for a near-infrared 1550-nm wavelength that consists of 32 × 32 nanowire pixels and an area of 0.96 mm × 0.96 mm. Unlike most reported large-scale SNSPD arrays with amorphous films, NbN superconducting nanowires are employed in our array, which allows the detector operation at 2.3K provided by a compact two-stage Gifford–McMahon cryocooler. Thermally coupled row–column multiplexing is employed in our arrays to avoid current redistribution and loss of electrical signal occurring in the electrically coupled row–column architecture. The fabricated detector array shows a pixel yield of 94% and maximal intrinsic efficiencies of 77% and 96% at 1550 nm and 405 nm, respectively. The timing jitter and the thermal coupling probability are also investigated.

DOI
10.1016/j.supcon.2023.100056

Related papers

Emerging materials for superconducting nanowire photon counting arrays

Umberto Nasti

Superconducting nanowire single-photon detectors (SNSPDs) are the leading technology for low noise, high efficiency infrared single-photon detection. The basic SNSPD consists of a nanowire patterned in an ultrathin superconducting thin film, which is cooled below its critical temperature and biased close to its critical current. The absorption of a single-photon creates a resistive region, triggering a fast output voltage pulse which can be readily amplified and registered. The excellent performance of SNSPDs at near-infrared and telecommunications wavelengths has led to their adoption in important applications such as quantum secure communications, single-photon spectroscopy and single-photon LIDAR. A clear challenge for the SNSPD community is to extend the spectral range of SNSPDs into the mid infrared, and to improve material uniformity to enable the realization of large area arrays for multimode or free space coupling. The aim of this work is to evaluate potential materials for next generation mid-infrared SNSPD arrays. In this work, thin films of polycrystalline NbN and amorphous MoSi have been optimized to test the uniformity of a multipixel array configuration composed of 8 nanowire meander structures covering 10 um x 10 um area, 100 nm width and 50% filling factor. The 8-pixels SNSPD arrays have been patterned on 8 nm thickness NbN grown on high resistivity silicon (HR Si) substrate at room temperature and at 800 °C exhibiting respectively 4.4 K and 7.3 K as mean critical temperature across the pixels. The 8- pixels SNSPD array patterned on 8 nm thickness MoSi cooling the HR Si substrate to -180 °C has exhibited a mean critical temperature of 3.2 K across the pixels. Optical properties have been measured by an attenuated 1550 nm laser diode source delivered by single mode optical fibre at a controlled distance from the chip in order to broadly illuminate the array. The optical properties have been studied only for the 8 nm thickness NbN SNSPD array grown at room temperature has demonstrated uniform optical properties across pixels exhibiting similar saturation of the internal efficiency over a large bias, similar dark count rate and similar timing jitter (about 137 ps) across pixels. In the single photon regime at 1550 nm, pixels 4 and 6 of the 8 nm thickness NbN SNSPD array exhibit 28.4% and 4.7% pixel detection efficiency as measured at the bias current 95% of their respective critical current at 2.2 K.

•Jan 1, 2020•0 citations

Development of practical superconducting nanowire single photon detector system with high detection efficiency

Shigehito Miki, Taro Yamashita, Hirotaka Terai +3 more

We have developed a practical superconducting nanowire single photon detector (SNSPD) system with our superconducting thin films and devices fabrication, optical coupling packaging, and cryogenic technology. The SNSPD devices were fabricated from high-quality niobium nitride (NbN) ultra-thin films that were epitaxially grown on single-crystal MgO substrates, and optical cavity structure were applied for improvement of photo absorption efficiency. The SNSPD system was developed based on a compact Gifford-McMahon (GM) cryocooler, in which SNSPD can operate continuously at temperature of 2.9 K +/- 10 mK with low power consumption without any liquid cryogens. The system detection efficiencies at 1550 nm wavelength (at a 100 Hz dark count rate) were found to be 2.6% for device without optical cavity and 21% for device with optical cavity. The response speed of devices showed maximally 200 MHz with 5 × 5 mm square device, and timing jitter of 100 ps full width at a half maximum (FWHM) was observed.

IEEE International Conference on Space Optical Systems and Applications (ICSOS)•May 1, 2011•0 citations

Sixteen-Pixel NbN Nanowire Single Photon Detector Coupled With 300-μm Fiber

Qi Henry Chen, Biao Zhang, Labao Zhang +9 more

Niobium nitride (NbN) nanowires have a high repetition rate and efficiency, making them ideal for superconducting nanowire single photon detectors (SNSPDs). However, it is difficult to fabricate NbN arrays over large areas, which is critical for various applications. This paper describes a 4 × 4 NbN SNSPD array (16 pixels) and optical coupling with a 300-μm-diameter multimode fiber using beam compression technology. This is the first NbN SNSPD coupled with such large-diameter fibers. The designed pixels are positioned as closely as possible (pixel filling factor about 98.5%), almost without dead area between them. This results in a system efficiency of 46% and a quantum efficiency of 94.5% for photons (λ = 1064 nm) coupled from multimode fibers. An intrinsic time resolution of less than 69 ps can be obtained. The proposed high-performance single photon detector is suitable for satellite laser ranging. Furthermore, the proposed system is feasible for large SNSPD arrays with NbN, paving the way for the development of efficient photon cameras with NbN nanowires.

IEEE photonics journal•Nov 21, 2019•12 citations

Superconducting Nanowire Single Photon Detector With Efficiency Over 60% for 2-μm-Wavelength

Hui Zhou, Yiming Pan, Lixing You +6 more

We demonstrate superconducting nanowire single photon detector (SNSPD) for the wavelength at around 2 μm. The linewidth of the NbN nanowire is squeezed to 56 nm to increase the intrinsic response efficiencies at longer wavelengths such as 2 μm. Serially connecting avalanche architecture is applied to increase the signal-to-noise ratio (SNR) of the response signal. Further, the optical cavity is optimized to improve the absorption of the device. A silica single-mode fiber is adopted to introduce photons to the SNSPD at a temperature of 2.25 K using a Gifford-McMahon cryocooler. The SNSPD exhibits detection efficiencies of 58%, 67%, and 63% at wavelengths of 1550, 1700, and 2000 nm, respectively, with dark count rate of ~12 kcps, which is reduced to 2 cps when the attached fiber pigtail is all placed inside the 40-K cryostat. The detection efficiency at 2000 nm is 2.5 times greater than that of the best previously developed detector with an efficiency of 25%. Our SNSPD is promising for practical applications in molecular science and earth meteorology.

IEEE photonics journal•Nov 29, 2019•11 citations

Scalable implementation of a superconducting nanowire single-photon detector array with a superconducting digital signal processor

Masahiro Yabuno, Shigeyuki Miyajima, Shigehito Miki +1 more

A two-dimensional single-photon imaging system with high sensitivity and high time resolution is the ultimate camera and useful in a wide range of fields. A superconducting nanowire single-photon detector (SSPD or SNSPD) is one of the best candidates for realizing such an ultimate camera due to its high detection efficiency in a wide spectral range, low dark count rate without after-pulsing, and excellent time resolution. Here we propose a new readout scheme to realize a large-scale imaging array based on SSPD, where a row-column readout architecture is combined with a digital signal processor based on a single-flux-quantum (SFQ) circuit. A 16-pixel row-column readout SSPD array is fabricated and measured with an SFQ digital signal processor. We successfully acquired spatial information as encoded digital bit codes with the temporal information of the photon detection. The system timing jitter was measured as <80 ps for all 16 pixels even through the SFQ signal processor, indicating the potential for an imaging array with an extremely high time resolution.

Optics Express•Apr 1, 2020•40 citations

Detecting single infrared photons toward optimal system detection efficiency

Peng Hu, Hao Li, Lixing You +7 more

Superconducting nanowire single-photon detector (SNSPD) with near-unity system efficiency is a key enabling, but still elusive, technology for numerous quantum fundamental theory verifications and quantum information applications. The key challenge is to have both a near-unity photon-response probability and absorption efficiency simultaneously for the meandered nanowire with a finite filling ratio, which is more crucial for NbN than other superconducting materials (e.g., WSi) with lower transition temperatures. Here, we overcome the above challenge and produce NbN SNSPDs with a record system efficiency by replacing a single-layer nanowire with twin-layer nanowires on a dielectric mirror. The detector at 0.8 K shows a maximal system detection efficiency (SDE) of 98% at 1590 nm and a system efficiency of over 95% in the wavelength range of 1530-1630 nm. Moreover, the detector at 2.1 K demonstrates a maximal SDE of 95% at 1550 nm using a compacted two-stage cryocooler. This type of detector also shows the robustness against various parameters, such as the geometrical size of the nanowire and the spectral bandwidth, enabling a high yield of 73% (36%) with an SDE of >80% (90%) at 2.1 K for 45 detectors fabricated in the same run. These SNSPDs made of twin-layer nanowires are of important practical significance for batch production.

arXiv:2009.14690•Optics Express•Nov 12, 2020•155 citations
We report a superconducting nanowire single-photon detector (SNSPD) array aiming for a near-infrared 1550-nm wavelength that consists of 32 × 32 nanowire pixels and an area of 0.96 mm × 0.96 mm. Unlike most reported large-scale SNSPD arrays with amorphous films, NbN superconducting nanowires are employed in our array, which allows the detector operation at 2.3K provided by a compact two-stage Gifford–McMahon cryocooler. Thermally coupled row–column multiplexing is employed in our arrays to avoid current redistribution and loss of electrical signal occurring in the electrically coupled row–column architecture. The fabricated detector array shows a pixel yield of 94% and maximal intrinsic efficiencies of 77% and 96% at 1550 nm and 405 nm, respectively. The timing jitter and the thermal coupling probability are also investigated.
Superconducting nanowire single-photon detectors (SNSPDs) are the leading technology for low noise, high efficiency infrared single-photon detection. The basic SNSPD consists of a nanowire patterned in an ultrathin superconducting thin film, which is cooled below its critical temperature and biased close to its critical current. The absorption of a single-photon creates a resistive region, triggering a fast output voltage pulse which can be readily amplified and registered. The excellent performance of SNSPDs at near-infrared and telecommunications wavelengths has led to their adoption in important applications such as quantum secure communications, single-photon spectroscopy and single-photon LIDAR. A clear challenge for the SNSPD community is to extend the spectral range of SNSPDs into the mid infrared, and to improve material uniformity to enable the realization of large area arrays for multimode or free space coupling. The aim of this work is to evaluate potential materials for next generation mid-infrared SNSPD arrays. In this work, thin films of polycrystalline NbN and amorphous MoSi have been optimized to test the uniformity of a multipixel array configuration composed of 8 nanowire meander structures covering 10 um x 10 um area, 100 nm width and 50% filling factor. The 8-pixels SNSPD arrays have been patterned on 8 nm thickness NbN grown on high resistivity silicon (HR Si) substrate at room temperature and at 800 °C exhibiting respectively 4.4 K and 7.3 K as mean critical temperature across the pixels. The 8- pixels SNSPD array patterned on 8 nm thickness MoSi cooling the HR Si substrate to -180 °C has exhibited a mean critical temperature of 3.2 K across the pixels. Optical properties have been measured by an attenuated 1550 nm laser diode source delivered by single mode optical fibre at a controlled distance from the chip in order to broadly illuminate the array. The optical properties have been studied only for the 8 nm thickness NbN SNSPD array grown at room temperature has demonstrated uniform optical properties across pixels exhibiting similar saturation of the internal efficiency over a large bias, similar dark count rate and similar timing jitter (about 137 ps) across pixels. In the single photon regime at 1550 nm, pixels 4 and 6 of the 8 nm thickness NbN SNSPD array exhibit 28.4% and 4.7% pixel detection efficiency as measured at the bias current 95% of their respective critical current at 2.2 K.
We have developed a practical superconducting nanowire single photon detector (SNSPD) system with our superconducting thin films and devices fabrication, optical coupling packaging, and cryogenic technology. The SNSPD devices were fabricated from high-quality niobium nitride (NbN) ultra-thin films that were epitaxially grown on single-crystal MgO substrates, and optical cavity structure were applied for improvement of photo absorption efficiency. The SNSPD system was developed based on a compact Gifford-McMahon (GM) cryocooler, in which SNSPD can operate continuously at temperature of 2.9 K +/- 10 mK with low power consumption without any liquid cryogens. The system detection efficiencies at 1550 nm wavelength (at a 100 Hz dark count rate) were found to be 2.6% for device without optical cavity and 21% for device with optical cavity. The response speed of devices showed maximally 200 MHz with 5 × 5 mm square device, and timing jitter of 100 ps full width at a half maximum (FWHM) was observed.
Niobium nitride (NbN) nanowires have a high repetition rate and efficiency, making them ideal for superconducting nanowire single photon detectors (SNSPDs). However, it is difficult to fabricate NbN arrays over large areas, which is critical for various applications. This paper describes a 4 × 4 NbN SNSPD array (16 pixels) and optical coupling with a 300-μm-diameter multimode fiber using beam compression technology. This is the first NbN SNSPD coupled with such large-diameter fibers. The designed pixels are positioned as closely as possible (pixel filling factor about 98.5%), almost without dead area between them. This results in a system efficiency of 46% and a quantum efficiency of 94.5% for photons (λ = 1064 nm) coupled from multimode fibers. An intrinsic time resolution of less than 69 ps can be obtained. The proposed high-performance single photon detector is suitable for satellite laser ranging. Furthermore, the proposed system is feasible for large SNSPD arrays with NbN, paving the way for the development of efficient photon cameras with NbN nanowires.
We demonstrate superconducting nanowire single photon detector (SNSPD) for the wavelength at around 2 μm. The linewidth of the NbN nanowire is squeezed to 56 nm to increase the intrinsic response efficiencies at longer wavelengths such as 2 μm. Serially connecting avalanche architecture is applied to increase the signal-to-noise ratio (SNR) of the response signal. Further, the optical cavity is optimized to improve the absorption of the device. A silica single-mode fiber is adopted to introduce photons to the SNSPD at a temperature of 2.25 K using a Gifford-McMahon cryocooler. The SNSPD exhibits detection efficiencies of 58%, 67%, and 63% at wavelengths of 1550, 1700, and 2000 nm, respectively, with dark count rate of ~12 kcps, which is reduced to 2 cps when the attached fiber pigtail is all placed inside the 40-K cryostat. The detection efficiency at 2000 nm is 2.5 times greater than that of the best previously developed detector with an efficiency of 25%. Our SNSPD is promising for practical applications in molecular science and earth meteorology.
A two-dimensional single-photon imaging system with high sensitivity and high time resolution is the ultimate camera and useful in a wide range of fields. A superconducting nanowire single-photon detector (SSPD or SNSPD) is one of the best candidates for realizing such an ultimate camera due to its high detection efficiency in a wide spectral range, low dark count rate without after-pulsing, and excellent time resolution. Here we propose a new readout scheme to realize a large-scale imaging array based on SSPD, where a row-column readout architecture is combined with a digital signal processor based on a single-flux-quantum (SFQ) circuit. A 16-pixel row-column readout SSPD array is fabricated and measured with an SFQ digital signal processor. We successfully acquired spatial information as encoded digital bit codes with the temporal information of the photon detection. The system timing jitter was measured as <80 ps for all 16 pixels even through the SFQ signal processor, indicating the potential for an imaging array with an extremely high time resolution.
Superconducting nanowire single-photon detector (SNSPD) with near-unity system efficiency is a key enabling, but still elusive, technology for numerous quantum fundamental theory verifications and quantum information applications. The key challenge is to have both a near-unity photon-response probability and absorption efficiency simultaneously for the meandered nanowire with a finite filling ratio, which is more crucial for NbN than other superconducting materials (e.g., WSi) with lower transition temperatures. Here, we overcome the above challenge and produce NbN SNSPDs with a record system efficiency by replacing a single-layer nanowire with twin-layer nanowires on a dielectric mirror. The detector at 0.8 K shows a maximal system detection efficiency (SDE) of 98% at 1590 nm and a system efficiency of over 95% in the wavelength range of 1530-1630 nm. Moreover, the detector at 2.1 K demonstrates a maximal SDE of 95% at 1550 nm using a compacted two-stage cryocooler. This type of detector also shows the robustness against various parameters, such as the geometrical size of the nanowire and the spectral bandwidth, enabling a high yield of 73% (36%) with an SDE of >80% (90%) at 2.1 K for 45 detectors fabricated in the same run. These SNSPDs made of twin-layer nanowires are of important practical significance for batch production.